The Opportunities and Challenges of Waste-Recycling for - PowerPoint PPT Presentation

The Opportunities and Challenges of Waste-Recycling for Semiconductor Plants Arthur Chuang Senior Director, 300mm Fabs Division, TSMC

Overview of Industrial Waste Management in Science Parks 2

Waste Management Flow and Treatment Overview Waste Prevention Waste Diversion Composting Incineration and Other and Minimization through Recycle of Waste Fraction Thermal Processes and Reuse Waste Sanitary Anaerobic Digestion Residual Collection Landfilling of Waste Fractions Landfill 3

Domestic Waste Overview of Taiwan • In 2014, domestic waste was 26,250 kiloton in Taiwan, in which municipal waste was 28% and enterprise waste was 72%. • The waste-recycling rate of municipal waste was 56%, enterprise waste was 81%, therefore the final disposed wastes are both around 3,000 kiloton. Municipal waste Enterprise waste K ton/yr K ton/yr 55.0% 55.6% 10,000 54.4% 60.0% 25,000 100.0% 52.2% 82.4% 48.8% 80.6% 80.8% 81.0% 9,000 79.9% 90.0% 50.0% 20,000 80.0% 8,000 7,000 70.0% 3,290 3,590 3,760 40.0% 3,510 3,440 6,000 15,000 60.0% 4,073 3,611 3,379 3,273 3,300 5,000 30.0% 50.0% 4,000 10,000 40.0% 20.0% 15,440 15,290 3,000 14,910 30.0% 14,580 14,510 2,000 4,097 5,000 20.0% 3,944 4,025 4,034 3,885 10.0% 1,000 10.0% - 0.0% - 0.0% 2,010 2,011 2,012 2,013 2,014 2,010 2,011 2,012 2,013 2,014 recycle non-recycle recycle non-recycle recycling rate Data source: EPA 2014 Waste-Recycling Annual Report 4

Industrial Waste Overview of Taiwan • According to the EPA, total enterprise waste weighed 18,880 kilotons in 2014, in which 88% was industrial waste. • The highest industrial waste was slag from steel industry (28%), and the waste from electronics was 670 kilotons (3.5%). 8,000 100% Declaration Cumulative Percentage 90% 7,000 80% 68% 67% 6,000 66% 5,312 64% 62% 70% 59% 56% 5,000 52% 60% 46% 4,000 50% 40% 3,000 28% 3,327 30% 2,000 1,150 20% 712 672 557 1,000 376 297 260 238 10% - 0% Data source: EPA 2014 Waste-Recycling Annual Report 5

Electronic Waste Overview of Science Parks • In 2014, Science Parks generated 630 kilotons of industrial waste, which was 3.3% of total enterprise waste. Obviously 88% of them was originated from semiconductor and optoelectronics manufacturing. • The waste-recycling rate of optoelectronics was about 80%, and semiconductor manufacturing was about 92% in recent years. Waste-Recycling Rate 100.0% 95.0% 92% 91.7% 90% 90.0% 85.1% 84% 84% 85.0% 82.0% 81.0% 79.9% 80.0% 75.9% 75.0% Semiconductor Optoelectronic 70.0% 2010 2011 2012 2013 2014 6

Typical Wastes from a Semiconductor Plant • In Taiwan, semiconductor manufacturing generated 310 kilotons wastes in 2014. • The major wastes coming from semiconductor manufacturing are acid (43%), solvent (25%) and sludge (18%). Electronic Industry Semiconductor Manufacture K ton/yr % % K ton/yr 800.0 93% 92% 160 100% 89% 86% 700.0 132 90% 78% 140 44.1 80% 600.0 69% 120 34.9 175.4 70% 59% 500.0 32.8 100 60% 144.6 31.8 32.0 43% 400.0 139.6 80 50% 103.1 104.3 142.6 40% 141.7 51 300.0 60 116.6 130.9 137.4 30% 30 30 40 200.0 24 20% 309.8 239.7 20 9 215.8 7 100.0 200.9 192.4 4 10% - 0% - 2010 2011 2012 2013 2014 Semiconductor Panel Optoelectronic Packaging Qty Cumulative proportion Data source: EPA, Industrial Waste Report and Management System 7

Typical Waste from a Semiconductor Plant Category Volume Recycled Products Sell/Pay Status 6% Sell H 2 SO 4 , H 3 PO 4 , HF 51% Industrial H 2 SO 4 94% Pay Thinner, IPA, NMP 14% Industrial Solvent 100% Sell (NH 4 ) 2 SO 4 , NH 4 OH, 21% Sell (NH 4 ) 2 SO 4 , TMAH 12% /TMAH 79% Pay CaF 2 Sludge 8% Cement Pay SiO 2 Sludge 5% Cement Pay CuSO 4 4% Cu/CuSO 4 Sell/Pay Waste Plastic Mixtures 2% Plastic Barrel Sell Active Carbon, Non-Toxic Waste 4% Incineration or Landfill Pay Chemical, Waste Wiper…etc. Recycling Rate ~20% Sell TOTAL 100% 95% ~80% Pay 8

Waste Treatment Industry of Taiwan W ea S tr tren engt gth eakn kness ess  Supported by governmental policy with  It is difficult to trace the reuse status for complete and compulsory regulations. recycled products.  Government monitor treatment facility and  The authorities are dispersed in 10 different loading ratio, therefore, to prevent insufficient administrations such as MOEA and so on. treatment capacity.  The penalty of Waste Clearance Regulation is  Wastes sources are stable and sufficient. relatively loose than other environmental regulations. T hr O pp hrea eats ts ppor ortu tunities nities  Society distrust waste-treatment industry. The  Due to the raise of environmental awareness in recycled products has not yet been accepted Taiwan. The enterprises are more willing to by consumers, the market is still restricted. invest and develop technologies for waste  The waste treatment process involves several treatment and recycling. companies in loop and increases possibility of  To improve waste value through a refined abuses. classification and pretreatment at the sources.  It is difficult to build a new treatment plant.  To improve industry’s premium and credibility Once the plants are full loaded, wastes can no of environmental protection. longer be treated. 9

Status of the Polluted Sites under EPA’s Observation • According to the EPA, there 19 illegal dumping sites are polluted and controlled for recovery. The major illegal wastes include sludge, slags and waste liquid. • Based on pollution area, 76% of the affected area is polluted by heavy metal (mercury, nickel, cadmium, chromium, copper, zinc, lead) and the other 24% is organic solvent (benzene, phenol). 15.0 hectare (ha) 5.4 10.0 0.0 5.0 8.8 8.2 0.0 Soil groundwater metal solvent Data source: EPA, Environment Resource Database 10

Establish Waste-Recycling Value Chain in Semiconductor Plants 11

Waste Management Hierarchy VALUE Waste Economics • Recycling is processing used materials into new, useful products. This is done to reduce the consumption of raw materials that would have been used. • Recycling also uses less energy and great method of controlling air, water and soil pollution. Buy Recycled 12

Waste Management Process • Start from… identifying and quantifying your waste. Organize a waste management team to drive things forward. • Generate an waste reducing action plan. Get commitment from senior management for the action plan. • Identify the possible disposal options if the waste is unrecyclable. Select your waste carriers carefully and make sure that your Duty of Care responsibilities are met. • Monitor and review your achievements. Communicate your success to interested stakeholders outside your organization. 13

Recycling – Transform the Value of Waste from Negative to Positive • After a proper converting process, to raise the quality and price value of recycled waste and to compete with new product. • In Taiwan, Nearly 60% of industries depend on recycling industry to provide partial raw materials to balance cost with imported materials. The annual production of recycling industry is growing doubly in the last decade and reached NT$ 67.8 billion in 2015. • The steel slags, furnace dust, solvent and metal contribute the most to the production amount. 67.8 67 70 65.8 65.8 65.9 65 60 54.4 55 billion 48.7 48.2 50 42 45 38.5 40 35 30 2006 2007 2008 2009 2010 2011 2012 2013 2014 2015 Data source: IDB, Industrial Waste Clearance, Treatment and Recycling information net 14

Innovation on Waste Recovery • Since the waste generated by each company is unique, therefore it is necessary to have professional teams for recycling. Brainstorm to generate ideas and creative methods of waste recovering. Only a long-term commitment can increase profits through reducing waste. • Generally speaking, the first priority of waste-recycling tasks is to analyze the ingredients of the wastes, to investigate a proper classification method for simplifying the complexity of the waste and to manage the waste according to the recycling structure. • One of the best strategies is to treat the waste with waste, to transform it into a useful or valuable material. 15

Waste Sulfuric Acid Recycling – Electronic Grade Information source: AUECC (a Linde/LienHua Company) 16

Waste Sulfuric Acid and Ammonia Nitrogen Recycling – Industrial Grade Information source: TSMC 17

On-Site Chemical Recycling Facility – TMAH Information source: TSMC 18

On-Site Electroplating Facility – Copper Sulfate Information source: TSMC 19

Artificial Fluorite Sintering Facility – Calcium Fluoride Information source: CHC Resources (a China Steel Company) 20