Newly Developed Semiconductor Detectors Multi-Pixel Photon Counter - - PowerPoint PPT Presentation

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Newly Developed Semiconductor Detectors Multi-Pixel Photon Counter - - PowerPoint PPT Presentation

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Photon is our Business Newly Developed Semiconductor Detectors Multi-Pixel Photon Counter (MPPC) HAMAMATSU PHOTONICS K.K. Koei Yamamoto June 27 th 2007 PD07 Kobe CONFIDENTIAL 1 HAMAMATSU HAMAMATSU Solid State Sol d State Di Div.

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CONFIDENTIAL 1

Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

Newly Developed Semiconductor Detectors

・

Multi-Pixel Photon Counter (MPPC)

HAMAMATSU PHOTONICS K.K. Koei Yamamoto PD07 Kobe June 27th 2007

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

■ Multi Pixel Photon Counter（

MPPC）

The MPPC (Multi-Pixel Photon Counter) is developed by HAMAMATSU PHOTONICS K. K. and it is one of the products of Si-PM (Silicon Photo multiplier) family which was originally developed in Russia. HAMAMATSU MPPC is designed as a photon counting device based on structures of a Si APD which was adopted by CERN (CMS). HAMAMATSU named this product MPPC which is a trademark.

What’s MPPC?

Solid state photon counter having Multi pixelated Geiger-mode APDs with self-quenching resistance

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

MRS-APD (Metal Resistive Semiconductor APD) SPM (Silicon Photo Multiplier) MPGM APD (Multi Pixel Geiger-mode APD) AMPD (Avalanche Micro-pixel Photo Diode) SSPM (Solid State Photo Multiplier) GM-APD (Geiger Mode APD) SPAD (Singe Photon Avalanche Diode)

The candidates of name in SiPM faimily

MPPC : Multi Pixel Photon Counter SiPM (Silicon Photo Multiplier) SiPMT (Silicon Photo Multiplier Tube)

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

What is the structure of MPPC to improve the performances

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

Photo Absorption coefficient of Silicon

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

holes holes electron electron

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

CMS(CERN) APD

. . 7 5 1 . 5 2 . 2 5 3 . 3 . 7 5 4 . 5 5 . 2 5 6 . % 1 % 2 % 3 % 4 % 5 % 6 % 7 % 8 % 9 % 1 % p

  • s

i t i

  • n

( mm) S 8 6 6 4

  • 5

5 Ga i n Un i f

  • r

mi t y ( T y p . M= 5 )

S8664-55 Sp ect r a l r es p

  • ns

e cur v e 100 200 300 400 500 600 200 400 600 800 1000 1200 W a v el eng t h( nm ) P h

  • t
  • s

e n s i t i v i t y ( m A / W ) 0% 20% 40% 60% 80% 100% 120% Q E ( % ) Phot

  • s

ens i t i v i t y Q E

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

・ A

P D s t r u c t u r e u s e d i n t h e e l e c t r

  • m

a g n e t i c C a l

  • r

i m e t e r

  • f

C M S . ・ T h e p / n j u n c t i

  • n

i s f

  • r

m e d i n a n e p i t a x i a l l a y e r w i t h 5 μm t h i c k n e s s . ・ B i a s 3 5 t

  • 4

V t

  • g

e t g a i n 5 E f i e l d s t r e n g t h

P + P N N

  • N

+

Hamamatsu Reverse Structure APD for CMS

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

p＋ n n－-epi n＋＋-subst. n＋ p p－-epi p＋＋-subst. p＋ p－-epi n＋＋-subst. n＋ p p－ p＋

N/P-Reach through P/N-Reach through N/P-Reach through Back illumination type HPK Reverse structure

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

What are the characteristics of MPPC

MPPC signal (ADC counts)

100 200 300 400 500 600

Entries

0.2 0.4 0.6 0.8 1

1600 pixel

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

■ Specification of 1mm□, MPPC

1600 400 100

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

■ Bias vs. Gain

S10362-11-025U/C S10362-11-050U/C, -100U/C

25μm 1600pixels 50μm 400pixels 100μm 100pixels

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

■ Bias vs. Dark count

S10362-11-025U/C S10362-11-050U/C, -100U/C

25μm 1600pixels 50μm 400pixels 100μm 100pixels

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

Photon Detection Efficiency （ PDE）

100μm Pixel （ 100 pixel type） 50μm Pixel （ 400 pixel type） 25μm Pixel （ 1600 pixel type）

※including the cross-talk and after pulse

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

■ Output signal of MPPC

Photon counting by pulse height （ liner Amp.） Photon counting by output charge （ charge Amp.）

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

Energy Resolution

5 1 1 5 5 1 1 5 2 2 5 3 C h a n n e l N u m b e r C

  • u

n t p e r C h a n n e l 5 1 1 k e V 1 2 7 5 k e V 1 7 k e V

MPPC: 50mm pitch, 3mm square LSO: 3mm x 3mm x 20mm FWHM @511keV: 13%

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

Gain uniformity

（ 400 pixel, 100 samples）

Delta V [V] 0.5 1 1.5 2 2.5 200 400 600 800 1000 1200 1400

3

10 ×

Gain Delta V : 400pixel 100samples

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

PDE uniformity

（ 400 pixel, 100samples）

Delta V [V] 0.5 1 1.5 2 2.5 0.5 1 1.5 2 2.5

PDE Delta V : 400pixel 100samples

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

S10362-11-025U ( 2006.12 )

1600 pixel Microscopic view

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business One pixel y-point (2µm pitch) x-point (2µm pitch) x-point (1µm pitch) y-point (1µm pitch) Gain (x 105) Sensitivity (arbitrary)

Laser Scan in One Pixel

1600 pixel Sensitivity 1600 pixel Gain

  • Pin-point scan ：

YAG laser (λ = 532 nm) with spot size ~ 1 µm.

  • Variation of photon sensitivity and gain in one pixel are evaluated.
  • Observed variation is 2 ~ 5 % in a sensitive area

for the 100 / 400 / 1600 pixel MPPCs.

Variation ~ 3 %

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Sol Solid State d State Di Div. v.

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Photon is our Business

Time resolution at center in different pixel

MPPC: MPPC:1mm2 50μm pitch

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

Time resolution in one pixel

MPPC:1mm2 50μm pitch

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Photon is our Business

Package Developments

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Sol Solid State d State Di Div. v.

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Photon is our Business

Plastic PKG（ 1mm□ × 1ch.）

4.2 3.2 1.3

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Sol Solid State d State Di Div. v.

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Photon is our Business

1.9 2.4 1.0 [mm]

SMD PKG（ 1mm□ × 1ch.）

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Sol Solid State d State Di Div. v.

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Photon is our Business

3.9 4.4 1.0 [mm]

SMD PKG（ 3mm□ × 1ch.）

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

CERAMIC PKG（ 3mm□ × 1ch.）

5.9 7.2 2.0

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Photon is our Business

CERAMIC PKG（ 3mm□ × 4ch.）

8.1 8.95 2.0

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Photon is our Business

■ MPPC’s future plan

・ Increase reproducibility and uniformity ・ Large sensitive area , Array and Matrix ・ Enhance PDE ・ Suppress after pulse and cross talk ・ Quenching resistance optimization ・ Package development (small, cheap, rugged) ・ Custom design ( pitch, package, array)

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Photon is our Business

Al optical separation and Trench etching

Al optical separation Trench etching

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Photon is our Business

MPPC Module

Features

  • Employs a Geiger-mode multi-pixel APD(MPPC)
  • Integrates a signal readout circuit ideal for MPPC
  • Built-in high-voltage circuit and temperature-compensated

circuit

  • Three types of output:

analog, comparator, pulse calculation value

  • USB interface for easy handling: driven by USB bus power
  • Compact and light weight
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Sol Solid State d State Di Div. v.

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Photon is our Business

MPPC Module block diagram

BUS line

Output-1 ( analog out ) Power ( Use USB bus power ) Output-3 ( pulse calculation value) Output-2 ( comparator out )

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Sol Solid State d State Di Div. v.

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Photon is our Business

Characteristics(analog output)

Measurement

PC

USB

C10507-11-025U C10507-11-050U

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Sol Solid State d State Di Div. v.

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Photon is our Business

Characteristics(temperature stability of Gain)

G a i n t e mp e r a t u r e c h a r a c t e r i s t i c s

  • 1
  • 8
  • 6
  • 4
  • 2

2 4 6 8 1

  • 3

d e g

  • 2

d e g

  • 1

d e g d e g 1 d e g 2 d e g 3 d e g 4 d e g 5 d e g 6 d e g T e mp e r a t u r e （ ℃ ） T e m p e r a t u r e s t a b i l i t y

  • f

g a i n （ ％）

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Sol Solid State d State Di Div. v.

HAMAMATSU HAMAMATSU

Photon is our Business

www.hamamatsu.com