Micro-Channel Cooling Device 9/20/2011 Andreas Jilg 1 - PowerPoint PPT Presentation

Oct 14, 2023 •9 likes •59 views

Micro-Channel Cooling Device 9/20/2011 Andreas Jilg 1 Micro-Channel Cooling Device Pyrex Sensor Cover Silicon Wafer Nanoport-connector Nanoport-tube Chip 9/20/2011 Andreas Jilg 2 Wafer 311 Channels: 100m x 100m A t = 380m d

Micro-Channel Cooling Device 9/20/2011 Andreas Jilg 1
Micro-Channel Cooling Device Pyrex Sensor Cover Silicon Wafer Nanoport-connector Nanoport-tube Chip 9/20/2011 Andreas Jilg 2
Wafer 311 Channels: 100µm x 100µm A t = 380µm d = 280µm 9/20/2011 Andreas Jilg 3
Chip t = 100µm 2x5 chips 9/20/2011 Andreas Jilg 4
Sensor t = 200µm 9/20/2011 Andreas Jilg 5

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