MEMS-Based Resonators and Oscillators are Now Replacing Quartz - PowerPoint PPT Presentation

MEMS-Based Resonators and Oscillators are Now Replacing Quartz Dr. Aaron Partridge SiTime Corp. ISSCC February 20, 2012

My purpose is to convince you that MEMS timing is here now. MEMS will r eplace quar t z oscillat or s in m ost applications. The value add is strong enough t o t r ansfor m an indust r y . Aaron Partridge MEMS-Based Resonators and Oscillators 2 of 16 are Now Replacing Quartz

Ecliptek MEMS Oscillators: Quartz Oscillators: o Plastic QFN package o Ceramic/ metal package o Silicon MEMS die and o Quartz plate and driver CMOS die circuit o Standard IC fabs o Dedicated factories Aaron Partridge MEMS-Based Resonators and Oscillators 3 of 16 are Now Replacing Quartz

Corner Center Edge o Like a 2D bell – held in the center with its outer edges ringing. Motion is a few nanometers. o Buried inside the chip, not on the surface. Aaron Partridge MEMS-Based Resonators and Oscillators 4 of 16 are Now Replacing Quartz

o kHz MEMS tuning forks for apps now served by 32kHz quartz tuning forks. o Driven with sub-microamp supply currents. Aaron Partridge MEMS-Based Resonators and Oscillators 5 of 16 are Now Replacing Quartz

Chip Surface Encapsulation Resonator Aaron Partridge MEMS-Based Resonators and Oscillators 6 of 16 are Now Replacing Quartz

MEMS Resonator CMOS Circuits Prog Config Sustaining I/O Regs Vcc &OE PROM Amp Temp Frac GND Control Dvr Clk Sensor PLL Aaron Partridge MEMS-Based Resonators and Oscillators 7 of 16 are Now Replacing Quartz

Aaron Partridge MEMS-Based Resonators and Oscillators 8 of 16 are Now Replacing Quartz

o Tremendous Flexibility o New features o Delivered performance o Short lead times o Exceptional quality and reliability o Low cost, high value Aaron Partridge MEMS-Based Resonators and Oscillators 9 of 16 are Now Replacing Quartz

Aaron Partridge MEMS-Based Resonators and Oscillators 10 of 16 are Now Replacing Quartz

TCXO Frequency v. Temperature 2.5 2 1977 units, 5 lots Frequency Variation (ppm) 1.5 ± 2.5pp m 1 0.5 0 -0.5 -1 -1.5 -50 to +90C -2 -2.5 -40 -20 0 20 40 60 80 Temperature (degC) Aaron Partridge MEMS-Based Resonators and Oscillators 11 of 16 are Now Replacing Quartz

f carrier = 156.25MHz Int jitter (12k-20MHz) • no spurs = 493fs • w/ spurs = 689fs -125dBc/rtHz -152dBc/rtHz 12k-20MHz Aaron Partridge MEMS-Based Resonators and Oscillators 12 of 16 are Now Replacing Quartz

Vibration Induced Spur vs. Acceleration 0 f vibration = 100Hz Vibratiion Spur Value (dBc) -20 -40 Competitive -60 -80 S. MEMS -100 -120 0 10 20 30 40 50 Vibration Acceleration (g) Aaron Partridge MEMS-Based Resonators and Oscillators 13 of 16 are Now Replacing Quartz

Phase Jitter Without and With EMI Interference 25.0 Int Phase Jitter (ps, 12k-20MHz) 21.3 Problematic for 20.0 electrostatic discharge 15.0 S. MEMS 10.0 5.9 Competitive 5.0 1.6 0.8 1.6 0.7 0.5 0.5 0.0 No Interference Interference Aaron Partridge MEMS-Based Resonators and Oscillators 14 of 16 are Now Replacing Quartz

Unit Shipments 60 4 of the top 5 Computer Makers 3 of the top 5 Consum er Electronics 50 3 of the top 5 Contract Manufacturers Units (MU Recognized) 5 of the top 5 ODMs 40 30 20 10 0 2007 2008 2009 2010 2011 Year Aaron Partridge MEMS-Based Resonators and Oscillators 15 of 16 are Now Replacing Quartz

o Technology has fundamentally helped Humanity. o Engineers make sm all contributions that are multiplied countless times. o What you do matters to Billions of people! Dorothea Lang, “Migrant Mother” 1936 Aaron Partridge MEMS-Based Resonators and Oscillators 16 of 16 are Now Replacing Quartz

Thank You Aaron Partridge MEMS-Based Resonators and Oscillators 17 of 16 are Now Replacing Quartz

Abstract The first commercial MEMS-based tim ing devices shipped in 2007. In just five years they are transform ing the timing industry. The first parts offered XO stability and various advantages like programmability, but lacked the signal quality to support more than the basic applications. Recent parts are dramatically improved, offering TCXO stability, sub- picosecond integrated jitter, high frequency differential outputs, low phase noise for RF applications, low power for portable applications, and ultra low power for real time clock applications. Production rates are increasing exponentially with over 50 million units sold as of June 2011. How does this stuff work? Where will the technology go? Will MEMS replace quartz? What will MEMS timing do for the electronics industry? What will MEMS tim ing do for Humanity? Aaron Partridge MEMS-Based Resonators and Oscillators 18 of 16 are Now Replacing Quartz