E n a b l i n g N e w H o r i z o n s Integrated Waste Reduction Program for Semiconductor Facilities Hartmut Schneider & Peter Csatáry High-Tech Facility International Forum, Semicon Taiwan, 8 th September 2016
M+W Group at a Glance Leading global engineering and construction company Unique skillset in the delivery of complex technology-intensive factories and facilities Special expertise in cleanroom technology and controlled environments Established in Germany in 1912 Figures 2015 Order Intake: € 3 bn € 3 bn Sales: Employees: 6,000 Mission Statement Mission Statement: “M+W creates customer value through a unique combination of lean and sustainable, high-technology engineering and project management solutions in an injury-free environment .” 2 September 2016 Source: M+W Group
Challenges in a Changing Industry... and More Sustainability “ Nanoelectronics Everywhere” has created new high volume semiconductor user groups Internet of Things (IoT): First wide-spread applications Medical, Agriculture, Traffic, Smart energy and homes Diversification of process technologies & applications In particular, high volume consumer markets drive: Flexible manufacturing Environmental-friendly green products Corporate Social Responsibilities Growing environmental discharge limitations International/national laws & corporate governance Reduction of waste while maintaining cost-efficiency. 3 September 2016 Source: M+W Group
Evaluation of Waste Reduction Measures Life Cycle Assessment (LCA) Modeling LCA is a systematic technique for the evaluation of (potential) environmental impacts associated with products, processes or services over their entire life cycle. Defined in ISO 14040 and ISO 14044 Calculate the Identify Assess, compare, environmental environmental optimize design performance hotspots options • How big is the carbon footprint? • Where is the environmental • Which option is more impact coming from? sustainable? • How much water is used? • What is the biggest impact? • How can I improve my • What are my KEPIs? environmental performance? LCA enables one to make environmentally sound decisions. 4 September 2016 Source: M+W Group
Life Cycle Assessment (LCA) Modeling Operation Phase Dominates CO2 Footprint Calculated Relative Contribution to Wafer Fab Life Cycle CO2 Footprint Outputs Emissions (CO 2 , SO 2 , ..), Waste Water, Solid Waste, Waste Heat, Noise Decommissioning Construction Operation 88% 4% 8% Steel 4% 77% Concrete 2% Supply Transport 1% Production 7% Transport 2% Others 1% Disposal 4% Maintenance Others 2% Extraction of Manufacturing Use End-of-life raw materials Inputs Resources , Energy, Water, Materials, Land 5 September 2016 Source: M+W Group
Integrated Waste Reduction for Facility Systems General Overview & Examples Water Energy Cu Reclaim Efficiency Efficiency MAHU Cooling Solar Optimization Heating Organic Concrete Free Sanitary WW Cooling Solar Cooling Exhaust recycling Cooling Decentralized GEX-MAHU Slurry Treatment RAHU Low Chemistry Photovoltaic Energy Recovery Ground Scrubber Building (Water) Tightness Cooling Heat Exchanger WW Treatment Advanced Temperature Heat Recovery Cooling Water HF-Treatment Optimization High Temperature Chilled Water Heat Recovery PCW Temperature N2 Storage Optimization Cu-WW Drain Treatment Cogeneration Segregation UPW Trigeneration Water re- & Solvent Waste Production down cycling Treatment UPW Ammonia Recycling Reclaim Abbreviations: TMAH Reclaim MAHU = Make-up air handling unit, RAHU = Recirc air handling unit SEMI-Product GEX = General exhaust, Building Materials Materials Facility ACEX = Acid exhaust, Consumables CAEX = Caustic exhaust PCW = Process cooling water, Materials / Chemicals / Consumables Efficiency UPW = Ultra pure water, WWT = Wastewater 7 September 2016 Source: M+W Group
High Leverage Waste Reduction Measures UPW and Waste Water Systems Non-Potable Water Supply Central Make-up Air Handling Units 1 Condensate & Washers Scrubbers UPW & UPW Recycling Post-filtered Condensate 15% 1% 23% 1% 10% 50% Air Washers Local Films CMP/ Wet Wet Wet Photo Etch Scrubbers Diff. Backgr Strip Clean 1 Electro De-Ionization Sub-Fab Cleanroom Advanced Drain 9% 40% 10% <1% 25% 15% 2 Segregation Rinse Diluted Slurry Drains Diluted IWW Drains Diluted HF Drains CMP Waste Concentrated Drains 3 2 3 Local Treatment Scrubber DI Reclaim Water Re-Use Reclaim Ammonia Waste 4 4 Treatment Waste Water Treatment Concentrated Cooling (HF / IWW / Slurries) Waste Towers Sewer Additional measures can substantially improve overall site water recycling ratios from 50% to >75%. 8 September 2016 Source: M+W Group
Low-Chem UPW Make-Up Electro De-Ionization Comparison based on installed systems for a major semiconductor facility, 1 similar raw water inlet quality and UPW specifications Raw Water To MAHU Washer DI Reclaim UPW RO / UPW Polishing / DI Water Recycling To Central Scrubber To IWW To Cleanroom / Sub-Fab Description Standard Low Chem Pros & Cons Chemical Usage Higher Lower 80% Reduction Energy Cons. Lower Higher 35% Increase Water Demand Higher Lower 10% Reduction Footprint Larger Smaller 25% Reduction CAPEX Higher Lower 5% Reduction OPEX Higher Lower 3.5% Reduction Source: M+W Group. Actual comparison for a semiconductor facility based on Source: Waterworld, April 2016 same raw water inlet quality and UPW specifications 9 September 2016 Source: M+W Group
Waste Water Systems Advanced Segregation - High TOC Rinse Discrete rinse segregation required for high concentration organics 2 Additional CAPEX for a dedicated drain collection system and advanced reclaim plant Sub-Fab Cleanroom Local Films / CMP / Photo Wet Etch Wet Strip Wet Clean Scrubbers Diffusion Backgrind High TOC Rinse Description Reclaim Rates Conventional Rinse Reclaim ~ 25% Rinse High TOC Rinse Reclaim ~ 6% additional HE- BD™ Conventional Reclaim System 6 % 25% To UPW Plant 10 September 2016 Source: M+W Group
Waste Water Systems High TOC Rinse Treatment High efficiency reclaim for high organics (µ >95%) 2 Fast biological digestion (BD) system utilizing a SiC-based membrane TOC removal >99% and zero toxic waste using H 2 O 2 resistant bacteria strains Sub-Fab Cleanroom Local Films / CMP / Wet Clean Photo Wet Etch Wet Strip Scrubbers Diffusion Backgrind High TOC Rinse (1 … 100 ppm ++) (IPA, Acetone, NMP, TMAH, Triazoles, Urea, MEK) H 2 O 2 : …500 ppm HE-BD TM Description Comments 6 % Chemical Usage Low Energy Cons. Low Bio OVIVO filter Water Demand Reduced >95 % reclaim possible biomass SiC Aeration Footprint < 50 m 2 Sludge CAPEX < 5 M USD Add. segregation & plant de- hydration Filtrate OPEX Small Low chem. & energy cons. 6 % Tank TOC: < 0.2 ppm ROI < 24 months For plant only H 2 O 2 : < 1 ppm (to UPW Plant) Air HE- BD™ System by OVIVO 11 September 2016 Source: M+W Group
Waste Water Systems Discrete Oxide/Tungsten CMP Drain Segregation CMP buffing and cleaning waste water can be reclaimed for UPW 3 Discrete drain segregation required at CMP Polisher & Cleaner Mainframe Sub-Fab Cleanroom Ox/W CMP Local Films / Wet Strip Wet Clean Polisher Photo Wet Etch Scrubbers Diffusion & Cleaner 9 % Buffing Drain Cleaner Drain Description CMP Segr. Comments Chemical Usage Neutral Slurry Drain Energy Cons. Low Ultra Filtration / Ion Exchange Water Demand Reduced >95 % reuse possible < 60 m 2 Footprint CAPEX < 8 M USD Add. segregation & plant WW 3.4 % Treatment (to reuse) OPEX Small Low chem. & energy cons. ROI < 24 months For plant only 5.6 % (to UPW Plant) Concept Proposal by OVIVO 12 September 2016 Source: M+W Group
Process Exhaust Waste Reduction Opportunities Opportunity Description Status Potential Considerations Waste Red. Heat exhaust Non-toxic exhaust discharged In Medium Non-hazardous exhaust only. CAPEX saving recycling into recirculation airstream Operation potential (MAHU, chillers, boilers etc.) PFC recycling Etch/CVD chamber cleaning Prototype High Reduced global warming gases. High gases purification requirements. Dynamic Exhaust Multiple actuated dampers at Concept Medium Increased CAPEX for dampers & FMCS Volume Control process tools system Scrubber heat Pre-cooling of MAHU air Concept Medium Regional dependent. Reduced chiller recovery (~16ºC => 1 MW) capacity, plus heat recovery system CAPEX EXVO heat recovery Approx. 200ºC available for pre- Prototype Low Reduced boiler capacity, plus heat recovery heating hot water (~0.4MW) system CAPEX Reclaimed Scrubber Process waste water containing Concept Low Low potential waste streams and additional Chemicals H2SO4 and NaOH segregation Solvent waste reuse Low Fuel for EXVO (solvent exhaust Other Low concentrated solvent waste discharge treatment) or boilers industries volumes. Example: GEX-Recycling 290,000 m³/h (30% of total GEX) Heat Exhaust Recycling Electrical Power Saving 1,970 MWh/a Natural Gas Savings 284,000 m³/a CO2 Emission Savings 1,500 t/a 300,000 €/a Operation Cost Savings Chiller & Cooling Tower Capacity Savings 3,000 kW 14 September 2016 Source: M+W Group
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