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PZT and 3/20/80 PNZT from 5 K to Room Temperature ISAF 2014 Joe T. - PowerPoint PPT Presentation

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Electrical Properties of 20/80 PZT and 3/20/80 PNZT from 5 K to Room Temperature ISAF 2014 Joe T. Evans Jr. Radiant Technologies, Inc. & Dr. David Daughton Lake Shore Cryotronics, Inc. Radiant Technologies, Inc. Test Equipment Lake

  1. Electrical Properties of 20/80 PZT and 3/20/80 PNZT from 5 K to Room Temperature ISAF 2014 Joe T. Evans Jr. Radiant Technologies, Inc. & Dr. David Daughton Lake Shore Cryotronics, Inc. Radiant Technologies, Inc.

  2. Test Equipment • Lake Shore Cryotronics and Radiant Technologies together measured the electrical properties of 20/80 PZT and 3/20/80 PNbZT thin ferroelectric film capacitors from 5 K up to 300 K . • The Vision data acquisition program executed automated tests of single samples over a wide temperature range, commanding temperature changes using GPIB. • Thermally-compensated electrical probe tips in the Lake Shore cryogenic chamber maintained electrical contact with the sample over the large temperature changes. Radiant Technologies, Inc.

  3. Lake Shore Cryogenic Chamber Radiant Technologies, Inc.

  4. Lake Shore Cryogenic Chamber • The Lake Shore Cryotronics CRX-4K chamber has a hot chuck placed above a cold finger. • The cold finger first dropped to 5.0 K while the hot chuck maintained the sample at room temperature. • The hot chuck was then set to the first temperature of the test profile and testing began. Tester • For temperature changes, the controller used a ramp rate of 3  K per minute and then soaked Hot Chuck the sample at the new temperature for 10 minutes before starting tests. Cold Finger Radiant Technologies, Inc.

  5. Sample Descriptions • Capacitor structure: • Platinum top and bottom electrodes • Glass passivation above the capacitor • Chrome/Gold probe pads and traces • Tested areas were 100µm 2 & 40,000µm 2 . • Thicknesses: • 20/80 PZT = 2,600Å • 3/20/80 PNbZT = 1,500Å Radiant Technologies, Inc.

  6. Hysteresis vs Temperature 40,000 µm 2 20/80 PZT T y p e A B H y s te re s is fro m 1 0 K to 3 1 0 K [ A B 4 0 3 , 1 0 0 u s ] -H y s t 20V 100us +: P olar iz ation (µC /c m 2) +H y s t 20V 100us +: P olar iz ation (µC /c m 2) -H y s t 20V 100us +: P olar iz ation (µC /c m 2) +H y s t 20V 100us +: P olar iz ation (µC /c m 2) -H y s t 20V 100us +: P olar iz ation (µC /c m 2) +H y s t 20V 100us +: P olar iz ation (µC /c m 2) -H y s t 20V 100us +: P olar iz ation (µC /c m 2) +H y s t 20V 100us +: P olar iz ation (µC /c m 2) -H y s t 20V 100us +: P olar iz ation (µC /c m 2) +H y s t 20V 100us +: P olar iz ation (µC /c m 2) -H y s t 20V 100us +: P olar iz ation (µC /c m 2) +H y s t 20V 100us +: P olar iz ation (µC /c m 2) -H y s t 20V 100us +: P olar iz ation (µC /c m 2) +H y s t 20V 100us +: P olar iz ation (µC /c m 2) 50 40 Black = 10 K 30 Red = 310 K 20 10 u C / c m 2 0 -10 -20 -30 -40 -50 -20 -15 -10 -5 0 5 10 15 20 V o l ta g e Radiant Technologies, Inc.

  7. Hysteresis vs Temperature 40,000 µm 2 20/80 PZT T y p e A B H y s te re s is fro m 1 0 K to 3 1 0 K [ A B 4 0 3 , 1 0 0 u s ] -H y s t 20V 100us +: P olar iz ation (µC /c m 2) +H y s t 20V 100us +: P olar iz ation (µC /c m 2) -H y s t 20V 100us +: P olar iz ation (µC /c m 2) +H y s t 20V 100us +: P olar iz ation (µC /c m 2) -H y s t 20V 100us +: P olar iz ation (µC /c m 2) +H y s t 20V 100us +: P olar iz ation (µC /c m 2) -H y s t 20V 100us +: P olar iz ation (µC /c m 2) +H y s t 20V 100us +: P olar iz ation (µC /c m 2) -H y s t 20V 100us +: P olar iz ation (µC /c m 2) +H y s t 20V 100us +: P olar iz ation (µC /c m 2) -H y s t 20V 100us +: P olar iz ation (µC /c m 2) +H y s t 20V 100us +: P olar iz ation (µC /c m 2) -H y s t 20V 100us +: P olar iz ation (µC /c m 2) +H y s t 20V 100us +: P olar iz ation (µC /c m 2) 50 40 20 volts was 30 necessary at 10 K Black = 10 K for saturation but 20 Red = 310 K the 100 µs test 10 u C / c m 2 period prevented 0 breakdown of the at -10 20 volts at room -20 temperature. -30 -40 -50 -20 -15 -10 -5 0 5 10 15 20 V o l ta g e The test voltage vs temperature vs frequency envelope must be evaluated before starting long automated tests. Radiant Technologies, Inc.

  8. Hysteresis vs Temperature 40,000 µm 2 3/20/80 PNZT T y p e A D H y s te re s is v s T e m p e ra tu re 1 0 K to 2 5 0 K [ O r a n g e, 1 0 0 u s ] -H y s t -12V 100us : P olariz ation (µC /c m2) +H y s t 12V 100us : P olariz ation (µC /c m2) -H y s t -12V 100us : P olariz ation (µC /c m2) +H y s t 12V 100us : P olariz ation (µC /c m2) -H y s t -12V 100us : P olariz ation (µC /c m2) +H y s t 12V 100us : P olariz ation (µC /c m2) -H y s t -12V 100us : P olariz ation (µC /c m2) +H y s t 12V 100us : P olariz ation (µC /c m2) -H y s t -12V 100us : P olariz ation (µC /c m2) +H y s t 12V 100us : P olariz ation (µC /c m2) -H y s t -12V 100us : P olariz ation (µC /c m2) +H y s t 12V 100us : P olariz ation (µC /c m2) -H y s t -12V 100us : P olariz ation (µC /c m2) +H y s t 12V 100us : P olariz ation (µC /c m2) 5 0 4 0 Black = 10 K 3 0 Red = 250 K 2 0 1 0 u C / c m 2 0 -1 0 -2 0 -3 0 -4 0 -5 0 -1 0 -5 0 5 1 0 Vo lta g e Radiant Technologies, Inc.

  9. Remanent Hysteresis Remanent Hysteresis 70 60 50 Polarization 40 30 20 10 0 0 1 2 3 4 5 6 Volts Radiant Technologies, Inc.

  10. Remanent Hysteresis Remanent Hysteresis 70 60 50 Polarization 40 30 20 10 0 0 1 2 3 4 5 6 Volts Radiant Technologies, Inc.

  11. Remanent Hysteresis Task Unswitched - Logic 0 Switched - Logic 1 Remanent 50 40 30 20 Polarization (µC/cm2) 10 0 -10 -20 -30 -40 -50 -10 -5 0 5 10 Voltage Radiant Technologies, Inc.

  12. Remanent Hysteresis vs Full Hysteresis +Hyst 12V 100us: Polarization (µC/cm2): 5 50 40 30 20 10 u C /c m 2 0 -10 -20 -30 -40 -50 -10 -5 0 5 10 Voltage Radiant Technologies, Inc.

  13. Remanent Hysteresis vs Full Hysteresis -Hyst -12V 100us: Polarization (µC/cm2): 5 +Hyst 12V 100us: Polarization (µC/cm2): 5 50 40 30 20 10 u C /c m 2 0 -10 -20 -30 -40 -50 -10 -5 0 5 10 Voltage Radiant Technologies, Inc.

  14. Remanent Hysteresis vs Full Hysteresis Rhys t 12V 100us : Polarization (µC/c m 2): 5 -Hys t -12V 100us : Polarization (µC/c m 2): 5 +Hys t 12V 100us : Polarization (µC/c m 2): 5 50 40 30 20 10 u C /c m 2 0 -10 -20 -30 -40 -50 -10 -5 0 5 10 Voltage Radiant Technologies, Inc.

  15. Remanent Hysteresis vs Temperature 40,000 µm 2 20/80 PZT • 20 volts with 100 microsecond period. Remanent Hysteresis 10k->310K [ AB403, 100us ] R hyst O r ange 310K : P olar ization (µC /cm 2): 1 R hyst O r ange 290K : P olar ization (µC /cm 2): 1 R hyst O r ange 270K : P olar ization (µC /cm 2): 1 R hyst O r ange 250K : P olar ization (µC /cm 2): 1 R hyst O r ange 230K : P olar ization (µC /cm 2): 1 R hyst O r ange 210K : P olar ization (µC /cm 2): 1 R hyst O r ange 190K : P olar ization (µC /cm 2): 1 40 R hyst O r ange 170K : P olar ization (µC /cm 2): 1 R hyst O r ange 150K : P olar ization (µC /cm 2): 1 R hyst O r ange 130K : P olar ization (µC /cm 2): 1 R hyst O r ange 110K : P olar ization (µC /cm 2): 1 R hyst O r ange 90K : P olar ization (µC /cm 2): 1 R hyst O r ange 70K : P olar ization (µC /cm 2): 1 R hyst O r ange 50K : P olar ization (µC /cm 2): 1 30 Blue = 10 K Red = 310 K 20 10 uC/cm2 0 -10 -20 -30 -40 -20 -15 -10 -5 0 5 10 15 20 Voltage Radiant Technologies, Inc.

  16. Remanent Hysteresis vs Temperature 40,000 µm 2 3/20/80 PNZT • 12 volts with 100 microsecond period. Type A D R em anent H ysteresis 10k->250K [ AD403, 100us ] AD Rhyst 250K: Polarization (µC/cm2): 1 AD Rhyst 220K: Polarization (µC/cm2): 1 AD Rhyst 190K: Polarization (µC/cm2): 1 AD Rhyst 160K: Polarization (µC/cm2): 1 AD Rhyst 130K: Polarization (µC/cm2): 1 AD Rhyst 100K: Polarization (µC/cm2): 1 AD Rhyst 70K: Polarization (µC/cm2): 1 AD Rhyst 40K: Polarization (µC/cm2): 1 AD Rhyst 10K: Polarization (µC/cm2): 1 30 Blue = 10 K Red = 250 K 20 10 u C /c m 2 0 -10 -20 -30 -10 -5 0 5 10 Voltage Radiant Technologies, Inc.

  17. Coercive Voltage vs Temperature 40,000 µm 2 3/20/80 PNZT vs 20/80 PNZT Coercive Voltage vs Temperature 6 20/80 PZT 4 Coercive Voltage 2 3/20/80 PNZT 0 0 50 100 150 200 250 300 350 -2 -4 -6  K Radiant Technologies, Inc.

  18. Remanent Polarization vs Temperature 40,000 µm 2 3/20/80 PNZT vs 20/80 PNZT Remanent Polarization vs Temperature 45 20/80 PZT 40 Remanent Polarization 35 30 25 3/20/80 PNZT 20 15 10 5 0 0 100 200 300 400  K Radiant Technologies, Inc.

  19. PUND Positive Positive Drive Voltage Switched Unswitched Pulse Pulse ± Vmax Time Negative Negative Preset Delay Unswitched Switched Pulse Period Pulse Pulse Radiant Technologies, Inc.

  20. PUND vs Frequency 100 µm 2 20/80 PZT • 9.9 volts from 1µs pulse width to 131ms pulse width. • Definitions: = switching pulse & P^ = non-switching pulse P* PZT P* and P^ @ 250 K 120 110 100 90 80 µC/cm2 70 60 50 40 30 20 0.0001 0.001 0.01 0.1 1 10 100 1000 Log(ms) Radiant Technologies, Inc.

  21. Speed vs Temperature 40,000 µm 2 3/20/80 PNZT • 9.9 volts from 10µs pulse width to 131ms pulse width. • Definitions: = switching pulse & P^ = non-switching pulse P* Radiant Technologies, Inc.

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