MICROELECTRONICS ENGINEERING MICROELECTRONICS ENGINEERING GROUP GROUP PROJECT EXAMPLES (Integrated Circuits & MEMS) And LABORATORY CAPABILITIES Contact: Contact : Assoc. Prof. YASAR GURBUZ . Prof. YASAR GURBUZ Assoc SABANCI UNIVERSITY, FENS SABANCI UNIVERSITY, FENS Orhanli, Tuzla 34956 , Tuzla 34956 – – ISTANBUL ISTANBUL - - TURKEY TURKEY Orhanli Tel: +90 +90(216) 483 9533, (216) 483 9533, Fax Fax: : +90 +90(216) 483 9550 (216) 483 9550 Tel: mail: yasar@sabanciuniv.edu e- e -mail: http://micro.sabanciuniv.edu
Outline Outline • MEMS MEMS PROJECT EXAMPLES • Chemical / Bio Sensors • RF - MEMS • Resonator • Filters • Oscillator • Ultrasonic Transducers • IC TECHNOLOGY • Analog, Digital and Mixed-Signal Design • LAB CAPABILITIES MICROELECTRONICS GROUP
PROJECT EXAMPLES: MEMS PROJECT EXAMPLES: MEMS CMOS COMPATIBLE, CMOS COMPATIBLE, MEMS- -BASED CHEMICAL SENSOR BASED CHEMICAL SENSOR MEMS Target Performance Performance Parameters Parameters Target • detection detection of of • • oxygen oxygen, , hydrogen and hydrocarbons hydrogen and hydrocarbons • • bio bio/ / Chemical weapon agents Chemical weapon agents • • mine mine • • msec msec response response time time • • high sensitivity high sensitivity and and selectivity selectivity • • < <100 100 mW mW power power consumption consumption • • small small / / portative system const portative system const. . • MICROELECTRONICS GROUP
PROJECT EXAMPLES: MEMS PROJECT EXAMPLES: MEMS CMOS COMPATIBLE, CMOS COMPATIBLE, MEMS- -BASED BASED MEMS CHEMICAL SENSOR CHEMICAL SENSOR Mask layout layout Mask MICROELECTRONICS GROUP
PROJECT EXAMPLES: MEMS PROJECT EXAMPLES: MEMS CMOS COMPATIBLE, CMOS COMPATIBLE, MEMS- -BASED CHEMICAL SENSOR BASED CHEMICAL SENSOR MEMS Electro- Electro -thermal thermal- -mechanical mechanical Simulation Results Simulation Results 530 o C 0.097 GPa a) b) Temperature Distribution Stress Distribution MICROELECTRONICS GROUP
MEMS - Chemical / Biological Sensor Chemical / Biological Sensor Tuðba MEMS - Applications Health Care Industry Home applications Consumer Applications Defence: biological w agents and mine detection Electronic Nose / Tongue Environmental Health - Indoor/Outdoor Air/Water Pollution Monitoring Target features: Sensing H 2 , O 2 , CO, and Hydrocarbons High temp range; ~ 100 - 450°C Quick Response; ~ 1 Second Quick Recovery; ~ 10 Seconds MICROELECTRONICS GROUP
PROJECT EXAMPLES: MEMS PROJECT EXAMPLES: MEMS CMOS COMPATIBLE, CMOS COMPATIBLE, MEMS- MEMS -BASED CHEMICAL SENSOR BASED CHEMICAL SENSOR Readout (Signal Processing) Circuitry AMS(Austria MicroSystems) 0.6 µm technology MICROELECTRONICS GROUP
RF - MEMS: Resonator Resonator Mansoor RF - MEMS: Mansoor, Mustafa, , Mustafa, Eray Eray resonator for wireless wireless resonator for communication e electronics lectronics communication Applications: Output(sensing) anchors • RF filters • VCOs input DC bias MICROELECTRONICS GROUP
PROJECT EXAMPLES: RF- - MEMS MEMS PROJECT EXAMPLES: RF RESONATOR RESONATOR 1 3 2 W × × × 2 E h L = π × = π × w 2 f 2 + × o r 0 . 3714 M M Output(sensing) P anchors 3 W w = × × × k sys 2 E h L L input ( ) 2 d 1 DC bias = µ × × Q M k × sys A P MICROELECTRONICS GROUP
PROJECT EXAMPLES: RF- - MEMS MEMS PROJECT EXAMPLES: RF RESONATOR, W / L RESONATOR, W / L affect affect on on performance parameters performance parameters MICROELECTRONICS GROUP
PROJECT EXAMPLES: RF- - MEMS MEMS PROJECT EXAMPLES: RF RESONATOR, W / L RESONATOR, W / L affect affect on on performance parameters performance parameters Maximum output voltage at 457 kHz MICROELECTRONICS GROUP
PROJECT EXAMPLES: RF- - MEMS MEMS PROJECT EXAMPLES: RF MEMS- -based based IF IF band band- -pass pass FILTER FILTER MEMS Design Parameters: In Target Target In Vacuum atmosphere parameters parameters f r 455kHz 455kHz 990kHz 990kHz Q 500-1000 50000 500- 500 -1000 1000 IL 20-40 dB 0.5-1 dB 1- -20 dB 20 dB 1 3dB 0.3-3 % 0.3-3 % 0.3x2- -3x2 % 3x2 % 0.3x2 BW MICROELECTRONICS GROUP
PROJECT EXAMPLES: RF- - MEMS MEMS PROJECT EXAMPLES: RF MEMS- -based based IF IF band band- -pass pass FILTER FILTER MEMS U Ground Contact Ground Contact U max Coupling Spring Coupling Spring U m Sense Sense Drive Drive Electrode Electrode U m /1.41 Electrode Electrode f m f Resonator Resonator Resonator BW 3dB Filter Layout General characteristics of a bandpass filter MICROELECTRONICS GROUP
PROJECT EXAMPLES: RF- - MEMS MEMS PROJECT EXAMPLES: RF MEMS- -based based IF IF band band- -pass pass FILTER FILTER MEMS 3 w = × × × beam k 2 E h spring spring l spring w L Coupling Spring MICROELECTRONICS GROUP
PROJECT EXAMPLES: RF- - MEMS MEMS PROJECT EXAMPLES: RF MEMS- -based based IF IF band band- -pass pass FILTER FILTER MEMS f1 = 336.750k f1 = 336.000k f2 = 337.067k f2 = 337.500k BW = 682.938 BW = 1.500K ∂ 2 C × V η ∂ 2 x = = k Case II: Um/Umax = 0.707 Case I: Um/Umax = 1, spring C C Maximum bandwidth spring spring MICROELECTRONICS GROUP
PROJECT EXAMPLES: RF- - MEMS MEMS PROJECT EXAMPLES: RF MEMS- -based based IF IF band band- -pass pass FILTER FILTER MEMS 15 Resonator Resonator/Filter Mask Layout on 4” Wafer One Resonator MICROELECTRONICS GROUP
PROJECT EXAMPLES: RF- - MEMS MEMS PROJECT EXAMPLES: RF Input/Output bias contacts Anchors Shuttle PolySi GND Connector DC Bias Connector Input/output SiO 2 SUB Cross-section of a Resonator MICROELECTRONICS GROUP
PROJECT EXAMPLES: RF- - MEMS MEMS PROJECT EXAMPLES: RF OSCILLATOR OSCILLATOR + + + + 2 R 1 sC ( R R ) LCs = 3 1 2 A f ( s ) 1 R R R + − + 4 2 2 3 1 sC R LCs 1 R 4 1 0 = w Electrical model of a LC resonator MICROELECTRONICS GROUP
PROJECT EXAMPLES: RF- - MEMS MEMS PROJECT EXAMPLES: RF OSCILLATOR OSCILLATOR Fr = 456.8 kHz • Oscillation at 456.8 kHz MICROELECTRONICS GROUP
RF - MEMS: Switch Gamze, Emrah MICROELECTRONICS GROUP
MEMS: Finger Print Sensor Finger Print Sensor Beril, Özhan MICROELECTRONICS GROUP
Developed at VANDERBILT UNIVERSITY Developed at VANDERBILT UNIVERSITY Solid State Chemical Sensor, diamond technology 2.5 27°C Device B 2.0 Current (mA) V bias = 0.75 volts 1.5 1.0 0.5 V bias = 0.5 volts 0.0 0 0.1 0.2 0.3 0.4 0.5 Hydrogen Pressure (Torr) Applications Chemical Sensor Nuclear/Conventional Power Plants (H 2 , O 2 , CO Demonstrated) - Inside/Outside Containment Vessel (Many others possible) - Gas Demonstrated/Liquid in Development Salient Features - Exhaust Flue Monitoring > 500°C Automotive Emissions Monitoring Quick Response - Exhaust Pipe/Catalytic Converter > 1 Second Industrial Applications Quick Recovery - High Temperature Process Control < 10 Seconds Fuel Cell Operation - Determine H 2 Density In/Around Units Radiation Tolerance Environmental Health > 10 MegaRads - Indoor/Outdoor Air/Water Pollution Monitoring MICROELECTRONICS GROUP
Developed at VANDERBILT UNIVERSITY Developed at VANDERBILT UNIVERSITY MEMS Pressure/Acceleration Sensors Features Applications Signal Output Nuclear/Conventional Power Plants - 2 to 10 times Silicon Automotive/Aerospace High Temperature - Engine Monitoring - > 500°C - Flight Monitoring High Bandwidths Industrial Manufacturing - > 500 kHz - Process Controls Radiation Tolerance Applications requiring high temperature and radiation tolerant sensing - > 10 MegaRads MICROELECTRONICS GROUP
Developed at VANDERBILT UNIVERSITY Developed at VANDERBILT UNIVERSITY Micro-Tip Emitters/Devices - MEMS Micro-Tip Emitter Array Micro-Tip Triode Salient Features Applications High Current Cold Cathode Cold Cathode for all - 100 - 1,000 Amps/cm 2 - RF/Microwave Power Devices High Temperature Neutralizer and Ionizer for Ion Propulsion Plasma Contractor - > 500°C High Power/Voltage Controls Radiation Tolerant - Electric Power Industry - >> 10 MegaRads - Pulsed Power Systems High Performance Switch - Electric Automobile - Power Amplifier MICROELECTRONICS GROUP
PROJECT EXAMPLES: MEMS PROJECT EXAMPLES: MEMS CAPACITIVE ULTRASONIC TRANSDUCERS (cMUTS cMUTS) ) CAPACITIVE ULTRASONIC TRANSDUCERS ( Cross section of a cMUT cMUT mask layouts MICROELECTRONICS GROUP
PROJECT EXAMPLES: MEMS PROJECT EXAMPLES: MEMS CAPACITIVE ULTRASONIC TRANSDUCERS (cMUTS cMUTS) ) CAPACITIVE ULTRASONIC TRANSDUCERS ( SEM pictures pictures of of SEM cMUT MUT’s ’s c Electrical Characterization Electrical Characterization MICROELECTRONICS GROUP
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