High Resolution, High Sensitivity SIMS Analysis for DualBeams - PowerPoint PPT Presentation

High Resolution, High Sensitivity SIMS Analysis for DualBeams Brandon Van Leer The world leader in serving science

What SIMS can do? Mass Spectra Depth profile Elemental maps: 32 S in steel 3D data: AlGaAs layers XY spatial XZ depth 2

Analytical techniques comparison SEM/EDS TEM/EDS Atom Probe SIMS on DualBeam Probe beam electron electron Atom extraction ion Analysis beam x-ray x-ray Ion (100% ionization) ion (1% ionization) Isotope analysis No No Yes Yes Quantitative Yes Yes Yes No Lateral resolution 1µm 0.5-1nm 0.3 - 0.5nm 50nm Depth resolution 1µm 2-10nm (specimen thickness) 0.1 - 0.3nm 20nm 5-10 atomic ppm for one Detection limit 1000ppm 1000ppm minor element (boron, 10-100ppm carbon,…) Lightest element Li (?) B H H 10 -3 - 10 -4 Pa 10 -5 Pa 10 -7 - 10 -10 Pa 10 -3 - 10 -4 Pa Vacuum spatial and depth Advantage Routine High spatial resolution/3D atomic resolution/3D resolution/light elements/depth profile/detection limit SEM/EDS: scanning electron microscope / energy-dispersive spectrometer TEM/EDS: transmission electron microscope / energy-dispersive spectrometer DualBeam: Gallium FIB used for a DualBeam as an example. 3

What is TOF-SIMS? Secondary Ion Mass Spectrometry (SIMS) is a materials chemical analysis technique based on measure mass-to-charge ratio (m/z) from detected secondary ions, which are emitted as a small fraction of charged particles in sputtering from solid material surfaces by bombardment of primary ion beam. 4

SIMS application example for Li-ion battery research Positive electrode Negative electrode SIMS applications: • Lithium element distributions after charge and discharge states. • Co, Ni, Mn depth distribution. • Binder materials element distribution. Conductor SIMS enables precise characterization of Li containing materials 5

SIMS application example for Li-ion battery research 7 Li + 16 O - Lithium and Oxygen lateral distributions in Lithium-ion battery cathode Li, Ni, Mn and Co elements depth profile in a lithium-ion battery cathode 7 Li+ distribution map in a lithium-ion battery cathode. Horizontal field width (HFW) of the image is 40μm. 6

Polyvinylidene fluoride binders in lithium-ion battery cathode PVDF: polyvinylidene fluoride binders, 19 F - SIMS image shows the distributions of the binders materials SEM/EDS is very challenging for mapping the binder element fluoride distribution, but can be efficiently imaged using SIMS technique. 7

SIMS application example for steels ISE 16 O 56 Fe 11 B 142 Nd 27 Al SIMS maps showing the distribution of B, O, Al, Nd and Fe in a NdFeB magnet SIMS allows detection of light and low concentration elements is steels 8

AlGaAs layers in 3D 58nm AlGaAs layer 25nm AlGaAs layer 3D SIMS data reconstruction of 27 Al in a multi-layers stacks of GaAs/AlGaAs layers grown on metal. The thin 25nm AlGaAs layer is uneven growth from a metal substrate. Sample was provided by: Prof. Venkat Selvamanickam from UH-Mechanical Engineering, University Houston, USA 9

Join our DualBeam – SIMS talk on Thursday! 11

Electron microscopy innovation at Thermo Fisher… More than 25 years of DualBeam™ innovations… 12