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IEEE/SEMI Advanced Semiconductor Manufacturing Conference Performance Evaluation of Serial Photolithography Clusters: Queueing Models, Throughput and Workload Sequencing James R. Morrison Central Michigan University Department of Engineering

  1. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Performance Evaluation of Serial Photolithography Clusters: Queueing Models, Throughput and Workload Sequencing James R. Morrison Central Michigan University Department of Engineering and Technology Beverly S. Bortnick Donald P. Martin IBM, Systems and Technology Group ASMC 2006 – Boston, Massachusetts May 22-24, 2006 1

  2. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Presentation Overview • Basic serial processing cluster tool model • Queueing models and the mean cycle time • Throughput and common practical events – Empty modules – Completely idle cluster – Lot specific processing times • Concluding remarks ASMC 2006 – Boston, Massachusetts May 22-24, 2006 2

  3. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Serial Processing Cluster Tools • Wafers arrive in lots containing W wafers each M processing modules each with process time = D • • Wafers proceed sequentially from one module to the next Wafer Handling Robot Wafers m 1 m 2 m 3 m 4 m 5 m 6 m 7 Enter m 8 m 9 Wafers m 16 m 15 m 14 m 13 m 12 m 11 m 10 Exit ASMC 2006 – Boston, Massachusetts May 22-24, 2006 3

  4. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • m 1 m 2 m 3 m 4 m 5 m 6 m 7 m 8 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 4

  5. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 1 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 0 m 8 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 5

  6. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 2 1 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 D m 8 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 6

  7. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 3 2 1 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 2D m 8 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 7

  8. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 4 3 2 1 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 3D m 8 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 8

  9. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 5 4 3 2 1 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 4D m 8 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 9

  10. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 6 5 4 3 2 1 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 5D m 8 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 10

  11. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 7 6 5 4 3 2 1 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 6D m 8 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 11

  12. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 8 7 6 5 4 3 2 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 7D 1 m 8 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 12

  13. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 1 8 7 6 5 4 3 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 8D 2 m 8 1 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 13

  14. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 2 1 8 7 6 5 4 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 9D 3 m 8 1 2 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 14

  15. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 3 2 1 8 7 6 5 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 10D 4 m 8 1 2 3 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 15

  16. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 4 3 2 1 8 7 6 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 11D 5 m 8 1 2 3 4 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 16

  17. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 5 4 3 2 1 8 7 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 12D 6 m 8 1 2 3 4 5 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 17

  18. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 6 5 4 3 2 1 8 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 13D 7 m 8 1 2 3 4 5 6 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 18

  19. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 7 6 5 4 3 2 1 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 14D 8 m 8 1 2 3 4 5 6 7 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 19

  20. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 8 7 6 5 4 3 2 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 15D 1 m 8 2 3 4 5 6 7 8 m 15 m 14 m 13 m 12 m 11 m 10 m 9 M D First wafer exits the tool ASMC 2006 – Boston, Massachusetts May 22-24, 2006 20

  21. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 1 8 7 6 5 4 3 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 16D 2 m 8 3 4 5 6 7 8 1 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 21

  22. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 2 1 8 7 6 5 4 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 17D 3 m 8 4 5 6 7 8 1 2 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 22

  23. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 3 2 1 8 7 6 5 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 18D 4 m 8 5 6 7 8 1 2 3 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 23

  24. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 4 3 2 1 8 7 6 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 19D 5 m 8 6 7 8 1 2 3 4 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 24

  25. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 5 4 3 2 1 8 7 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 20D 6 m 8 7 8 1 2 3 4 5 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 25

  26. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 6 5 4 3 2 1 8 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 21D 7 m 8 8 1 2 3 4 5 6 m 15 m 14 m 13 m 12 m 11 m 10 m 9 ASMC 2006 – Boston, Massachusetts May 22-24, 2006 26

  27. IEEE/SEMI Advanced Semiconductor Manufacturing Conference Basic Serial Cluster Tool Behavior Serial cluster tool with: • M = 15 • W = 8 Process time per module = D • 7 6 5 4 3 2 1 Time: m 1 m 2 m 3 m 4 m 5 m 6 m 7 22D 8 m 8 1 2 3 4 5 6 7 m 15 m 14 m 13 m 12 m 11 m 10 m 9 (M+W-1) D First lot is complete ASMC 2006 – Boston, Massachusetts May 22-24, 2006 27

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