PCS SERVICE FOR SALE FOR SALE Used PHI 660 Scanning Auger PHI 660 - PowerPoint PPT Presentation

PCS SERVICE FOR SALE FOR SALE Used PHI 660 Scanning Auger PHI 660 Scanning Auger Used Nanoprobe Nanoprobe

PHI 660 Scanning Auger PHI 660 Scanning Auger Nanoprobe Nanoprobe

PCS SERVICE ELECTRON BEAM - - SAMPLE INTERACTION SAMPLE INTERACTION ELECTRON BEAM Primary Electron Beam Secondary Electrons Auger Electron gun Lab6 >Atomic No. 3 Backscattered Electrons Characteristic X-rays > Atomic No. 4 Sample Surface Volume of <1 - 3 µ m Primary Excitation Φ

PCS SERVICE Coaxial Geometry Coaxial Geometry • Easy Alignment • Cylindrical Mirror Analyzer (CMA) for high performance Auger systems • The CMA has a well defined, easy to find, focal point – Uses the elastically backscattered electron spectrum • Coaxial electron gun and CMA, – The electron beam is automatically aligned at the CMA focal point • Only the ion gun must be aligned to the analyzer focal point

PCS SERVICE Coaxial Geometry Coaxial Geometry Easy alignment of the Lab6 cathode electron beam, the analyzer focal point, and the ion beam. Channeltron detector Cylindrical Mirror Analyzer Ion Gun Sample

PCS SERVICE Coaxial Geometry Coaxial Geometry CMA Electron gun No shadowing! Ni Map In Map Secondary Electron Image

PCS SERVICE Auger 660 Description Auger 660 Description • Lab6 electron column & coaxial CMA • Sample stage with 10 µ m resolution • Energy Resolution 0.3 % to 2.0% • Energy range 0 to 3200 eV • Used System , production year 1991 • System is fully operational • Maintained under Service contract till 31.12.2004 • PC running windows NT

PCS SERVICE Auger 660 Description Auger 660 Description • A high performance ion gun 04-303 A – provides superior depth profile resolution – Beam Current Density > 600 µ A/cm 2 – Provides high current density for well-defined sputter craters

PCS SERVICE Auger 660 Specifications Auger 660 Specifications • Guaranteed Base Pressure – <5.0 x 10-10 Torr – UHV pumping 200 l/s • Minimum Electron Beam Diameter – < 25 nm at 20 kV • AES Signal-to-Noise Ratio – >50:1 at 5 kV Electron beam voltage • Sensitivity in Pulse Count mode – > 750 cps • Maximum Beam Current > 10 µ A –

PCS SERVICE •Buy this used system from the current LAB location as seen without any installation coverage or warranty . OR •Get the system fully refurbished, including installation, latest software, training and 1 or 2 year warranty coverage. OR •Choose a mixture of options listed above, you define !

Contact us for further information at • PCS SERVICE • Veltenstrasse 18 • 85221 Dachau Germany • www.pcs-gerstl.de gerstlwilhelm@pcs-gerstl.de • +49 08131 86952 • +49 08131 85801 • +49 0172 856 4668