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Overview of Silicon Device Physics Dr. David W. Graham West Virginia University Lane Department of Computer Science and Electrical Engineering 1 Silicon is the primary semiconductor used in VLSI systems Si has 14


  1. Overview of Silicon Device Physics Dr. David W. Graham West Virginia University Lane Department of Computer Science and Electrical Engineering 1

  2. ������� Silicon is the primary semiconductor used in VLSI systems Si has 14 Electrons Energy Bands (Shells) Valence Band Nucleus At T=0K, the highest energy band occupied by an electron is Silicon has 4 outer shell / called the valence valence electrons band. 2

  3. ������������ • Electrons try to occupy the lowest Disallowed energy band possible } Energy • Not every energy States level is a legal state Increasing for an electron to Electron occupy Allowed Energy • These legal states } Energy tend to arrange States themselves in bands Energy Bands 3

  4. ������������ E C Conduction Band First unfilled energy band at T=0K Energy E g Bandgap E V Valence Band Last filled energy band at T=0K 4

  5. ������������� Increasing electron energy E C E g E V Increasing voltage Band Diagram Representation Energy plotted as a function of position � Conduction band E C � Lowest energy state for a free electron � Valence band E V � Highest energy state for filled outer shells � Band gap E G � Difference in energy levels between E C and E V � No electrons (e - ) in the bandgap (only above E C or below E V ) � E G = 1.12eV in Silicon 5

  6. ����������������������� Silicon has 4 outer shell / valence electrons Forms into a lattice structure to share electrons 6

  7. ����������������� The valence band is full, and no electrons are free to move about E C E V However, at temperatures above T=0K, thermal energy shakes an electron free 7

  8. ������������������������ For T > 0K • Generation – Creation of an electron (e - ) Electron shaken free and can cause current to flow and hole (h + ) pair • h + is simply a missing electron, which leaves an excess positive charge (due to an extra proton) • Recombination – if an e - and an h + come in contact, they annihilate each other • Electrons and holes are called “carriers” h + e – because they are charged particles – when they move, they carry current • Therefore, semiconductors can conduct electricity for T > 0K … but not much current (at room temperature (300K), pure silicon has only 1 free electron per 3 trillion atoms) 8

  9. ������ • Doping – Adding impurities to the silicon crystal lattice to increase the number of carriers • Add a small number of atoms to increase either the number of electrons or holes 9

  10. �������������� Column 3 Column 4 Elements have 3 Elements have 4 electrons in the electrons in the Valence Shell Valence Shell Column 5 Elements have 5 electrons in the Valence Shell 10

  11. ���������������������� Donors • Add atoms with 5 valence-band electrons • ex. Phosphorous (P) • “Dontates an extra e - that can freely travel around • Leaves behind a positively charged nucleus (cannot move) • Overall, the crystal is still electrically + neutral • Called “n-type” material (added negative carriers) • N D = the concentration of donor atoms [atoms/cm 3 or cm -3 ] ~10 15 -10 20 cm -3 • e - is free to move about the crystal (Mobility µ n ≈ 1350cm 2 /V) 11

  12. ���������������������� Donors n-Type Material • Add atoms with 5 valence-band electrons – – – – + + – + + + + • ex. Phosphorous (P) • “Donates” an extra e - that can freely – – + + – – + + – + + + travel around – – – + – • Leaves behind a positively charged + + + + + – – – nucleus (cannot move) • Overall, the crystal is still electrically neutral Shorthand Notation + • Called “n-type” material (added Positively charged ion; immobile negative carriers) – Negatively charged e-; mobile; • N D = the concentration of donor Called “majority carrier” atoms [atoms/cm 3 or cm -3 ] + Positively charged h+; mobile; ~10 15 -10 20 cm -3 Called “minority carrier” • e - is free to move about the crystal (Mobility µ n ≈ 1350cm 2 /V) 12

  13. ������������������������������ Acceptors • Add atoms with only 3 valence- band electrons • ex. Boron (B) • “Accepts” e – and provides extra h + to freely travel around • Leaves behind a negatively h + charged nucleus (cannot move) • Overall, the crystal is still – – electrically neutral • Called “p-type” silicon (added positive carriers) • N A = the concentration of acceptor atoms [atoms/cm 3 or cm -3 ] • Movement of the hole requires breaking of a bond! (This is hard, so mobility is low, � p ≈ 500cm 2 /V) 13

  14. ������������������������������ p-Type Material Acceptors • Add atoms with only 3 valence- + + + band electrons + – – + – – – – • ex. Boron (B) + + – – • “Accepts” e – and provides extra h + + + – – + – – – + to freely travel around + + – + – – – – • Leaves behind a negatively – + + + charged nucleus (cannot move) • Overall, the crystal is still Shorthand Notation electrically neutral – Negatively charged ion; immobile • Called “p-type” silicon (added + Positively charged h+; mobile; positive carriers) Called “majority carrier” • N A = the concentration of acceptor – Negatively charged e-; mobile; atoms [atoms/cm 3 or cm -3 ] Called “minority carrier” • Movement of the hole requires breaking of a bond! (This is hard, so mobility is low, � p ≈ 500cm 2 /V) 14

  15. ������������������ The Fermi Function • Probability distribution function (PDF) • The probability that an available state at f(E) an energy E will be occupied by an e - 1 1 ( ) = f E ( ) kT − 1 + E E e f 0.5 � Energy level of interest E E f � Fermi level E f E � Halfway point � Where f(E) = 0.5 � Boltzmann constant k 1.38×10 -23 J/K = 8.617×10 -5 eV/K = � Absolute temperature (in Kelvins) T 15

  16. ���� ����������������� − f >> If E E kT f(E) Then 1 ( ) kT ( ) − − ≈ E E f E e f 0.5 Boltzmann Distribution •Describes exponential decrease in the density of particles in thermal equilibrium E f E with a potential gradient •Applies to all physical systems • Atmosphere � Exponential distribution of gas molecules ~Ef - 4kT ~Ef + 4kT • Electronics � Exponential distribution of electrons • Biology � Exponential distribution of ions 16

  17. ��������������!"�#������$ E E C E g E f E V 0.5 1 f(E) Band Diagram Representation Energy plotted as a function of position � Conduction band E C � Lowest energy state for a free electron � Electrons in the conduction band means current can flow • Virtually all of the � Valence band E V � Highest energy state for filled outer shells valence-band energy � Holes in the valence band means current can flow levels are filled with e - • Virtually no e - in the � Fermi Level E f � Shows the likely distribution of electrons conduction band � Band gap E G � Difference in energy levels between E C and E V � No electrons (e - ) in the bandgap (only above E C or below E V ) � E G = 1.12eV in Silicon 17

  18. �%%�����%�����������������&�#�� E f is a function of the impurity-doping level n-Type Material E E C E f E V 0.5 1 f(E) • High probability of a free e - in the conduction band • Moving E f closer to E C (higher doping) increases the number of available majority carriers 18

  19. �%%�����%�����������������&�#�� E f is a function of the impurity-doping level p-Type Material ( ) 1 − f E E E E C E f E V 0.5 0.5 1 1 f(E) f(E) • Low probability of a free e - in the conduction band • High probability of h + in the valence band • Moving E f closer to E V (higher doping) increases the number of available majority carriers 19

  20. ����������������%�'���������������� • Applies to both electronic systems and biological systems • Look at drift and diffusion in silicon • Assume 1-D motion 20

  21. ���%� Drift → Movement of charged particles in response to an external field (typically an electric field) E-field applies force F = qE which accelerates the charged particle. However, the particle does not accelerate indefinitely because of collisions with the lattice (velocity saturation) Average velocity <v x > ≈ -µ n E x electrons < v x > ≈ µ p E x holes µ n → electron mobility → empirical proportionality constant between E and velocity µ p → hole mobility E µ n ≈ 3µ p 21

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