Talk 1: Observer techniques appied to the control of piezoelectric microactuators Micky RAKOTONDRABE, Cédric Clévy, Ioan Alexandru Ivan and Nicolas Chaillet, FEMTO-ST (Besançon, France) - 1 – FEMTO-ST and SAMMI group activities - 2 – Observer techniques applied to piezocantilevers - 3 – Self sensing of piezocantilevers microPAdS - FP7-PEOPLE-2007-2-1-IEF Workshop, IEEE ICRA, Signals Measurement and Estimation 1 Techniques Issues in the Micro/Nano-World – May, 3, 2010
Talk 1: Observer techniques appied to the control of piezoelectric microactuators Micky RAKOTONDRABE, Cédric Clévy, Ioan Alexandru Ivan and Nicolas Chaillet, FEMTO-ST (Besançon, France) - 1 – FEMTO-ST and SAMMI group activities - 2 – Observer techniques applied to piezocantilevers - 3 – Self sensing of piezocantilevers Workshop, IEEE ICRA, Signals Measurement and Estimation 2 Techniques Issues in the Micro/Nano-World – May, 3, 2010
About FEMTO-ST Institute … The roots of our activity comes from Watchmakers industry in Besançon area & Automotive industry in Belfort area. - A wide range of technical competencies in ENGINEERING SCIENCES Belfort - A MULTIDISCIPLINARY research institute Besançon - A high level MICROFABRICATION TECHNOLOGY facility - A culture of INNOVATION : from basic research to industrial partnership . 500 staff people 6 research departments . 28 M€ annual overall budget 6 main application fields including 10 M€ operational 1 microfabrication center budget . About 250 running research contracts Workshop, IEEE ICRA, Signals Measurement and Estimation 3 Techniques Issues in the Micro/Nano-World – May, 3, 2010
Research Departments �������������������� ���������������� �������������������������������� � �($#'�$����#�$"# � ��+��%$�,� �$*�#%�� �$#"% � ���"#"#,#$��% � ��#(%$#�� ��$"#���%���)�!��-#� ��$"���$* � ���"#'����$"#���% � ��'��&"�.(���*�'�$"# #+* � ���"#'���!( �$�#����)�'��"#��%%�', * � ��'���$���������)�)�%�+����$�/�$*�+(�)���� ������ ��������� � ��#$#���%���)�$� ��#''(����$�#�% ������������� 9 % 9 % 9 % 9 % 13 % 13 % 13 % 13 % � ���#�#!$��% ������� 19 % 19 % 19 % 19 % � �!$#� ��$"#���% 15 % 15 % 15 % 15 % � �#�� ����"�#!$��% � ���"+*�'�$"# #+*���)�'#)� ��+ � 1�#!�#$#���% � ���"+*�%*%$�'�)�%�+� � ��)�#�!"#$��$�#����)��'�)��� �!�*%��% 20 % 20 % 20 % 20 % 24 % 24 % 24 % 24 % ����������� ������������������ ����������������� � ���"#���)����#���%$"('��$�$�#� � ���#%������% � ��������� �!"#!�"$��%�#&�'�$�"�� % � ���"#������#���#(%$��% � �$"(�$("� �)*��'��% � �( $�!�*%��� ���"#%*%$�'% � ��$�"�� �&#"'��+���)�'��"#&�,"���$�#� � ���"#0����#'�$�"�� % ��)�%("&���% � �("&����'��"#��� *%�% Workshop, IEEE ICRA, Signals Measurement and Estimation 4 Techniques Issues in the Micro/Nano-World – May, 3, 2010
SAMMI Group Automated Systems for Micromanipulation and Microassembly • General objectives (1) – Create microrobots and microrobotic cells for flexible micromanipulation and microassembly Because of the growing number of microproducts to assemble, efficient and reliable micromanipulation systems are required Micro-assembly Workshop, IEEE ICRA, Signals Measurement and Estimation 5 Techniques Issues in the Micro/Nano-World – May, 3, 2010
SAMMI Group Automated Systems for Micromanipulation and Microassembly • General objectives (2) – Control complex microsystems MEMS = specific paradigms for control science Microgripper from Femto-tools (FT G100) Nanotweezer from LIMMS 1 mm Workshop, IEEE ICRA, Signals Measurement and Estimation 6 Techniques Issues in the Micro/Nano-World – May, 3, 2010
SAMMI Group Automated Systems for Micromanipulation and Microassembly Main addressed scientific issues on control in the SAMMI group/ FEMTO-ST Modelling and control of: - micro-actuators: SMA, MSMA, piezo, thermal… - microrobots: stick slip actuation, digital MEMS,… - discrete distributed systems: smart surface - continuous distributed systems - assembly microfactories: calibration, information data modelling and management Need of measurement (sensors, observers) Workshop, IEEE ICRA, Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World – May, 3, 2010
Talk 1: Observer techniques appied to the control of piezoelectric microactuators Micky RAKOTONDRABE, Cédric Clévy, Ioan Alexandru Ivan and Nicolas Chaillet, FEMTO-ST (Besançon, France) - 1 – FEMTO-ST and SAMMI group activities - 2 – Observer techniques applied to piezocantilevers - 3 – Self sensing of piezocantilevers Workshop, IEEE ICRA, Signals Measurement and Estimation 8 Techniques Issues in the Micro/Nano-World – May, 3, 2010
2 – Observer techniques applied to piezocantilevers A - Context - Position control of one cantilever, - Force control of the second cantilever Workshop, IEEE ICRA, Signals Measurement and Estimation 9 Techniques Issues in the Micro/Nano-World – May, 3, 2010
2 – Observer techniques applied to piezocantilevers A - Context Force Maniplation Force + - d Deflection: Manipulation force: - Modeling, - Modeling, - Control, - Control, - Measurement/estimation - Measurement/estimation Workshop, IEEE ICRA, Signals Measurement and Estimation 10 Techniques Issues in the Micro/Nano-World – May, 3, 2010
2 – Observer techniques applied to piezocantilevers B - Deflection measurement and control Disturbance: - force, temperature variation,… - nonlinearity, uncertainty reference U d d controller piezocantilever - Frequential controller (H-inf, PID, RST…) [CASE07] [IROS07] [ieeeTCST09] Workshop, IEEE ICRA, Signals Measurement and Estimation 11 Techniques Issues in the Micro/Nano-World – May, 3, 2010
2 – Observer techniques applied to piezocantilevers B - Deflection measurement and control Disturbance: - force, temperature variation,… - nonlinearity, uncertainty reference U d d controller piezocantilever Luenberger/ Estimate state ˆ X Kalman Observer ( ) dX ˆ dt = + + − AX ˆ BU K d d ˆ [Haddab, PhD00] o - State-Space domain (LQ, modal control, pole assignment) Workshop, IEEE ICRA, Signals Measurement and Estimation 12 Techniques Issues in the Micro/Nano-World – May, 3, 2010
2 – Observer techniques applied to piezocantilevers B - Deflection measurement and control Disturbance: - force, temperature variation,… - strongly nonlinearity , uncertainty reference U d d controller compensator piezocantilever Linearization of the nonlinearity (hysteresis and creep) [ifacWC08] [ieeeTASE a ] Workshop, IEEE ICRA, Signals Measurement and Estimation 13 Techniques Issues in the Micro/Nano-World – May, 3, 2010
2 – Observer techniques applied to piezocantilevers C - Force measurement and control F + - d Information on the force: from the deflection Workshop, IEEE ICRA, Signals Measurement and Estimation 14 Techniques Issues in the Micro/Nano-World – May, 3, 2010
2 – Observer techniques applied to piezocantilevers C - Force measurement and control F reference estimator U d d F ˆ controller piezocantilever Workshop, IEEE ICRA, Signals Measurement and Estimation 15 Techniques Issues in the Micro/Nano-World – May, 3, 2010
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