Impact of SOI technology and its European Ecosystem on upcoming 5G François BRUNIER, SOITEC Partnership Program Manager
Soitec 1 03/12/2019 2 IPSoC Grenoble SOI for 5G
Soitec – Designer & Manufacturer of Innovative Semiconductor Material 1,450 Employees Worldwide GLOBAL PRESENCE 4 High-growth Markets “ SMARTPHONES, AUTOMOTIVE, CLOUD & INFRASTRUCTURE, IOT 2 We design and Unique Technologies Core expertise deliver innovative SMART CUT, SMART STACKING Epitaxy, Compound semiconductors substrates & solutions to enable our customers’ Wafer fabs 6 300-mm – France (Bernin II) + Singapore* products shaping ” 200-mm – France (Bernin I) + China (via Simgui) everyday life 150 mm – France (Bernin III) 150 – 200-mm GaN Epitaxial wafers – Belgium (EpiGaN) CAPABILITY 1 Largest manufacturer of engineered substrates LEADER 03/12/2019 3 IPSoC Grenoble SOI for 5G
Substrates in the value chain Engineered substrates IC Silicon Starting die processed with millions of PCB wafers transistors wafer with multiple raw dice per wafer 03/12/2019 4 IPSoC Grenoble SOI for 5G
A broad portfolio of engineered substrates RF PROCESSOR & FRONT-END CONNECTIVITY PIEZO-ON- GaN MODULE SOC POWER PHOTONICS IMAGERS INSULATOR GaN RF-SOI FD-SOI Power-SOI Photonics-SOI Imager-SOI POI For radio frequency For power-efficient For highly efficient For high For high voltage For high perf. For improved (RF) 5G and power mobile integration of digital/ device integration photonics device imager performance 5G systems communication analog/RF integration into performance in NIR filters silicon Silicon-On-Insulator products Piezo & compound products 03/12/2019 5 IPSoC Grenoble SOI for 5G
RF-SOI in 100% of Smartphone A success story based on innovation 2018 & … 2016 2012 2011 2009 2005 1992 - Soitec 300mm - RF switch on ramp - Soitec HR-SOI: SOI becomes - 1 st 100 thousands industry commercial RF wafers (8’’ eq) mainstream - Trap Rich switch on SOI - Soitec Trap Rich - 3 rd Gen SOI UCL (Skyworks, - Soitec RF-SOI : - Soitec ‘RFeSi’ Ramp Soitec HR-SOI and RFMD…) moving to 1 million Smart Cut™ Soitec IP wafers (8’’ eq) SOI with CEA- - FEM global LETI development - HR-SOI for plateform RF with UCL 03/12/2019 6 IPSoC Grenoble SOI for 5G
RF-SOI and FD-SOI: key technologies for 2 upcoming 5G 03/12/2019 7 IPSoC Grenoble SOI for 5G
Move to 5G To get new services and applications Core network Cellular market Broadband access New markets opportunities Device-to-device connectivity IoT Beyond terresrial markets Worldwide broadband access 03/12/2019 8 IPSoC Grenoble SOI for 5G
5G applications KPIs High frequency, High RF power, High data rate, Power efficiency Cellular market Automotive market Automotive Radar Gesture Broadband access 5G Cellular 5G Terrestrial Car connectivity & Connectivity, C-V2X Handset connectivity Infrastructure Recognition radar 600Mhz-6Ghz // 26GHz - 600Mhz-6Ghz // 5.9GHz / 24GHz / 120GHz-150GHz 39GHz 26GHz - 90GHz 77-79GHz 1mW-10mW 100mW-1W 1W – 100W 100mW -10W 1M – 10G 10G-100G New markets opportunities Beyond terrestrial markets Airplane Satellite Com Worldwide broadband access Device-to-device connectivity Low Power connectivity Infrastructure Connectivity IoT 1GHz / 10- 10-20GHz 100MHz- 60Ghz 20GHz 10W-100W <10mW-100mW 100M -100G 10mW -10W 100 – 1G 10M -100G 03/12/2019 9 IPSoC Grenoble SOI for 5G
5G technology landscape a key card for Europe Example : capacity Analysis US Mobile Network TB/Mo 20 5G is serving mobile data traffic using two spectrum 18 16 14 ‘5G Phase 1’ : < 6Ghz keeps optimizing 4G techniques : continuous 12 improvement 10 8 ‘5G Phase 2’ : mmW(> 30GHz) disruption with opportunities for new 6 4 technologies 2 0 2019 2020 2021 2022 2023 2024 2025 2026 2027 Europe has taken significant steps to lead global developments towards this 4G 5G < 6GHz 5G mmW strategic technology. Radio Frequency Silicon-on-Insulator ( RFSOI ) platforms based on both PD-SOI and FD-SOI BiCMOS and GaN technologies also strongly rooted in Europe These technologies deliver solutions for the new 5G spectrum: [<6GHz mmWave up to > 100GHz] PD-SOI and FD-SOI are potential standards for future 5G-mmWave handsets, base stations, Femto Cells for IoT, but also enablers in new RF domains for sensing and communications beyond 5G 03/12/2019 10 IPSoC Grenoble SOI for 5G
5G <6Ghz #1 SOI market for Smartphones applications RF-SOI average area (mm²) in a front end module per cellular generation RF-SOI wafer market (8” eq) 5G<6GHz NSA Switches Tuners LNA CA DL & UL 2,5 M wafers MIMO 4x4 LTE A PRO 60 <6Ghz Bands Switches 4G Tuners 1,4 M wafers LNA 50 CA 5x DL 5G vs 4G MIMO 4x4 FEM BoM 40 LTE A CAGR 15% Switches Tuners 30 LNA LTE Switches 20 3G Tuners 2018 ASM 2G 10 ASM 2022 0 Source : Qorvo, Oct 2019 2010 2012 2014 2016 2018 2020 Volume handset sales Low End Mid End High End today per market segment RF-SOI keeps growing at 15% CAGR beyond 2.5 M wafers 03/12/2019 11 IPSoC Grenoble SOI for 5G
5G <6Ghz SOI an enabler for new applications RF Technology landscape RFFE IoT system requirement RFSOI Source: NB-IoT RFFE forecast estimation, Navian 2019 Challenge to aggregate new applications: e.g. NB-IoT FEM – 20% CAGR 03/12/2019 12 IPSoC Grenoble SOI for 5G
5G mmW – Market opportunities and technologies positioning Challenges Solutions Market 5G mmW Smartphones Consumption Cost Market TAM (*) : >2 millions wafers Integration 300mm (>2 SOI fonderies) 5G mmW base station Reliability Consumption Market TAM (*) : >100K wafers 300mm (*) : estimations Soitec (TAM for Total Available Market = 100% market share, 100% market adoption) IWPC 5G mmW white paper, 2019 RF-SOI and FD-SOI well positioned for handset (UE) and low / medium range cells 03/12/2019 13 IPSoC Grenoble SOI for 5G
5G mmW: technology integration potential FD-SOI and RF-SOI assessed by all market leaders Front-end module Transceiver Modem Conversion +DFE Antenna array Phase PA shifter Power Up/Down BB Switch ADC/DAC DFE splitter conv Phase LNA shifter PLL X 4 to 2056 X 4 to 2056 X 1 X 4 to 2056 X 4 to 2056 X 1 X 1 X 1 X 4 to 8 X 4 to 8 GaN GaN GaAs GaAs mmW RFSOI sub 65nm / SiGe mmW RFSOI sub 65nm / SiGe Different system architecture : trade off on • performance FDSOI sub 28nm • cost • FDSOI sub 18nm Area / weight • Players IP / know-how Bulk ‘limited performance – thermal issues’ FF FF FF 03/12/2019 14 IPSoC Grenoble SOI for 5G
5G mmW handset High volume in 2022-23 RF Technology landscape 5G mmW RFFE handset Source: C-V2X (connected automotive perspective), Navian 2019 03/12/2019 15 IPSoC Grenoble SOI for 5G
5G mmW infrastructure RF-SOI <65nm and FD-SOI well positioned RF Technology landscape 5G mmW SoC requirement mMIMO Source: C-V2X (connected automotive perspective), Navian 2019 03/12/2019 16 IPSoC Grenoble SOI for 5G
Radar FD-SOI ideally positioned in the CMOS approach RF Technology landscape mmW automotive radar requirement Automotve Radar Market, split per technology (Source Yole 2019) 03/12/2019 17 IPSoC Grenoble SOI for 5G
Value chain programs in EU 3 To demonstrate competitive advantage at End-User level 03/12/2019 18 IPSoC Grenoble SOI for 5G
Program REFERENCE ECSEL RIA: 2016-2019 GOAL Develop innovatve RF-SOI substrates & technologies (Including move to 300mm) enabling realizaton oo integrated Front End modules , and system level demonstrators oor cellular, Aeronautcs, paving the way to 5G. 03/12/2019 19 IPSoC Grenoble SOI for 5G
REFERENCE OUTCOMES SOI technology – SOI Foundry – System design Mono-crystal Top Silicon RFSOI IC RFSOI IC FEM FOWLP FEM FOWLP Mono-crystal Top Silicon packaging packaging Thin Buried Oxide integration materials integration materials Thin Buried Oxide ATEP / Leti Trap Rich Layer ATEP / Leti Trap Rich Layer High Resist ve Base High Resist ve Base 200mm 200mm 130nm RF-SOI RF- SOI 130nm RF-SOI RF- SOI (ST) New Trap rich Materials 100dBm (ST) New Trap rich Materials 100dBm HD2 HD2 RF IN (from PLL) Power Divider PCB 4x Amplif er PCBs 2x Combiner PCBs 300mm 300mm EPI trap rich layer 300mm 300mm EPI trap rich layer RF- SOI over HR bulk (> 15 kΩcm) for RF- SOI over HR bulk (> 15 kΩcm) for Mainboard with 4 Phaseshif ers 4K BOX RF-SOI 4K BOX RF-SOI Dif. RF OUT 3D printed Parts to (Balun+)Antenna and 2K and 2K Aeronautic high-speed gate link 4.2-4.4 GHz Aeronautic high-speed gate link 4.2-4.4 GHz BOX BOX 1st 1st 300mm Specific HR Base for 300mm Specific HR Base for FD-SOI FD-SOI FDSOI (1 st trial) FDSOI (1 st trial) HR HR 22-FD-SOI with 22-FD-SOI with HR Base (GF) HR Base (GF) 03/12/2019 20 IPSoC Grenoble SOI for 5G
Program OCEAN12 ECSEL IA: 2018-2021 GOAL Secure FDSOI Roadmap in Europe Development of a FDSOI based technology platform offering the lowest power consuming processors and answering embedded applications requirements in automotive and aeronautics 03/12/2019 21 IPSoC Grenoble SOI for 5G
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