Thermal Design and Dimensional Drift Jens Flgge, Steffen Rudtsch, - PowerPoint PPT Presentation

Thermal Design and Dimensional Drift Jens Flügge, Steffen Rudtsch, Rene Schödel José Antonio Salgado Nigel Jennett, Tony Maxwell Dirk Voigt Daniel Petit Fraunhofer Erik Beckert IOF Thomas Fröhlich, Marc Schalles

Fraunhofer IOF Temperature measurement WP1 Development and control tools WP3 Development and validation of of a temperature 1 mK µV facilities Thermocouple in oil bath measurement and 28 PM Knowledge of stable machine control system design for improving facilities Picodrift contactless optical heterodyne interferometer 39 PM Instrumented Indentation Tester Maintenance free temperature measurement Measurement equipment Temperature measurement New calibration services Parameters WP4 Thermal modelling and WP2 Behaviour for model optimisation of thermal design of materials, and control tools structures joints Laser Laser Optical sensor Optical sensor 79 PM and sensors Artefact Artefact 52 PM Refrence Refrence Spindle Spindle cylinder cylinder Schematics of a 8 reference capacitance 8 reference capacitance Precision interferometer for long time stability measurement form measure- sensors sensors ment machine Knowledge base for thermal and drift behaviour Guidelines for machine design of material, structures, joints and sensors and active cooling of subsystems WP5 Impact 12 PM Exploitation Training Knowledge transfer staff exchange Guidelines Reports Material Standards for Consultancy services Conference Website and Scientific database Training events industry and IP licences presentations e-learning papers

PTB Ultra Precision Interference Comparator Objective: Evaluation of thermal expansion and long time stability of materials, joints, sensors and actuators • Absolute measurement of length between parallel surfaces using phase stepping interferometry • Beam diameter: 60 mm • Parallelism for highest precision: 4”

PTB Ultra Precision Interference Comparator Long time stability of Results: Long time stability of fused silica fused silica line scales and single crystal silicon from same substrate

VSL Picodrift Interferometer Objective: Sub 10 pm accuracy evaluation of short and midterm stability of materials, joints, sensors and actuators J.D. Ellis, K.-N. Joo, J.W. Spronck, and R.H. Munnig Schmidt, “Balanced interferometric system for stability measurements”, Appl. Opt. 48 (9), 1733-1740 (2009).

PTB Heterodyne Phasemeter Test setup for stability evaluation Struck SIS 3302 16 Bit, 100 MHz ADC Digital I/O VMEbus Interface A/D-Converter FPGA Units Interpolation nonlinearity below 5 pm shown by comparison with X-ray interferometer Dual Phase Lock-In Algorithm in FPGA E XTERNAL T RIGGER PC FPGA R EFERENCE R EFERENCE T ABLE T ABLE T RIGGER - Φ =90° Φ =0° L OGIC M EASUREMENT D ATA P ROCESSING A RM MAC S IN 1 ADC ∑ X φ 1 E XTRAPOLATION CH 1 S IN MAC C OS 1 VIA L INEAR O RDER F RINGE ∑ R EGRESSION X φ 1 - φ 2 C OUNTER VME- C OS Bus MAC S IN 2 M ERGE ∑ DDR2 X φ 2 MAC C OS 2 L ENGTH RAM ADC ∑ X V ALUE CH 2 ATAN F RACTION R EFERENCE A RM ≈ 50 kH z 100 MHz But due to asymmetry 2 pm / mK sensitivity

Nanoindentation Objective: mapping of creep and hardness at temperature by nanoindentation. • Procedures to be developed to calibrate the nanoindenter instrument at elevated temperatures. • Dimensional stability to be evaluated and an uncertainty budget produced. • Procedures developed to map the mechanical properties as a function of temperature. Nanoindentation instrumentation • Nanoindentation results compared to those obtained from conventional creep measurements.

Fraunhofer Demonstration Samples IOF Planar Fused Silica Substrates bonded together with 3 different technologies Demonstrator for Nanoindentation Demonstrator for one/ two side Interferometry and one side interferometry (One probe wrung on base substrate)

Thermocouple Measurements Objective: Evaluation of stress sensitivity of zero point and characteristics of thermocouples near room temperature for maintainance free measurements • Thermocouples are lightweight and with no self heating. • Direct differential temperature measurement for control of gradients • Investigation of 32 thermocouples regarding stability of zero point and µV characteristics dependence on stress and mounting conditions Cu/Konstantan, Ni-Cr/Ni-Al, Pt/Rh , … - Different materials - Different wires Manufacturer, length and diameters - Foil and Thinfilm thermocouples Diagram full range ~ 1 mK - Connectors

Development of a fixed-point cell (binary Ga-Sn alloy) Objective: Development of a miniaturized fixed point cell near room temperature for in machine calibration of Pt-reference thermometers. • Investigation of the influence of fixed point cell materials on the melting and supercooling Melting plateau of pure gallium behaviour of pure gallium • Fixed point cell doped with tin to produce an eutectic binary alloy with gallium to get a fixed point temperature at about Cell dimensions: 20.4 ° C. 180 mm x 30 mm • Find optimum boundary Melting plateau of an eutectic Ga – Sn alloy at about 20.5 ° C conditions and algorithms for a stable and reproducible detection of melting plateau.

Thermal Modelling and Optimisation Objective: Thermal modelling and active temperature control for the optimisation of Precision Engineering tools. • Thermal modelling of complex engineering equipment and comparison of Modelling Thermal model of the SIOS NMM approaches (FEM for complex models, Modal identification method for reduced models). • Development of a demonstrator for validation of models and investigation of joint structures • Development of thermal control algorithms Test setup for the CCD Microscope and cooling elements for an exemplarily temperature control of a measuring microscope at the PTB line scale comparator.

Thermal Modelling and Optimisation Laser Laser Objective: Exemplarily thermal Optical sensor Optical sensor modelling and optimisation of the Artefact Artefact LNE form measurement machine. Refrence Refrence Spindle Spindle cylinder cylinder 8 reference capacitance 8 reference capacitance sensors sensors Local measurement of the temperature LNE form measurement machine Equations and modelling issues 0 Z Local governing equations (Controlled (Diturbance) V Modelling issues temperatures) Low order model approach Experimental device m Low order model (Measured Modal identification method (MIM) U temperatures) (Actuators) State feedback thermal control Linear quadratic regulator (LQR) X Linear quadratic Estimator (LQE) Regulator State estimation Linear quadratic Gaussien compensator Low order model (LOM) Control test case and results