ANSI ASC OP Task Force 6: IR Materials Standards and SPIE IR - PowerPoint PPT Presentation

1 ANSI ASC OP – Task Force 6: IR Materials Standards and SPIE IR Materials Standards Working Group Wednesday, April 22, 2015 Baltimore Hilton Hotel 08:00 – 10:00 EDT 401 West Pratt St. Baltimore, MD 21201 SPIE DSS Calloway A Room

Draft Agenda 2 1. Welcome, Introductions, and appointment of note taker – A. Phenis 2. Appointment of note taker – A. Phenis 3. Adoption of agenda – A. Phenis 4. Approval of previous meeting minutes – A. Phenis 5. Reports 1. Pilot study status update – A. Phenis 2. Submitted projects update (OEOSC) – D. Aikens 3. Refractometer measurements update (NIST) – J. Burnett 4. Other reports and updates – Project Leaders 6. Group Discussion Topics – A. Phenis 7. Time and Place for next meeting - suggestions 1. Teleconference SPIE Annual Meeting, San Diego, CA August 9 th – 13 th , 2015 2. 3. SPIE DSS, Baltimore, MD April 18 th – 22 nd , 2016 8. Adjourn – A. Phenis

Welcome 3  ASC OP/TF6 (OEOSC)  Write the materials standards standards  Coordinate with other TF developing supporting standards  IRMSWG (SPIE)  Advise TF6 regarding instrumentation and measurement methods  Meetings will consist of status reports, technical evaluations, recommendation  Work the details of the measurements  Test plans  Instrument development /upgrades  Sampling protocols  Sample specs and procurement  Identify funding sources  All documents from this meeting will be posted to:  http://www.optstd.org/op1%202015meetings.htm

Approval of previous meeting 4 minutes  Previous meeting minutes can be found at  http://www.optstd.org/OP1%20Meeting%20Docu ments/2014/TF6/140505%20Draft%20Minutes% 20ASC%20OP%20TF6%20IR%20Materials%20 v1.pdf

5 Reports

6 Pilot study status update A. Phenis – Cymer, an ASML Company

Study Status 7  NIST has started testing with Germanium  Testing has been prioritized by the results from a survey done by Gary Wiese (April 2013)  The testing order/priority can change based on what is available at NIST.  NIST will start at the highest priority and move down the list

Pilot Study Material Status 8 Measurement Material Supplier Status Priority Samples delivered, 1 Germanium Photonic Sense GmbH Measurements underway 2 ZnSe II-VI NA Multispectral ZnS 3 DOW NA (Cleartran) 4 Silicon Lattice Materials NA 4 Silicon Novotech NA 5 CaF2 Fairfield Crystal NA 5 CaF2 Hellma Materials GmbH Expected delivery May 2015 6 BaF2 Fairfield Crystal NA 6 BaF2 Hellma Materials GmbH Expected delivery May 2015 6 BaF2 ISP Samples delivered Delayed due to factory fire, 7 IRG26 (As2Se3) Schott Expected deliver TBD 8 GASIR1 Umicore Expected delivery June 2015 BD2 glass 9 (Ge28Sb12Se60) Lightpath Technologies NA

9 Submitted projects update D. Aikens – OEOSC and Savvy Optics, LLC

10 Spectral Bands – OP1.007  Draft standard OP1.007 submitted for review  Ballot complete; 7 votes received, one page of comments  Draft has been revised to accommodate comments  Added table for reference wavelengths by band for measurements  Modified ranges based on input  Ballot has been submitted to entire ASC OP for adoption as an American National Standard  Ballot is due by June 19, 2015  If approved by 20 ballots, it will be submitted to ANSI for publication

11 Sampling protocol– OP1.008  Project initiation approved by ANSI  Draft standard OP1.008 submitted for review  No comments received  TF6 ballot has begun  Ballots due by July 19, 2015  Will revise draft to accommodate comments  Presuming it does not need to be reballoted, can then be submitted to ASC OP for adoption as an American National Standard

12 Measurement Methods  Bubbles/Inclusions  Chinese resubmitted proposal for an ISO standard on IR impurities based on bright field inspection  Straie  Chinese resubmitted proposal for an ISO standard on straie based on a shadowgram  Homogeneity  Chinese resubmitted proposal for an ISO standard on homogeneity based on interferometry  All three have been approved as New Work Items; US experts are Eric Stover, Leonard Hanssen and Adam Phenis  Others are welcome to join; see Leonard for more information  We should be able to influence the development of these standards to be acceptable to us  Leonard Hanssen, head of the US delegation, will continue to manage these activities

13 Measurement Methods (continued)  Refractive Index  Plan to use ISO 17328 as starting point, but publish our own American National Standard version  NIST to draft document based on NIST measurement method  Waiting for NIST draft  dn/dT  can be incorporated into RI measurement standard  Absorption/Transmission  Plan to use ISO 15368; need to revise and update  Leonard and Dave will work at the ISO level to start a project for revision

14 Other Standards  Material properties specification and grades  Currently monitoring work in TF1 for a new standard for raw optical glass  New standard includes grades for index, homogeneity, straie, bubbles, inclusions, etc.  May be able to use the same grades for IR materials  Material properties library for design codes  Schema developed by ORA in coordination with Zemax and Lambda  Other code houses have not responded  Waiting for sample data from the pilot campaign to try it out  Can publish the schema as American National Standard once the schema is confirmed  Can’t really offer it to ISO due to conflicting standards

15 Refractometer measurement update J. Burnett – NIST

16 Other reports and updates Project Leaders

17 Group Discussion Topics A. Phenis – Cymer, an ASML Company

NIST IR Materials Pilot Study - Update John Burnett, Leonard Hanssen, and Simon Kaplan National Institute of Standards and Technology Physical Measurement Laboratory john.burnett@nist.gov Outline 1. NIST Refractometry System 2. NIST Commitment to IR Materials Index Pilot Study 3. Index Measurement Issues 4. IR Refractometry Capability 5. Measurement Schedule 18 SPIE DSS 2015 – IRMSWG Meeting – 22 April 2015

NIST Refractometry System sample prism exit/collimation box (rotates) entrance/collimation box detector entrance slit exit slit temp control system purged goniometer sample chamber NIST Refractrometry Facility located at NIST AML 217/F117 • All reflective optics + purge housing + sources/detectors ⇒ operates VUV (120 mm) through near-IR. • Temperature range - operates normally near room T (15 - 25 ° C). • Specs.: - FL=0.5 m, F/# = 10. - Goniometer - calibrated angle encoder scale: absolute angle uncertainty ≤ 0.2 arc-sec. - Feedback temperature control of sample to ≤ 5 mK, purge gas to to ≤ 10 mK. ⇒ Absolute index uncertainty ≤ 5 × 10 -7 routinely attained in visible and UV. dn/dT in range T (15 - 25 ° C). • Delivering index results with above uncertainty in UV/vis to the semiconductor lithography industry. ⇒ For lens design and lens material quality control, needs absolute sub-ppm index measurements. NIST focus has been highest-accuracy index in vis/UV. Laborious process, at least 1 week/sample. 1) Developing index database for values for important optical materials. 2) Accuracy allows investigation of index variations between nominally the same materials. 19 SPIE DSS 2015 – IRMSWG Meeting – 22 April 2015

NIST Commitment to IR Mat’ls Index Pilot Study In response to request, NIST (with director’s blessing) committed in 2013 to participate in IR Materials Index Pilot Study with a direction of substantial resources to make most accurate index measurements of key IR materials. • Upgraded sub-ppm-accuracy UV-vis Min-Dev refractometry facility for λ ~14 µ m. • Goal - Maintain UV-vis capability while achieving highest possible IR accuracy. • Completed and tested in Jan 2015. • Worked with Gary Wiese (Lockheed) to develop optimal specs. for key materials: Ge (single X’tal), ZnSe, ZnS, Si (single X’tal), CaF 2 , BaF 2 (poly), GASIR1 (Umicore glass), IRG26 (As 2 Se 3 ) (glass), BD2 (glass), GaAs (single X’tal), Spinel, AMTIR5 (As-Se), IR Fused Silica, LiF, MgF 2 . • Materials received (multiple samples from different boule locations): Ge prisms: 15 (Photonic Sense (Reynard Corp) (Apex Ang. 15 ° nom) 1/25/15. BaF2 (poly): 2 (ISP Optics Corp.) (Apex Ang. 15 ° nom) + 6 plates. 3/11/15. • Jan. – March, NIST complete other commitments. Started on Ge in April. 20 SPIE DSS 2015 – IRMSWG Meeting – 22 April 2015

IR Mat’ls Index Pilot Study – Uncertainty Estimated Uncertainty • For each material, investigated estimated uncertainty vs. sample specs. - prism geometry (apex angle), surface figure (Zernike coefficients). • For example, as λ gets longer - Uncertainty due to diffraction width increases - Uncertainty due to figure error decreases. • Developed optimal specs. for each material 21 SPIE DSS 2015 – IRMSWG Meeting – 22 April 2015