Amira hK a ssim T he F unc tio na l Ma te ria ls Applie d Re se - PowerPoint PPT Presentation

Ultr asonic ally e nable d L ow T e mpe r atur e E le c tr ole ss and Imme r sion Me tallisation Amira hK a ssim T he F unc tio na l Ma te ria ls Applie d Re se a rc h Gro up Co ve ntry Unive rsity

Ultr asonic ally e nable d L ow T e mpe r atur e E le c tr ole ss and Imme r sion Me tallisation • 3 ye a r pro je c t, sta rte d in Oc to b e r 2010 • F unde d b y: I e MRC • Ob je c tive : to re duc e the pla ting te mpe ra ture s use d in e le c tro le ss a nd imme rsio n pla ting b y the a pplic a tio n o f ultra so und

Ultr asonic ally e nable d L ow T e mpe r atur e E le c tr ole ss and Imme r sion Me tallisation E le c tro le ss a nd I mme rsio n pla ting pro c e sse s use d in Pho to vo lta ic a nd Printe d Circ uit Bo a rd ma nufa c ture T e mpe r atur e Pr oc e ss Comme nts ( o C) E le c tr ole ss 30 – 70 Contains for malde hyde Coppe r High te mpe r atur e s E le c tr ole ss 50 – 90 r e quir e d for good Nic ke l de position r ate Imme r sion 40 – 90 Silve r Imme r sion 80 – 90 Gold

T he e ffe c t of sound on the c he mistr y of a solution Human Diagnostic Ultr asound He ar ing Ultr asound 10 3 10 4 10 5 10 6 10 7 20kHz – 2MHz E xte nde d r ange ultr asound for sonoc he mistr y

COMPRESSION COMPRESSION COMPRESSION COMPRESSION RAREFACTION RAREFACTION RAREFACTION RAREFACTION RAREFACTION 5000 o C 2000 ats BUBBLE GROWS IN SUCCESSIVE REACHES VIOLENT FORMS CYCLES UNSTABLE SIZE COLLAPSE

Ac oustic c avitation in a liquid: NE AR A SURF ACE Bo unda ry L a ye r So lid Surfa c e Asymme tr ic c ollapse Rush of liquid fr om one side pr oduc e s a powe r ful je t of liquid tar ge te d at the sur fac e .

Ac oustic c avitation in a liquid: NE AR A SURF ACE Vide o c o urte sy o f Unive rsity o f T we nte , Ne the rla nds. a nd Shima dzu E uro pa Gmb H, Duisb urg , Ge rma ny

Ac oustic c avitation in a liquid: NE AR A SURF ACE E le c tr oc he mic al E ffe c ts • T hinning of diffusion laye r • Impr ove d mass tr anspor t • Impr ove d solution move me nt • E le c tr ode c le aning • De gassing

E ffe c t of ultr asound on plating r ate Wor ke r s Plate d Me tal Re duc ing Age nt Plating r ate Inc r e ase De c r e ase c omple xing c omplxing Abyane h e t Nic ke l Hypophosphite age nt= low age nt = high al lowthiour e a highthiour e a Mallor y Nic ke l Hypophosphite c onc e ntr ation c onc e ntr ation Masuoka and Nic ke l Hypophosphite Hayashi Yang e t al Nic ke l Hypophosphite T ouye r as e t al Coppe r F or malde hyde Zaho e t al Coppe r F or malde hyde

Ultr asonic fr e que nc y = 530kHz Data r e pr oduc e d by kind pe r mission of; F . T ouye r as e t al Ultr asonic s Sonoc he mistr y 10 (2003) 363–368

• Impr ove d mass tr anspor t • T hinning of diffusion laye r • Cr ystal str uc tur e for me d unde r ultr asonic c onditions in the initial stage s of plating (Abyane h e t al) • L oc alise d he ating in the diffusion laye r (T oye r as e t al) • Ac tivation of c atalyst • De gassing

30- 60 o C Conditione r 5 minute s Rinse 5 minute s Pr e - dip 1 minute RT 30- 50 o C Catalyst 5 minute s Rinse 5 minute s Ac c e le r ator 2 minute s RT Rinse 3 minute s 30- 70 o C E le c tr ole ss Coppe r 25- 60 minute s

HCHO Cu 2+ Re duc tion Oxidation Pd Pd Pd Pd Pd Pd Pd Pd 2e -

Coppe r de posit on the sur fac e of the substr ate .

E le c tro le ss Co ppe r – 3350-1 (Che ste c h L td) – E DT A b a se d So lutio n sub je c te d to ultra so nic irra dia tio n o f diffe re nt fre q ue nc ie s c o ntinuo usly fo r 4 ho urs. Ultr asonic Coppe r Conc . Coppe r Conc . F r e que nc y afte r 4 hour s afte r 48 hour s Contr ol 100% 100% (Me c hanic al Stir r ing) 20 kHz Pr e c ipitate d NA (20 % Amplitude ) 40 kHz 100% 100% 582 kHz 100% 70% 863 kHz 100% Pr e c ipitate d

20 kHz - Pre c ipita te s c o ppe r fro m so lutio n a fte r 4 ho urs E ffe c ts o f c a vita tio n de stro y c he mic a ls in e le c tro le ss fo rmula tio n e .g . E DT A, sta b ilize rs Pr e c ipitate d 100% 40 kHz – Sta b le a fte r 4 ho urs a nd 48 ho urs Cu in solution Pr e c ipitate , 70% Cu in Solution Hig h fre q ue nc y (583/ 850 kHz) – unsta b le Ra dic a l fo rma tio n – o xida tio n o f c he mic a ls in e le c tro le ss fo rmula tio n

E xpe r ime ntal Pr oc e dur e • E le c tro le ss Co ppe r – 3350-1 (Che ste c h L td) – 1 litre • Ca ta lyst – 3344 (Che ste c h L td – Pd/ Sn c o llo id) • Sub stra te – Unc la d e po xy la mina te (I so la Dura ve r 104) • T e mpe ra ture - 25, 30, 35, 40, 45 a nd 50 ºC • Pla ting T ime – 25 minute s • Ag ita tio n - Ultra so und (40 kHz) o r Ma g ne tic Stirring Ultra so nic Ba th – L a ng fo rd, Mo de l 475T T 40 kHz Po we r de nsity 90.3 W/ litre

Re sponse s 1. We ight gain Dry e po xy pa ne ls in o ve n fo r 24 ho urs a t 120 ºC We ig h Pro c e ss thro ug h E le c tro le ss Co ppe r We ig h Dry e po xy pa ne ls in o ve n fo r 24 ho urs a t 120 ºC om we ight gain  c alc ulate plating r F r ate . 2. Mor phology Sc anning E le c tr on Mic r osc ope

Plating rate µm/25min Ma in e ffe c t o n pla ting ra te is te mpe ra ture – pa rtic ula rly a b o ve 40 ºC Ultra so und ha d a slig ht ne g a tive e ffe c t a t lo w te mpe ra ture Slig ht impro ve me nt a t 35 ºC a nd a b o ve

Pd Ultr asonic • Ultra so und sc rub s surfa c e a nd Mic r oje ts Pd re mo ve s c a ta lyst Pd • L o we rs pla ting ra te • Pa rtic ula rly pro b le ma tic a t lo w Pd te mpe ra ture – lo ng e r initia tio n time Pd • At hig h te mpe ra ture (50 ºC) Pd ultra so und a lwa ys pro duc e s g o o d re sults – sho rt initia tio n Pd time Pd

Plating rate µm/25min Pla ting ra te rise s a s de la y time inc re a se s to 7 minute s 10 minute de la y c a use s pla ting ra te to dro p sinc e a lmo st ha lf the pla ting time is witho ut a g ita tio n

Afte r 10 minute s ultra so und mo st o f c a ta lyst re mo ve d fro m surfa c e

Plating rate µm/25min 7 minute de la y – b e st pla ting re sults ‘ with ultra so und’ a t a ll te mpe ra ture s Ultra so und with 7 minute de la y a t 40 ºC g ive s pla ting ra te s hig he r tha n ‘ sile nt’ pla ting a t 45 ºC

asound Ultr 40 ºC Sile nt

Conditions: F r e que nc y= 40kHz 7 minute de lay Ultr asound r e duc e s plating te mpe r atur e Re duc e s e ne r gy ne e de d

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