ee 213 microscopic nanocharacterization of materials
play

EE 213, Microscopic Nanocharacterization of Materials Class website: - PowerPoint PPT Presentation

EE 213, Microscopic Nanocharacterization of Materials Class website: https://ee213-winter16-01.courses.soe.ucsc.edu Time/place: Tu/Th 10-11:45am. Baskin 156 Mike Isaacson, Baskin 237 Email: msi@soe.ucsc.edu Tele: 831-459-3190 Admin. Asst.


  1. EE 213, Microscopic Nanocharacterization of Materials Class website: https://ee213-winter16-01.courses.soe.ucsc.edu Time/place: Tu/Th 10-11:45am. Baskin 156 Mike Isaacson, Baskin 237 Email: msi@soe.ucsc.edu Tele: 831-459-3190 Admin. Asst. Rachel Cordero: rcordero@soe.ucsc.edu, 831-459-2921 EE 213, Nanocharacteriza2on/M.Isaacson

  2. S = NJ σ YF S = signal in counts/sec N = # atoms in volume probed J = current density in probe (#/area/sec) σ = cross section for interaction (area) Y = yield of process to be detected F = efficiency of collection EE 213, Nanocharacteriza2on/M.Isaacson

  3. K ab

  4. EE 213, Nanocharacteriza2on/M.Isaacson

  5. Beer’s law

  6. Inelastic mean free path for electron scattering From Seah and Dench, 1979. Surf. and Interface Anal.1.36

  7. Absorption length

  8. From D.Kyser

  9. 100 nm Aluminum Film Self-Supported on Silicon Fingers secondary electron image SE only SE + SE(BSE) M. Isaacson and K. Lin EE 213, Nanocharacteriza2on/M.Isaacson

  10. Elas2c sca9ering

  11. Z 3/2 Langmore, Wall and isaacson. Op2k.38(4).(1973).335-350.

  12. MITIO INOKUTI Rev. Mod. Phys. 43, 297 (1971)

  13. From MSI, Cornell AEP 661 notes

  14. Xray and Auger Electron Yields Cambridge University Press

  15. Siegnahn, et.al. ESCA. 1967

  16. Calcula2ons of K shell excita2on by electrons

  17. EE 213, Nanocharacteriza2on/M.Isaacson

  18. Nanodevices Require Atomic Characterization / heavy atoms Scanning Transmission Electron Microscope EE 213, Nanocharacteriza2on/M.Isaacson

  19. Single atom imaging by annular dark field (ADF) STEM Chicago STEM ~1975 Nion UltraSTEM 2007 Nion UltraSTEM 2010 � 40 keV: 2.5 Å Au atom 100 keV: 1 Å Au atom 200 keV: 0.6 Å Au atom � The resolution has improved, and so has the stability. � In ADF STEM, the potential well around the nucleus is imaged. ADF STEM can thus potentially show atoms as only about 0.3 Å large. � From Ondrej Krivanek

  20. EELS from nucleic acid bases From: M. Isaacson, 1972

  21. Energy Loss Spectra of Metal Fluorides M. Scheinfein and M. Isaacson, J.Vac.Sci.Tech.B4(1) 1986. 326 – 332.

  22. Inelastic mean free path for electron scattering From Seah and Dench, 1979. Surf. and Interface Anal.1.36

  23. Electron Sca9ering from Solid Sample ( “ reflec2on ” ) How can we distinguish Auger peaks from ELS peaks?

Recommend


More recommend