Part.1 – Main aspects of the control issues in the micro/nano-world and Part.2 – From closed-loop to open-loop control of piezocantilever Micky Rakotondrabe Philippe Lutz Événement - date 1 Control issues in the micro/nano-world – May, 17, 2009
Outline - Intro – FEMTO-ST and SAMMI group activities - Part.1 – Micro/nano-world characteristics and consequences for control and manipulation - Part.2 – From closed-loop to open-loop control of piezocantilever Événement - date 2 Control issues in the micro/nano-world – May, 17, 2009
About FEMTO-ST Institute … FEMTO-ST The roots of our activity comes from Watchmakers industry in Besançon area & Automotive industry in Belfort area. - A wide range of technical competencies in ENGINEERING SCIENCES Belfort Besançon - A MULTIDISCIPLINARY research institute - A high level MICROFABRICATION TECHNOLOGY facility - A culture of INNOVATION : from basic research to industrial partnership Événement - date . 500 staff people 6 research departments . 28 M � annual overall budget 6 main application fields including 10 M � operational 1 microfabrication center budget . About 250 running research contracts 3 Control issues in the micro/nano-world – May, 17, 2009
Research Departments �������������������� ���������������� �������������������������������� � �($#'�$����#�$"# � ��+��%$�,� �$*�#%�� �$#"% � ���"#"#,#$��% � ��#(%$#�� ��$"#���%���)�!��-#� ��$"���$* � ���"#'����$"#���% � ��'��&"�.(���*�'�$"# #+* � ���"#'���!( �$�#����)�'��"#��%%�', * � ��'���$���������)�)�%�+����$�/�$*�+(�)���� ������ ��������� � ��#$#���%���)�$� ��#''(����$�#�% ������������� 9 % 9 % 9 % 9 % 13 % 13 % 13 % 13 % � ���#�#!$��% ������� 19 % 19 % 19 % 19 % � �!$#� ��$"#���% 15 % 15 % 15 % 15 % � �#�� ����"�#!$��% � ���"+*�'�$"# #+*���)�'#)� ��+ � 1�#!�#$#���% � ���"+*�%*%$�'�)�%�+� � ��)�#�!"#$��$�#����)��'�)��� �!�*%��% 20 % 20 % 20 % 20 % Événement - date 24 % 24 % 24 % 24 % ����������� ������������������ ����������������� � ���"#���)����#���%$"('��$�$�#� � ���#%������% � ��������� �!"#!�"$��%�#&�'�$�"�� % � ���"#������#���#(%$��% � �$"(�$("� �)*��'��% � �( $�!�*%��� ���"#%*%$�'% � ��$�"�� �&#"'��+���)�'��"#&�,"���$�#� � ���"#0����#'�$�"�� % ��)�%("&���% � �("&����'��"#��� *%�% 4 Control issues in the micro/nano-world – May, 17, 2009
SAMMI Group Automated Systems for Micromanipulation and Microassembly • General objectives (1) – Create microrobots and microrobotic cells for flexible micromanipulation and microassembly Because of the growing number of microproducts to assemble, efficient and reliable micromanipulation systems are required Micro-assembly Événement - date 5 Control issues in the micro/nano-world – May, 17, 2009
SAMMI Group Automated Systems for Micromanipulation and Microassembly • General objectives (2) – Control complex microsystems MEMS = specific paradigms for control science Microgripper from Femto-tools (FT G100) Événement - date Nanotweezer from LIMMS 1 mm 6 Control issues in the micro/nano-world – May, 17, 2009
SAMMI Group Automated Systems for Micromanipulation and Microassembly Adressed issues Vision Microhandling Control Micromanipulators Grippers, DEP, phase, functionalisation, pH, … Microassembly Événement - date Actuators Robotic cells Control issues in the micro/nano-world – May, 17, 2009
SAMMI Group Automated Systems for Micromanipulation and Microassembly Main addressed scientific issues on control in the SAMMI group/ FEMTO-ST Modelling and control of: - micro-actuators: SMA, MSMA, piezo - microrobots: stick slip actuation, control in position/force - MEMS - discrete distributed systems: smart surface - continuous distributed systems - assembly microfactories: calibration, information data modelling and Événement - date management Control by exteroceptive sensors: visual servoing Control issues in the micro/nano-world – May, 17, 2009
Some characteristics of the « microworld » 1µm 10µm 100µm 1mm Microfabrication manufacturing Electronic scanning Optical microscopy Surface effects are predominant 1 mm 100 µm 10 µm 1 µm carbon nanotube pollen ovocyte lymphocyte bacterium 200 µm 20-40 µm 2-6 µm 6-15 µm Diameter: 100 nm Lens with its support mirror spectrometer prothèse coil engrenage Événement - date auditive 10 µ m 30 130 µm 500 µm 0 800 µm 1 mm µ m Assembled systems 9 Control issues in the micro/nano-world – May, 17, 2009
Main consequences for micromanipulation Macro- -objects objects manipulation manipulation Macro Micro- Micro -objects objects manipulation manipulation Scale effect Événement - date Component Ni 100x120x150 µm 3 Advanced Microsystems Laboratory Minnesota University, Minneapolis, USA 10 Control issues in the micro/nano-world – May, 17, 2009
Main consequences for micromanipulation and microrobot design ��������������� ����������� ���� ���������������� To avoid adhesion … � Avoid surface tension effects: dry or fully submerged environment, if necessary hydrophobic coating of the manipulator tips � Use rough tips, hard materials, conductive and stainless materials (oxyde=dielectric) � If possible choose couples of materials: σ s (Epoxy-Cu)=0.04 mC.m -2 , σ σ σ σ σ σ σ s (Glass-Au)=4.2 mC.m -2 � Control the interface, the medium, use dynamic manipulation (release by Événement - date acceleration) A smaller and smaller object means less and less fingers to manipulate it! A smaller and smaller object means the use of strategies (dynamic)! 11 Control issues in the micro/nano-world – May, 17, 2009
Main consequences for micromanipulation and microrobot design � A light and compact mechanism is intrinsically more precise than a large and heavy mechanism - a 10 cm long arm with an accuracy of 10 nm … is … a « 400 km » arm with an accuracy of 4 cm … C corresponds to � L=480 nm for a 40 mm steel beam - � T=1° - increase of resonance frequencies E/ ρ ρ ρ ρ .10 7 m 2 /s 2 material material steel 2,66 steel k E α α f aluminium 2,62 aluminium ρ m kevlar 9 kevlar silicon silicon 15 Événement - date � Friction is the mortal enemy of the resolution (and then precision) Deforming mechanisms, bearings without contacts � Sensor as near as possible to the end-effectors, use of microscopic vision systems 12 Control issues in the micro/nano-world – May, 17, 2009
Main consequences for control High environment sensibility Noisy signals: - low magnitude of usefull signals Non linear, variant and - ratio Signal/Noise is stochastics models unfavourable input Output system controller Measurement/sensors Événement - date - difficulty to integrate the sensors - sensibility to the environment 13 Control issues in the micro/nano-world – May, 17, 2009
Today Approched Control Issues Part.1 - Main aspects of the control issues in the micro/nanoworld, piezoelectric bender control Part.2 - From closed-loop to open loop control of piezocantilevers Micky RAKOTONDRABE and Philippe LUTZ, from FEMTO-ST (Besançon, France) Force control for nanohandling inside Scanning Electron Microscopes Daniel JASPER, from AMiR (Oldenburg, Germany) Controlled Optical Trapping of Nanoparticles Jason J. GORMAN, Thomas W. LEBRUN and Arvind BALIJEPALLI, from MEL (Gaithersburg, USA) Precision-Driven Hybrid Control for 3D Microassembly Dan O. POPA and Aditya N. DAS, from ARRI (Fort Worth, USA ) Towards the mechanical and control-oriented optimization of micromechatronic systems for robust control Mathieu GROSSARD, Nicolas CHAILLET, Mehdi BOUKALLEL, Arnaud HUBERT and Christine ROTINAT-LIBERSA, from FEMTO-ST (Besançon, France) and CEA (Paris, France) Robust Vision-Guided Multi-probe Microassembly Événement - date John WASON and John WEN, from CATS (Troy, USA) Fast and Precise Micropipette Positioning System based on Continuous Camera-Robot Recalibration and VisualServoing Leonardo S. MATTOS and Darwin G. CALDWELL, from ARD (Genova, Italia ) Control of an Active Handheld Instrument for Microsurgery and Micromanipulation Robert A. MACLACHLAN, Brian C. BECKER and Cameron N. RIVIERE from RI (Pittsburgh, USA ) 14 Control issues in the micro/nano-world – May, 17, 2009
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