FAME M2 semester in Grenoble Materials for Microelectronics and - PowerPoint PPT Presentation

FAME M2 semester in Grenoble « Materials for Microelectronics and Microsystems » Coordinators : Fabien VOLPI Annie ANTONI Eirini SARIGIANNIDOU http://www.fame-master.com

Grenoble : everyday life Grenoble, a city surrounded by mountains… … and ranked as one of the nicest French cities for studying in France… ~ 60 000 students http://www.fame-master.com

Grenoble : scientific environment Development of Micro- and Nano-technologies • MINATEC (Grenoble-INP, UJF, CEA-Grenoble) • Minalogic “Pole de Compétitivité” • ESRF / ILL • STMicroelectronics, SOITEC,… Development of Photovoltaic • INES CEA-Chambéry • Photowatt,… « Microtechnologies » key words • Thin film science and technology • Clean-concept • Surface functionalisation / Biotechnologies 35th worldwide on Material Science http://www.fame-master.com

The Micro-world for beginners (STMicroelectronics/SIMAP) Bulk silicon (WACKER) Fabrication of small-scale systems http://www.fame-master.com

FAME M2 in Grenoble Master 2 – First semester • Process flow for microelectronics • Material and Process selection • Packaging • Simulation at small scales (Finite Element Modelling) • Practical Works • Laboratory project Master 2 – Second semester • 6-month Master thesis Multiphysics applied to Materials at small scales Closely connected to academic research and industrial issues Lectures / Long term projects Written exams / Oral presentations - Reports http://www.fame-master.com

FAME M2 Courses Master 2 • Process flow for microelectronics  Lectures CIME-PTA ALTIS Semiconductor http://www.fame-master.com

FAME M2 Courses Master 2 • Practical Works (Clean Room, etc) http://www.fame-master.com

FAME M2 Courses Master 2 Passivating graphite in harsh environment (ACERDE) • Material and Process selection  Lectures + Industrial Project Replacement of Si 3 N 4 as Contact Etch Stop Layer (STMicroelectronics) Contact Etch Stop Layer Architectured substrates for solar cells STMicroelectronics (SIMAP) http://www.fame-master.com

http://www.fame-master.com FAME M2 Courses  Lectures • Packaging Master 2

FAME M2 Courses Master 2 • Simulation at small scales (Finite Element Modelling or ab-inition or molecular ……)  Lectures + Project Nanoindentation test on alumina films Cracking force and depth : Complete simulation of Experimental : 60mN / 11nm an AFM cantilever in Modelling : 54mN / 14nl contact with a surface http://www.fame-master.com

FAME M2 Courses Master 2 • Laboratory project Simulation in entangled materials Cerium Gadolinium Oxide (CGO) Electrolytes by Spray Pyrolysis http://www.fame-master.com

FAME M2 Courses Master 2 – First semester • Process flow for microelectronics Written exam • Material and Process selection Report + Oral pres. • Packaging Written exam • Simulation at small scales (FEM) Report + Oral pres. • Practical Works Report • Laboratory project Report http://www.fame-master.com

Local laboratories And others… Local companies And others… Key-words Materials and Processes for Microtechnologies and Energy Conception, Modelisation, Elaboration, Caracterisation Strong coupling with industry and academic research http://www.fame-master.com

Contact Fabien VOLPI FAME M2 fabien.volpi@grenoble-inp.fr Tel : 0033 4.76.82.66.13 Annie ANTONI FAME M1 annie.antoni@grenoble-inp.fr Tel : 0033 4.76.82.67.47 Eirini SARIGIANNIDOU FAME Eirini.Sarigiannidou@grenoble-inp.fr Tel : 0033 4.56.52.93.33 http://www.fame-master.com

http://www.fame-master.com Thank you for your attention