WP 3 Cleaning Reporting period: m24 – m30 Final Reporting at WP end WPL: Teknek (Sheila Hamilton) Partners involved • • TNO InnoPhysics • • DTF Philps • • IBS Eight19 • • Teknek Rolic M30 Technical review meeting – 24th & 25th of November 2014
Task 3.1 Contact Cleaning o Construct a theoretical model of adhesion forces as related to a contact cleaning system • Model constructed • Ongoing work to measure adhesion forces on a variety of substrates • Additional investigation into the impact of Humidity on Capilliary forces M30 Technical review meeting – 24th & 25th of November 2014
Task 3.1 Contact Cleaning o Formulate a suite of elastomers tailored to specific applications within the OPV and OLED manufacturing processes for particles down to 100 nm • Nanocleen and UTF elastomers developed • Concern about “orange peel” effect at Philips • Concern at apparent increase in small Particles after cleaning • Potential damage on sensitive coatings and substrate to be evaluated M30 Technical review meeting – 24th & 25th of November 2014
3.1.1 Test Set Up M30 Technical review meeting – 24th & 25th of November 2014
3.1.2 “Orange Peel” M30 Technical review meeting – 24th & 25th of November 2014
3.1.3 Substrates Tested • SiO2 wafers • ST504 PET foil • Gold coated wafer • ST520 PET foil • SiN coated wafer • Aluminium coated foil • ITO coated foil • Glass Plates • PEDOT coated foil • PAL foil • LEP foil M30 Technical review meeting – 24th & 25th of November 2014
3.1.4 Residue from UTF M30 Technical review meeting – 24th & 25th of November 2014
3.1.5 SEM of Residue M30 Technical review meeting – 24th & 25th of November 2014
3.1.6 Effect on Contact Angle Material Time(ms) C.A.(deg) Comments Glass 100 15.2 Glass cleaned with Nanocleen 100 12.4No change with Nanocleen Glass cleaned with Silicone Roller 100 31.0Surface Energy Changes with Silicone Roller DuPont ST520 peeled 100 63.9 DuPont ST520 Cleaned with Nanocleen 100 63.0No change with Nanocleen DuPont ST520 cleaned with Silicone Roller 100 70.8Surface Energy Changes with Silicone Roller Aluminized PET 100 36.4 Aluminized PET cleaned with Nanocleen 100 34.3 ITO on foil 100 69.6 ITO on foil cleaned with Nanocleen 100 71.2Most rollers can be used PEDOT HILHC5 100 16.8 PEDOT HILHC5 cleaned with Nanocleen 100 16.1No change with Nanocleen PEDOT HILHC5 cleaned with Silicone Roller 100 63.2Surface Energy Changes with Silicone Roller M30 Technical review meeting – 24th & 25th of November 2014
3.1.7 Learning points o UTF leaves a small amount of residue – enough to be seen but not enough to be identified by SEM o Nanocleen requires thoroughly cleaned using Roller Doctor pads before testing to remove any particles remaining from the manufacturing process o Nanocleen causes no damage to the surface of sensitive coatings M30 Technical review meeting – 24th & 25th of November 2014
Task 3.1 Contact Cleaning o Development of vacuum compatible contact roller and adhesive materials for the removal of particles down to 100 nm • Additional opportunity for using Panel elastomer to clean SiN flakes from the drum during chamber maintenance • Additional opportunity for cleaning shields using Panel elastomer during chamber maintenance • Additional opportunity to move the Nanocleen unit within the Rewind chamber to clean backside of the foil M30 Technical review meeting – 24th & 25th of November 2014
Build up of SiN flakes M30 Technical review meeting – 24th & 25th of November 2014
Close up of SiN flakes M30 Technical review meeting – 24th & 25th of November 2014
SiN flakes removes by Panel Elastomer M30 Technical review meeting – 24th & 25th of November 2014
Cleaning of shields in chamber M30 Technical review meeting – 24th & 25th of November 2014
Teknek Barrier Tool Cleaner M30 Technical review meeting – 24th & 25th of November 2014
Drum in PECVD chamber M30 Technical review meeting – 24th & 25th of November 2014
Particles Removed from Drum M30 Technical review meeting – 24th & 25th of November 2014
Potential New Position for Cleaner M30 Technical review meeting – 24th & 25th of November 2014
Testing in Applied Materials M30 Technical review meeting – 24th & 25th of November 2014
Test Results from Applied Materials M30 Technical review meeting – 24th & 25th of November 2014
Degassing Results M30 Technical review meeting – 24th & 25th of November 2014
Task 3.1 Contact Cleaning o Development of contact cleaning strategies for localised particle removal e.g. for laser ablation debris from repair • Local cleaner sent to Holst – still waiting for results • New cleaning sheet opens up possibilities for many different shapes of local cleaners M30 Technical review meeting – 24th & 25th of November 2014
Task 3.2 Contact free cleaning o Development of narrow gap cleaning of rigid substrates for effective removal of particles down to 100 nm M30 Technical review meeting – 24th & 25th of November 2014
IBS – Narrow Gap Cleaning • Goal: Develop cleaning tool for removal of particles from moving foil using the ‘ narrow gap’ principle • Performance targets: • Equal or better current contact methods; better current non-contact methods PRE >90% for all metal particles PRE >50% for all other particles between 1 and 40 μm PRE >90% for all other particles > 40 μm • Status: Prototype realized, offline tests on rigid glass/PET plates finished Inline tests ongoing M30 Meeting, Eindhoven, 24 th & 25 th Nov.
IBS – Narrow Gap Cleaning M24 Camera setup realized Narrow gap cleaner prototype realized Particle measurement to ± 1.5 μ m M30 Meeting, Eindhoven, 24 th & 25 th Nov.
Task 3.2 Contact free cleaning o Modification the of narrow gap setup for flexible substrates M30 Technical review meeting – 24th & 25th of November 2014
Task 3.2 Contact free cleaning o Development of a cleaning nozzle for local cleaning • Lab setup has been modified for integration in R2R line • Setup for integration shows same performance as table top design • Integration scheduled for mid December M30 Technical review meeting – 24th & 25th of November 2014
Task 3.3 Plasma cleaning o Development of a plasma cleaning process suitable for the surfaces investigated in this project M30 Technical review meeting – 24th & 25th of November 2014
Task 3.3 Plasma cleaning o Development of a R2R compatible plasma-printer for full area and local treatment M30 Technical review meeting – 24th & 25th of November 2014
Deliverables No. Title Lead partner Due month Progress* 3.1 Cleaning concepts 12 Teknek F 3.2 Improved Elastomers and adhesive 18 Teknek F materials 3.3 Cleaning process 18 Teknek F 3.4 Cleaning prototypes ready 27 Teknek O/D (To be submitted in December) *N – Not started, S – Started, O – Ongoing, F – Finished, D - Delayed M30 Technical review meeting – 24th & 25th of November 2014
M30 Technical review meeting – 24th & 25th of November 2014
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