Alexander Schilling Glass. Really a cost issue? Approx. 50% of all - PowerPoint PPT Presentation

NEXT GENERATION IN THE MANUFACTURING � � OF MICRO FLUIDIC DEVICES � � � � � in glass, silicon and quartz �� � Alexander Schilling �

Glass. Really a cost issue? � Approx. 50% of all micro fluidic applications are made in glass, silicon or glass/silicon � � 3 of the 5 biggest micro fluidic application are made in glass, silicon or glass/silicon � � Prototyping in glass is 10 times cheaper � � Price up to a quantity of 100000 pc. is equal � � No, it isn‘t a cost issue. �

Next Generation Manufacturing � The combination of new developed and existing processing methods at LTF � � leads to unique results and products � � which can not be achieved by any other method. �

Multi step hight with mixing structure and holes � 200µm 300µm 100µm 300µm 200µm

Through Glass Vias � silicon wafer with conductive vias insulated by surrounding glass bushings � silicon wafer with glass areas including several conductive vias � glass wafer including conductive vias � highly doped silicon vias � Glass and Silicon are CTE machted �

TGV wafer �

Example how to implement TGV � Vacuum tight � Conductive 0.01-0.02 Ω cm � Structured ¡glass ¡device ¡ Glass ¡device ¡with ¡TGV ¡

Example how to use TGV � Heat, ¡cool, ¡electricity, ¡thermocouple ¡

We can do the easy things as well �

Glass facts � Chemical resistance � UV transmission � � � Heat resistance � Low fluorescence � � � High pressure � Bio compatible � � � Optical transparency � Long term stable � � � � � �

LTF offers the whole process chain � Grinding and polishing � Water jet cutting � � � Diamond milling � 3D Printing � � � Wet etching – HF, KOH � Molding � � � DRIE � Metall coatings � � � TGV process � Dicing � � � Micro powder blasting � Packinging � � � Laser patterning � Clean room class 100 � � �

LTF facts � Employees : � Quality Standard : � � � TS 16949 � 70 � � � ISO 9001 � � Location : � � ISO 14001 � � Germany �

Plan Optik Group � Leading manufacturer of � structured wafers for MEMS � � Microfluidic devices and systems for � Lab on chip and Flow Chemistry � � Engineering, rapid prototyping, � 3D Printing, molding � �