MEMS MEMS Product update, March 2007 Product update, March 2007 Seak-Chuan To Advance Marketing CONFIDENTIAL
What are MEMS ? What are MEMS ? What are MEMS ? MEMS = M icro- E lectro- M echanical S ystem � Micro : Micro-fabrication Technology and dimensions � Electro-Mechanical : Electrical and Mechanical Components � Systems : integrating MEMS with ‘’chips’’, ie. I/O Controller Micro-Machining : technology to integrate MEMS into same silicon chip or same package. Stressed CONFIDENTIAL
How do we build MEMS? How do we build MEMS? ����������������������������� ��������� ������������� ������������ ������� ��������������� ������ CONFIDENTIAL
THELMA Process Flow THELMA Process Flow THick Epitaxial Layer for Micromotor and Accelerometer THick Epitaxial Layer for Micromotor and Accelerometer On a layer of silicon Growth of a silicon dioxide layer Etching to create holes Removing the sacrificial layer Deep Silicon Etching Growth of 15 um Epitaxial Layer CONFIDENTIAL
ST Capacitive Accelerometer ST Capacitive Accelerometer 1. MEMS Sensor : Acceleration � � Differential Capacitive Change � � 2. Interface IC : Differential Capacitive Change � � Output Signal � � ∆ C a a in V out ∆ C V Dual-chip Device Sensor Interface IC CONFIDENTIAL
Inertial Sensor Structure Inertial Sensor Structure stator1 rotor springs C s1 rotor C s2 stators anchors stator2 Dual Chip Device: CONFIDENTIAL
Three-axis accelerometer Three-axis accelerometer Z-axis X-Y axis Glassfrit ring Pads region CONFIDENTIAL
MEMS Linear Accelerometer Portfolio MEMS Linear Accelerometer Portfolio SOPackage(mm 3 ) QFN Packages (mm 3 ) LGA Packages (mm 3 ) LGA-8: 5x5x1.5 LGA-14: 3x5x0.95 SO-24: 7x15x2.5 QFN-28/44: 7x7x1.8 LIS2L02AS4 (2-axis) LIS2L02AQ3 (2-axis) - NOW LIS2L02AL (2-axis) - NOW Analog,PD Analog,PD Analog SO-24 QFN-44 LGA-8 2g/6g FS 15x7x2.6 mm 2g/6g FS 7x7x1.8 mm 2g FS 5x5x1.5 mm 2-axis LIS2L06AL (2-axis) - NOW 2-axis Analog LGA-8 2g/6g FS 5x5x1.5 mm Analog LIS3L02AS4 (3-axis) - NOW LIS3L02AQ3 (3-axis) - NOW LIS3L02AL (3-axis) - NOW Analog Analog,PD Analog,PD Analog SO-24 QFN-44 LGA-8 output 2g/6g FS 15x7x2.6 mm 2g/6g FS 7x7x1.8 mm 2g FS 5x5x1.5 mm output LIS3L02AS5 (3-axis) - NOW LIS3L02AQ5 (3-axis) - NOW LIS3L06AL (3-axis) - NOW Analog,PD Analog,PD Analog SO-24 QFN-44 LGA-8 2g/6g FS 15x7x2.6 mm 2g/6g FS 7x7x1.8 mm 2g/6g FS 5x5x1.5 mm LIS302ALB (3-axis) - NOW Analog LGA-14 3-axis 2g FS 3x5x0.95 mm 3-axis LIS302ALK (3-axis) - NOW Analog, PD LGA-14 2g FS 3x5x0.95 mm LIS3LV02DQ (3-axis) - NOW LIS3LV02DL (3-axis) - NOW SPI/I2C Digital SPI/I 2 C,PD SPI/I 2 C,PD QFN-28 LGA-16 SPI/I2C Digital 7x7x1.8 mm 7.5x4.4x0.95 mm Output 2g/6g FS 2g/6g FS Output & LIS302DL (3-axis) - NOW & SPI/I2C,PD LGA-14 Smart Sensors Smart Sensors 3x5x0.95 mm 2g/8g FS CONFIDENTIAL Legend: Part_no (# of Axis) –Ready for production
Possible System Partitioning w ST Possible System Partitioning w ST Accelerometer Accelerometer Sensor Chipset DIGITAL DSP I 2 C/SPI I 2 C/SPI A/D CPU FREE FALL DSP Interrupt GPIO CPU DSP A/D Analog MUX ANALOG GPIO x2 CPU DSP Analog A/D MUX CPU CONFIDENTIAL
Analog Output - Three Axis Accelerometer 66KHz 200KHz S1x G x OUT x S2x S1y OUT y G y Charge DE MUX G R amplifier MUX S2y OUT z Gz S1z Voltage and Trimming Circuit Clock & Phase Current & poly fuses S2z Generator Reference CONFIDENTIAL
Digital Output - Three Axis Accelerometer S1x CS S2x Reconstruction Σ∆ Σ∆ Σ∆ Σ∆ SCL/SPC Filter I2C/SPI Charge SDA/SDIO Interface SDO amplifier S1y DE Reconstruction Regs Σ∆ Σ∆ Σ∆ Σ∆ MUX R Filter MUX Array Contol Logic & RDY/INT Interrupt S2y Generat. Reconstruction Σ∆ Σ∆ Σ∆ Σ∆ Filter S1z Voltage and Trimming Circuit Clock & Phase Current & Test Interface S2z Generator Reference CONFIDENTIAL
Device Manufacturing Flow Device Manufacturing Flow STMicro STMicro STMicro STMicro Mech � Product Testing Testing & Interface Calibrat. GOOD Testing PRODUCT Manufact. Testing Packaging Testing TO By By By By CUSTOMER STMicro. STMicro. STMicro. STMicro. STMICROELECTRONICS MANAGES: STMICROELECTRONICS MANAGES: 1. ALL THE SUPPLY CHAIN OF “LGA” FAMILY 1. ALL THE SUPPLY CHAIN OF “LGA” FAMILY 2. GUARANTEES LONG-TERM SECURITY OF SUPPLY 2. GUARANTEES LONG-TERM SECURITY OF SUPPLY CONFIDENTIAL
Key advantages of Key advantages of Key advantages of ST- -MEMS Technology MEMS Technology ST ST-MEMS Technology � Technology Roadmaps � Strategic Cost � MECHANICAL SENSOR � Low Power � INTERFACE IC Consumption � PACKAGE � Low Size & Weight � ASSEMBLY � High Volumes � High integration with � High Reproducibility standard IC devices to built Multi Chip Modules (MCM) or � High Thermal Stability smart sensors by design CONFIDENTIAL
MEMS Accelerometer- Main Applications MEMS Accelerometer- Main Applications Vibration & Tilt Measurement White Goods, Industrial HDD data protection, Data protection, & Medical map/document scrolling, menu antitheft navigator, portrait-Landscape Mobile, PDAs, switch HDD MP4/MP3 MEMS Automotive Accelerometers Laptop Assisted navigation, antitheft Vibration Motion Fall detection, shock sensor, antitheft Consumer Image scrolling, gaming, sport monitoring etc… CONFIDENTIAL
Many functions- only ONE sensor! CONFIDENTIAL
ST MEMS for Micro HDD Free Fall / ST MEMS for Micro HDD Free Fall / Shock Protection Shock Protection ST MEMS Sensor is used to sense shock and free-fall in order to prevent the HDD head/media damage by stopping read/write and parking the head before the impact. CONFIDENTIAL
MEMS Free-Fall detection MEMS Free-Fall detection X Axis (mg) Free-Fall Event window Y Axis (mg) Z Axis (mg) Generated Interrupt signal Free Fall Detection MEMS digital Accelerometer will automatically generates an interrupt signal toward the system informing about “FREE FALL EVENT OCCURRED” CONFIDENTIAL
Man Machine Interface Man Machine Interface ����������������������������������� �������� CONFIDENTIAL
Picture Browsing Picture Browsing Photo Album � The screen acts as a viewing window that the user moves to explore the documents. � Zoom in/out by moving the terminal closer or away. � The reference point can be changed by pressing a single button while moving the terminal. � Jump to the previous/next document by pressing a button while moving the terminal aside. Panoramic photo � � The screen acts as a viewing window that the user moves in order to explore the picture. The screen acts as a viewing window that the user moves in order to explore the picture. � � Zoom in/out Zoom in/out by moving the terminal closer or away. by moving the terminal closer or away. � � The reference point can be changed by pressing a button while moving the terminal. by pressing a button while moving the terminal. The reference point can be changed � � Double- -clicking clicking selects part of the object or pop selects part of the object or pop- -up a contextual menu. up a contextual menu. Double CONFIDENTIAL
Browsing complex objects Browsing complex objects Common features � The screen acts as a viewing window that the user moves to explore the map/object/document. � Zoom in/out by moving the terminal closer/away. � The reference point can be changed by pressing a single button while moving the terminal. Map browsing � Rotate the terminal for best visibility while the map stays horizontal. � Double-clicking selects a place/service on the map and/or pop-up a contextual menu. Motion-based browsing of a 3D object � Double-clicking selects part of the object and/or pop-up a contextual menu. The END Browsing multiple documents (i.e. emails) � Jump to the previous/next document by pressing a button while moving the terminal closer/away. CONFIDENTIAL
Gaming Gaming Motion-based maze game � The terminal’s movements make the red ball to roll down and progress through the make. � Jumping to pass holes is done applying quick bottom-up movements. Motorbike race � Rotate the terminal left or right to turn. Like for a real motorbike, the effect is proportional to the inclination. � Push or pull the terminal to accelerate or to brake. � Zoom in/out is done just by moving the display closer or away. 3D (Doom-like) � Move the terminal in all the directions to navigate into the game and reduce the amount of buttons to handle. � Interfacing configurable by the user. For example, tilting forward/backward the terminal results: � either in looking down/up � either in going forward/backward CONFIDENTIAL
Recommend
More recommend
