SPS PRESENTATION COBETTER WWW.SPS-EUROPE.COM WWW.SPS-AMERICA.COM WWW.SPS-ASIA.COM www.sps-europe.com | www.sps-america.com | www.sps-asia.com
SPS Products Handling Shipping Wetprocess / CMP Thin film Photolithograpy Offices: S.P.S. bvba S.P.S. bvba S.P.S. S.R.L. SPS-Asia Technology Pte. Ltd. SPS-Europe B.V. SPS-Europe GmbH S.P.S. Ltd. Steenweg op Withof 5 9, Rue du Pont Via Pietro Mascagni 31 10 Ubi Crescent Midden Engweg 41 Weisbergerstraße 3 Aghmhor Annex B-2960 St. Job in ’t Goor 69390 VOURLES 20122 Milano Ubi Techpark Lobby B, #06-18 NL-3882 TS Putten D-85053 Ingolstadt Whitmuir, Selkrik Belgium France Italy Singapore 408564 The Netherlands Germany TD7 4PZ United Kingdom Tel.: (32) 3 440 0895 Tel.: (33) 4 72 31 78 35 Tel.: (39) 3 457 357 177 Tel.: (65) 911 30 172 Tel.: (31) 341 360 590 Tel.: (49) 841 370 530 Tel.: (44) 1750 725 712
3 C O B E T T E R I N T R O D U C T I O N C4 C5 R&D, Lab and Factory C C 1 2 C6 C 3 SET UP C1 Factory Membrane Filter Manufacturing 9400 SQM C2 Factory Depth Filter Manufacturing 9000 SQM C3 Factory Semiconductor Filter Manufacturring 13600 SQM, 2019 Building C4 Factory C6 Factory C5 Factory Sustainless Filter Manufacturing & Fluoroplastics Resurtech R&D Lab center 41000 SQM, 2020 Life Center 25000 SQM, 2020 Manufacturing & Housing Manufacturing 28000 SQM www.sps-europe.com | www.sps-america.com | www.sps-asia.com
Company Profile Cobetter Customers in over 80 countries. S P S c o m p a n y p r e s e n t a t i o n Japanse Customers more than 300 . Provide over 4,000,000 filters 30%+ annually. To 3200 customers worldwide. 140 million USD (2018) 1500+ 人 201902 www.sps-europe.com | www.sps-america.com | www.sps-asia.com
5 FILTRATION , SEPARATION & PURIFICATION 1nm ~ 100µm COBETTER CAN PROVIDE Full Range of Manufacturing Capabilities for the Filtration Industry www.sps-europe.com | www.sps-america.com | www.sps-asia.com
6 www.sps-europe.com | www.sps-america.com | www.sps-asia.com
7 They have 9 Labs 80+ Scientists & technicians E S T A B L I S H E D More than 54 Testing Items A D V A N C E D and 1200+ Reports per Year A N A L Y S I S C E N T E R § Accredited by China National Accerditation Service for Conformity (CNAS) § Uses Advanced Experiment Instruments and Standard Operating Procedures (SOP) D R I V E N B Y T E C H N O L O G Y ModulesCommitted to Producing Microfiltration Membranes, Nano- § Confidentiality Rules and Regulations to Control Test Procedures and Results fibers, and UF Modules § Validation Services to All Customers § ISO 9001:2015 Certified Company § ISO 17025:2018 Qualified Laboratories 10+ Unique Filtration Media 100+ Patents 1200+ Filtration Products www.sps-europe.com | www.sps-america.com | www.sps-asia.com
8 HAPES vs. PTFE HAPES Membrane PTFE Membrane (Polytetrafluoroethylene) SEM SEM SEM Features Features § Natural hydrophobic membrane § Better particle removal § Excellent chemical compatibility § Maximum temperature up to 60 ºC § High meltinh point (327ºC) § Reduce equipment pre operation time § Low extractables § High flowrate and longer life time § High porosity, uniform pore size distribution
HAPES vs. PTFE ITE M H A P E S 5 nm P TF E 5 nm P TF E 20 nm Molecular Structure Flow (kPa@20L/min) 30 50 30 DIW / BOE / BHF / DHF / SC1 /SC2 Chemical Compatibility (H2O2 ＜ 5%) /……, except for the strong oxidizing HPM,SPM,SC1,SC2,HNO3…… reagent Applicable Temperature ≤ 60 ℃ ≤ 180 ℃ www.sps-europe.com | www.sps-america.com | www.sps-asia.com
HAPES vs. PTFE Application Comparing with PTFE filter, HAPES shows even better particle removal efficiency www.sps-europe.com | www.sps-america.com | www.sps-asia.com
11 HAPES Chemical Compatibility www.sps-europe.com | www.sps-america.com | www.sps-asia.com
1 2 HAPES Filter Performance Features C a r t r i d g e D i s p o s a b l e Membrane High asymmetric polythersulfone Reduce equipment pre-operation time ； § Support / Cage / HDPE § Excellent retention ； Core / End caps Very high flow rate and longer life ； § O-ring TEV or EPDM Ultralow metal ion extractables option ； § Shell HDPE ( Compact Capsule ) § Manufactured in a cleanroom environment ； Shell 100% integrity tested. § PFA ( Disposable ) Application F i l t e r X 1 Z 1 Z 2 § Process: Wet Etch and Cleans ； Diameter Φ 68 Φ 83 Φ 83 § Installation Point: Point of Tool ； 0.8 m 2 / 10" 1.4 m 2 / 10" 1.8 m 2 / 10" Filter Area § Chemistry: § Dilute acids (such as BOE/DHF/SC2) ， 2/5/10/20/ 2/5/10/20/ Removal Ratings 10/20/30/50 nm 30/50 nm 30/50 nm § Dilute bases (such as SC1/TMAH) ， DIW. www.sps-europe.com | www.sps-america.com | www.sps-asia.com
13 PTFE Chemical Compatibility Note Good chemical compatibility Limited condition use Attacked or dissolved www.sps-europe.com | www.sps-america.com | www.sps-asia.com
1 4 CHVH Filters Performance Features C a r t r i d g e D i s p o s a b l e Support / Cage / HDPE Core / End caps § Hydrophilic PTFE: do not require preetting in O-ring TEV or EPDM water-based chemicals Shell HDPE ( Compact Capsule ) § HDPE Cage: enchances chemical compatibility, Max. Operating reduces cost and maintain high cleanliness 70 °C Temperature Max. Differential Application 0.4 MPa / 21°C Pressure F i l t e r Φ 68 mm Φ 83 mm § Wet etch and Clean X1 X2 Z1 Z2 Z3 § High-viscosity photoresist and photochemicals Filter Area m 2 / 10” § Bulk chemicals 0.91 1.3 1.3 1.9 2.2 Removal 50nm/0.1/0.2/0.5/1.0/3.0/5.0/10um Ratings www.sps-europe.com | www.sps-america.com | www.sps-asia.com
15 Filtration Solution for Ultrapure Water Municipaltap water Multi media filter UV-254 P re filt e r R.O.1 Activatedcarbon R.O.2 Vacuumdegassingfilm EDI F in al filt e r Polisher UV OX Ultrafiltration FAB 1 www.sps-europe.com | www.sps-america.com | www.sps-asia.com 5
16 Filtration Solution for Ultrapure Water Waste water treatment station FAB UPW P re filt e r Activatedcarbon filter Reactiontank Microbiologicaltreatment PH neutralizationtank Air flotationtank Multi media filter Recycledwater process P re filt e r Reverse osmosis 1 www.sps-europe.com | www.sps-america.com | www.sps-asia.com 6
1 7 Pre-filter OPTION 1 Rolledfilter & housing OPTION 2 High flow filter & houding S p e c i f i c a t i o n s Media Polypropylene Gradientfiltration& gradedretention Support and drainage Polypropylene 3x lifetimecomparedwithgeneralmeltblownfilter Design Flow Rate 2m 3 /h/40” Features Lower cost longer lifetime www.sps-europe.com | www.sps-america.com | www.sps-asia.com
1 8 Final filter I t e m Membrane media Asymmetric PES 10nm, 20nm, 30nm, 50nm, Retention rate 80nm 0.1 μ m, 0.2 μ m,0.45 μ m • Highly asymmetric structure & graded pore sizes § Higher porosity § Higher flow rate, higher dirt-holding capacity § Ultra high filtration efficiency www.sps-europe.com | www.sps-america.com | www.sps-asia.com
19 Filtration Solution for Chemical Distribution System Cleaning Etching Photo CMP H2O2 SIO Etch § Developer § OxideSlurries § § H2SO4 BOE Etch TMD series § Metal Slurries § § H3PO4 Poly Etch DEV series § Slurry Additives § § NH4OH Al Etch PI develop Fe(NO3)3 base § § HCl Cu Etch § Thinner Al2(SO4)3 base § § HNO3 Ti Etch PMP ， NBA § Post CMP § § NH4F ITO Etch Toluene,EL. cleaning § § HF Cr Etch PGMEA….. § § IPA Wu Etch § Stripper For Cu,Poly- § § CH3COOH Mo Etch inorganic acid Silicon Proess § § KOH GaAs Etch Amine § § NaOH Solvent base § Acetone § Rinse NMP, § Methanol DMSO, IPA etc. § Detergent § PI Solvent § www.sps-europe.com | www.sps-america.com | www.sps-asia.com
20 Chemical Distribution System Electronic chemicals supply process Chemical Transfer or Chemical Quick CouplingBooth Storage Tank Mixingmodule Finalfilter Pre filter T-Box Chemical supplyModule Day tank or Mixingtank ValvemanifoldBox Point Of Use www.sps-europe.com | www.sps-america.com | www.sps-asia.com
1 Filtration For Chemical 2 All-fluoropolymerHousing Membrane PTFE Bowl/Head PFA Removal Rating 7/10/15/20/30/50nm Locking Ring PVDF: suit for acids PP+GF ： suit for alkaline 0.1/0.2/0.45/1/3/5/10um Cage PFA O-ring TEV/FFKM Filtration Area 0.91, 1.21m2/10"( Φ 68mm) Length 10/20" 1.3, 2.2, 3.0m2/10"( Φ 83mm) Length 10/20" Max. Temp. 100 ℃ 180 ℃ 0.75MPa/25 ℃ Max. Temp. Max. Press. 0.58MPa/25 ℃ Max. Press. In/Out 3/4", 1" CFL 3/4", 1" CPL End Cap 222/Flat vent/drain 1/2", 1/4" Package Dry: suit for organic solvents Prewet ： suit for acids and alkaline www.sps-europe.com | www.sps-america.com | www.sps-asia.com
2 Filtration For Chemical 2 Material SUS 316L O-ring TEV/PTFE/EPDM Length 10/20" Max. Temp. 130 ℃ Design Press. 0.6MPa In/Out 1" NPT vent/drain 1/4"NPT SUS Housing Suitfororganicsolvents www.sps-europe.com | www.sps-america.com | www.sps-asia.com
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