Signals Measurement and Estimation Techniques Issues in the - PowerPoint PPT Presentation

WORKSHOP – May, 3, 2010 IEEE International Conference on Robotics and Automation Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World www.femto-st.fr/WS-icra10/ Cédric Clévy Micky Rakotondre Nicolas Chaillet microPAdS Workshop, IEEE ICRA, Signals Measurement and Estimation 1 Techniques Issues in the Micro/Nano-World – May, 3, 2010

Some characteristics of the « micro-nano world » 100 nm 1µm 10µm 100µm 1mm Microfabrication manufacturing Electronic scanning Optical microscopy Surface effects are predominant 1 mm 100 µm 10 µm 1 µm carbon nanotube pollen oocyte lymphocyte bacterium 200 µm 20-40 µm 2-6 µm 6-15 µm Diameter: 100 nm Lens with its support mirror spectrometer Hearing coil Gear wheel prosthesis 10 µ m 30 130 µm 0 500 µm 800 µm 1 mm µ m Assembled systems Workshop, IEEE ICRA, Signals Measurement and Estimation 2 Techniques Issues in the Micro/Nano-World – May, 3, 2010

Scaling down effects • Consequences of scaling down: – needs of microsystems or systems acting at the microscale – requirements of measurements (Force & position) for control issues or to understand physical phenomena • Micro-nano scale specificities: – Signal of very small amplitude, small signal to noise ratio – Influence of surface forces – Small free space – Resolution in the submicron and micro-Newton range – Influence of environment Workshop, IEEE ICRA, Signals Measurement and Estimation 3 Techniques Issues in the Micro/Nano-World – May, 3, 2010

Problematic • Existing sensors + - – Interferometers Range, Size, – Scanning electron resolution, microscopes Nbe DOF, bandwith, price – Cameras robutsness – Laser sensors – Strain gage Size, Robustness – Piezoceramic sensors fragility range, – Capacitive sensors resolution – … Lack of sensors with suitable range, accuracy, bandwith, number of DOF and size Pushing back of the limits of automation Development of new sensors Workshop, IEEE ICRA, Signals Measurement and Estimation 4 Techniques Issues in the Micro/Nano-World – May, 3, 2010

Main consequences for control High environment sensibility Noisy signals: - low magnitude of usefull signals Non linear, variant and - ratio Signal/Noise is stochastics models unfavourable input Output system controller Measurement/sensors - difficulty to integrate the sensors - sensibility to the environment Workshop, IEEE ICRA, Signals Measurement and Estimation 5 Techniques Issues in the Micro/Nano-World – May, 3, 2010

Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World Observer techniques appied to the control of piezoelectric microactuators 9:00 Micky Rakotondrabe, Cédric Clévy, Ioan Alexandru Ivan and Nicolas Chaillet, from FEMTO-ST am (Besançon, France) Measurement and control for high-speed sub-atomic positioning in scanning probe microscopes 10:00 Andrew J. Fleming and Kam K. Leang, from University of Newcastle (Callaghan, Australia) and am University of Nevada (Reno, USA) 11:00 Microrobotic tools for the measurement of small forces am S. Muntwyler, F. Beyeler and B. J. Nelson, from ETH (Zurich, Swizerland) In-situ mechanical characterization of mouse oocytes using a cell holding device 1:30 Roxanne Fernandes, Andrea Juriscova, Robert F. Casper and Yu Sun , from University of pm Toronto (Toronto, Canada) and Samuel Lunenfeld Research Institute, Toronto Mount Sinai Hospital (Toronto, Canada) 2:30 In situ characterization of thin-film nanostructures with large-range direct force sensing pm Gilgueng Hwang and Stéphane Regnier, from University Pierre et Marie Curie (Paris, France) 3:30 A mechanism approach for enhancing the dynamic range and linearity of MEMS optical force sensing pm Gloria J. Wiens, from University of Florida (Gainesville, USA) 4:30 Observer-based estimation of weak forces in a nanosystem measurement device Alina Volda, from GIPSA-Lab (Grenoble, France) pm Workshop, IEEE ICRA, Signals Measurement and Estimation 6 Techniques Issues in the Micro/Nano-World – May, 3, 2010