Laser assisted micro/nanoscale material processing and in situ - PowerPoint PPT Presentation

Laser ‐ assisted micro/nanoscale material processing and in ‐ situ diagnostics David J. Jae ‐ Seok Hwang 1 , Costas P. Grigoropoulos 2 1 Department of Mechanical Engineering, State University of New York, Stony Brook, NY, USA 2 Department of Mechanical Engineering, University of California, Berkeley, CA, USA

Introduction to optical near-field Coupling of laser (light) illumination onto the sharp tip structures for sub-diffraction limit confinement Apertured Fiber Coupled NSOM Apertureless NSOM Quartz Au (100nm thick) 1.56  m 1.56  m 0 0 x (nm) D.J. Hwang, S.G. Ryu, N. Misra, H.J. Jeon, and C.P. Grigoropoulos, Applied Physics A (2009). A.Chimmalgi, C. P. Grigoropoulos, and K. Komvopoulos, J. Appl. Phys. 97, 104319 (2005). A. Chimmalgi, Choi, T.–Y., Grigoropoulos, C.P., and Komvopoulos, K., 2003, Applied Physics Letters, Vol. 82, pp. 1146–1148. D.J. Hwang, Chimmalgi A., Grigoropoulos C. P., J. Appl. Phys. 99(4), 044905, 2006. C.P. Grigoropoulos, and D.J. Hwang, in Nanomanufacturing (Chapter 9), ed. by Chen, American Scientific Publishers, In-press, 2009. C.P. Grigoropoulos, A. Chimmalgi, D.J. Hwang, in Laser ablation and its applications (Chapter 19), Springer Series in optical sciences, New York, 2007. C.P. Grigoropoulos, D.J. Hwang, A. Chimmalgi, MRS Bulletin (32) January Issue. (2007).

Scalable Nanomanufacturing by Optical Near-Field Collaboration with Prof. Bauerle, Univ. of Linz, Austria Use of Microsphere Array as Array of NSOM Probe  H. Pan, D.J. Hwang, C.P. Grigoropoulos et. al., Small, 2010  D.J. Hwang and C.P. Grigoropoulos, “Arbitrary pattern direct nanostructure fabrication methods and system,” US20110318695 A1 (2011)

Laser Based Scalable Nanow ire Grow th Nanofabrication by Tips coupled with Lasers (Main PI: Prof. Grigoropoulos, UC Berkeley), Funded by Darpa, MTO Demonstrated Localized Si & Ge Nanowire Synthesis Laser CVD Gases Tip Height Control (z) -Comb-drive Nanoindentation -Piezoelectric Voltage Bias Laser Piezo-Scanner Control (x-y) Heterogeneous growth Single catalyst Selectivity Processing Scheme Processing Laser Beam from top (Scheme B) Processing Laser Beam from top (Scheme B) Metal-Organic Gas Metal-Organic Gas For catalyst Deposition For catalyst Deposition In-situ SEM & FIB Monitoring Optical lever sensing Piezoresistive Subsequent Nanowire Growth Subsequent Nanowire Growth sensing -Photoluminescence -Electroluminescence -Tunneling Current Processing Laser Beam from side (Scheme A) Processing Laser Beam from side (Scheme A) -Conductance -Electron Emission (Laser Enhanced) Written Metal Catalysts Written Metal Catalysts or Quantum dots or Quantum dots In-situ Repair & Sharpening of Worn Tips Parallel Processing Overall Configuration Parallel Processing Overall Configuration In-situ Monitoring Scheme Parallel Processing Overall Configuration

In-situ monitoring of laser processing in TEM Optical near- field Probe Sample 532nm Sintered / crystallized Ni NP’s Achievement of Single Crystal Si by In-situ laser sintering Optical near-field simulation in-situ laser crystallization in TEM process B. Xiang, D. J. Hwang, J. B. In, S. ‐ G. Ryu, J. ‐ H. Yoo, O. Dubon, A. M. Minor, and C. P. Grigoropoulos, "In Situ TEM Near ‐ Field Optical Probing of Nanoscale Silicon Crystallization," Nano Letters, vol. 12, pp. 2524 ‐ 2529 (2012).

Sub-diffraction limit feature by optical far-field Selective protein adhesion spot by fs laser Multi-Photon Absorption Process peg (cell protecting) film on glass wafer (cell adhesive) Electron avalanche Sub-diffraction limit Feature size Processing threshold MPA process : I k I 10µm Laser spot (1/e 2 ) Gaussian profile Confocal microscope images AFM images after Feature size of adsorbed protein laser process step  Sub-diffraction limit sized features H.J. Jeon, R. Schmidt, J.E. Barton, D.J. Hwang, L.J. Gamble, D.J. Castner, C.P. Grigoropoulos, and K.E. Healy, JACS 133(16), 6138 (2011)