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Thin Optic Constraint Mireille Akilian Amir Torkaman Space Nanotechnology Laboratory December 10, 2003 Outline Problem Statement Functional Requirements Strategies Concepts developed Detail design Results and


  1. Thin Optic Constraint Mireille Akilian Amir Torkaman Space Nanotechnology Laboratory December 10, 2003

  2. Outline • Problem Statement • Functional Requirements • Strategies • Concepts developed • Detail design • Results and Conclusions

  3. Problem Statement Forces that lead to optic surface warp: •Gravity (weight sag at angle θ , effect linear with θ ; θ < 70 arcsec) •Friction (2-3 µ m error) •Thermal expansion mismatch between optic and device (100’s of microns) Optics flatness on one side < 0.5 µ m peak to valley

  4. Functional Requirements • Reduced effects of thermal expansion and friction • Gravity pitch accuracy 36 arcsec • Placement repeatability: Pitch: 72 arcsec Lateral: 1.5 mm • Ease of inserting optic into device • Optic front surface clear during metrology Three constraint points on surface of rectangular and Optic circular optics

  5. Strategies Air pressure Vacuum Vacuum Double-Sided preloaded air air bearings bearings optic optic Double-Sided flexures optic

  6. Concepts Developed Functional Requirements Design Parameters Hold optic vertically Inclinometer & tilt stage Back surface actuation Optic front surface clear Air gap variation < 3 µ m Small bearing OD Double-Sided Air temperature drop < 0.5 ° C Metal bearings Air Bearings Optimum feeding parameter Acceptable stiffness Flexure length Constrain up to 1.6 mm thick optic Double-Sided Monolithic flexures Minimum centerline misalignment Flexures Account for 1 ° C temperature change Flexure geometry

  7. Double-Sided Air Bearings Design Analysis Y-translation Opposed, inherently constraints compensated bearings Set A A o : constrained by geometry Set o : constrained by geometry (x6) Choose h Choose h Optic Choose A i /A A o Choose A i / o 0.6 < Λξ optimum < 1.1 Vacuum preloaded bearings Choose P s Calculate load capacity and stiffness Λξ d o A o d i A i h P s W k µ m N/ µ m mm 2 mm 2 N/mm 2 mm mm N 7 38.5 0.2 0.13 10 1.5 0.376 3.1 0.172

  8. Double Side Air Bearings Experiment, Results, and Conclusions Load vs. air gap 4 Theoretical load 3 capacity Load (N) Operating 2 region 1 0 0 5 10 15 20 µ Air gap ( m) No friction and thermal mismatch between optic and device No contact deformation Acceptable load capacity and stiffness Design and assembly complexity Moderate to High cost

  9. Double-Sided Flexure Assembly Reference Double- Block sided flexures Bottom Flexure and side tilt flexures stage

  10. Double-Sided Flexures Design Analysis Wire EDM-ed, Monolithic flexures 0.8 mm 1. Vertical flexures 42 mm Allow for optic insertion/removal 21 mm Provide preload 0.6 (k lateral = 2.45E-4 N/ µ m ) mm 6.75 mm ϕ = 2 mm ruby balls 2. Horizontal flexures Accommodate for thermal 2 mm expansion (k lateral = 0.024 N/ µ m) Material Aluminum 6061 T651

  11. Double-Sided Flexures Flexure Deflection and Stress Lateral displacement due to optic thickness After optic placement: Horizontal displacement Vertical parasitic 283 µ m motion Vertical displacement 6.6 µ m

  12. Bottom/Side Flexure Design 2.47 EI = > F F buckle z 2 L = ∆ × M X F z z 3 2 F L M L δ = + x z Fx 3 EI 2 EI EA = k axial L F = x k δ lateral M EI ω = 3.52 n 3 m L flx Outer Diameter (mm) 0.635 Inner Diameter (mm) 0.508 Length (mm) 50 Buckling Force (N) 0.93 Axial Stiffness (N/ µ m) 0.456 Lateral Stiffness (N/ µ m) 2.22E-05

  13. Vertical Reference Flat • Front surface flatness: 0.1um – Optically polished Nickel coated Aluminum block – 90 deg Angle +/- 1 arcsec • Base has tilt adjustment – Resolution: 2 µ rad • Inclinometer resolution: 14 arcsec

  14. Flexure Tilt Stage Design • Allows for pitch / yaw adjustments (2 ± 0.0005 ° ) • Actuation Mechanism: – Fine-thread (#¼-100) screws • Preload Mechanism: – Springs or Belleville washers

  15. System Assembly

  16. Preliminary Experiments � Autocollimator Experiments: • Flexure tilt stage: achieves desired range & accuracy (2 µ rad) • Repeatability Pitch: 1.2 µ rad Yaw: 11 µ rad

  17. Surface Metrology Results � Shack-Hartman Surface Metrology Results: • No local deformations at flexure/optic interface • Placement repeatability 55 nm

  18. Conclusion • Identified and analyzed optic deformation forces – Gravity – Friction – Thermal expansion • Theoretically and experimentally proved the ideal concept of using air bearings • Designed and built an optic holding device using flexures • Future Improvements: – Reference flat must be polished – Systematic and repeatable optic placement procedure – Further surface metrology experiments

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