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PVMD Delft University of Technology Close space sublimation - PowerPoint PPT Presentation

Oct 16, 2023 •450 likes •507 views

Other TF deposition techniques part 2 Arno Smets PVMD Delft University of Technology Close space sublimation substrate heater lamps Graphite block substrate thermocouple substrate Target source thermocouple Graphite block source heater

  1. Other TF deposition techniques part 2 Arno Smets PVMD Delft University of Technology

  2. Close space sublimation substrate heater lamps Graphite block substrate thermocouple substrate Target source thermocouple Graphite block source heater lamps

  3. Chemical bath deposition temperature probe pH probe Substrates spinner hot plate

  4. Molecular beam epitaxy RHEED gun Liquid nitrogen Substrate Heater Beam flow gauge Effusion cells Ionisation gauge RHEED screen

  5. Metal-organic chemical vapour deposition C C Ga C N C Ga(CH 3 ) 3 N N N N N C Al(CH 3 ) 3 N N As C C N Al N C C Al Al In(CH 3 ) 3 N N C N N N N N C C N C N N As As N As N PH 3 N N AsH 3 C C Al N C C N C As Al Al C N N N N As Substrate Heater

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