ECSEL Brokerage ECSEL Brokerage Event 2016 Event 2016 ECSEL - PowerPoint PPT Presentation

ECSEL Brokerage ECSEL Brokerage Event 2016 Event 2016 ECSEL ECSEL Joint Undertaking Joint Undertaking Atomic Layer Etching Dr. Tommi Suni, Picosun Oy, tommi.suni@picosun.com

ALE project idea • Conventional etch processes are not able to meet the requirements of most advanced structures containing atomic scale features • Atomic layer etching (ALE) is a method where material is removed atomic layer by layer conformally (in 3D) • As the process is self-limiting, the control of the thickness removed can be very precise and the depth is determined by the number of cycles • Atomic layer etching can also be very material selective ECSEL Brokerage Event 2016 ECSEL Brokerage Event 2016 2

Project & partners we are looking for • We are looking for a project developing new processing methods or pilot lines for ICs, MEMS, or nanoelectronics or • Applications that would require ALE processing steps • Participating in existing project plan that would benefit from atomic layer etching also possible ECSEL Brokerage Event 2016 ECSEL Brokerage Event 2016 3

Project & partners we are looking for • We are also interested in projects benefiting from atomic layer deposition (ALD) • Desired partners – Industrial end users – Academic partners with good analysis capabilities – Project partners developing compimentary processing technologies (e.g nanolithography) ECSEL Brokerage Event 2016 ECSEL Brokerage Event 2016 4

Thank you! Contacts: Dr. Tommi Suni Dr. Marko Pudas Tommi.suni@picosun.com Marko.pudas@picosun.com +358-40-8251703 +358-50-3704078 ECSEL Brokerage Event 2016 ECSEL Brokerage Event 2016 5