Laser-Enabled Directed Nanomanufacturing Costas P. Grigoropoulos Laser Thermal Laboratory Department of Mechanical Engineering University of California, Berkeley This image cannot currently be displayed. U.S.-Korea Nanotechnology Forum October 15, 2013 This image cannot currently be displayed.
Topics • Laser nano/micromanufacturing – Laser Chemical Vapor Deposition – Directed growth of nanomaterials • Laser-assisted electronic materials processing and device fabrication – Flexible electronics • Laser interactions with biological materials – Surface patterning for cell growth – Fibrous material scaffolding This image cannot currently be displayed.
Nanomachined patterns by femtosecond laser coupled to apertureless near field scanning optical microscope (NSOM) This image cannot currently be displayed. This image cannot currently be displayed. 14 nm 11 nm This image cannot currently be displayed. Chimmalgi et al., Appl. Phys. Lett. , (2003) J. Appl. Phys., (2005) Hwang et al., Appl. Phys. A , (2009) This image cannot currently be displayed.
Nano-crystallization by apertureless NSOM This image cannot currently be displayed. Chimmalgi, Nano Lett. (2005) This image cannot currently be displayed.
In-situ TEM Imaging and NSOM Processing This image cannot currently be displayed. This image cannot currently be displayed. This image cannot currently be displayed. NSOM Probe Superposed laser beams CW + pulsed Transformation of an a-Si dot to a single Si nanocrystal on a non-participating substrate a-Si pillar Xiang et al., Nano Lett. (2012) This image cannot currently be displayed.
Alternating Crystal Structure This image cannot currently be displayed. This image cannot currently be displayed. This image cannot currently be displayed. This image cannot currently be displayed. (b) (d) (a) (c) This image cannot currently be displayed. amorphous Poly-crystal Poly-crystal single- crystal This image cannot currently be displayed. This image cannot currently be displayed. single- single Poly-crystal Poly-crystal crystal - crysta This image cannot currently be displayed. This image cannot currently be displayed. This image cannot currently be displayed. This image cannot currently be displayed. (e) l (g) (f) (h) This image cannot currently be displayed.
This image cannot currently be displayed.
Laser In-situ TEM Diagnostics & Processing This image cannot currently be displayed. Libra TEM column This image cannot currently be displayed. Libra TEM sample holder Laser exciter & sample assy. Raman probe assy. Fiber coupled signal delivery This image cannot currently be displayed. Raman spectroscope Libra TEM This image cannot currently be displayed.
Laser-based Selective Nanowire growth metal nanoparticle catalyzed silicon nanowire growth under VLS mechanism VLS (Vapor-Liquid-Solid) Si nanowire growth Laser Illumination Laser-assisted localized Si nanowire growth setup This image cannot currently be displayed. Localized heating of catalysts & NW growth within laser spot SiH 4 gas This image cannot currently be displayed. Au Catalyst 100nm This image cannot currently be displayed.
This image cannot currently be displayed.
Temperature and time dependent growth of GeNWs This image cannot currently be displayed. This image cannot currently be displayed. This image cannot currently be displayed.
On-demand Vertical GeNW Integration on Si(111) On-demand Vertical GeNW Integration on Si(111) Location/shape controlled GeNW on a single Si(111) in vertical integration architecture Plane wave This image cannot currently be displayed. D0 = 65 nm (fixed) D (varied) This image cannot currently be displayed. Ryu et al., ACS Nano (2013) This image cannot currently be displayed.
Defect Free Epitaxial Growth of GeNWs on Si (111) Defect Free Epitaxial Growth of GeNWs on Si (111) This image cannot currently be displayed. Cross sectional HRTEM images of the vertically oriented GeNW on Si (111) This image cannot currently be displayed.
Laser hydrothermal Growth of ZnO nanowires This image cannot currently be displayed. In et al., Small (2013) This image cannot currently be displayed.
Growth visualization and control This image cannot currently be displayed. This image cannot currently be displayed. This image cannot currently be displayed.
Graphene patterning and transferring This image cannot currently be displayed. Yoo et al, Small (2013) This image cannot currently be displayed.
Graphene devices This image cannot currently be displayed. This image cannot currently be displayed. This image cannot currently be displayed. This image cannot currently be displayed.
Vertically Aligned Carbon Nanotube Transfer on Flexible Substrates Laser Pressure VACNTs Glass Glass Separation PC PC Si Si Si Si This image cannot currently be displayed. This image cannot currently be displayed. PC CNT 200 µm This image cannot currently be displaye This image cannot currently be displayed. In et al., ACS Nano (2012)
Beyond graphene Laser annealed MoS 2 transistors on plastic This image cannot currently be displayed. Choi, Kwon et al. IMID (2013) This image cannot currently be displayed.
Nanopaticle processing for flexible electronics This image cannot currently be displayed. Nanomaterial synthesis Nano Tech & characterization - Low melting temperature This image cannot currently be displayed. - Solution processible This image cannot currently be displayed. This image cannot currently be displayed. This image cannot currently be displayed. LIFT This image cannot currently be displayed. This image cannot currently be displayed. 5nm Low Temperature Flexible Electronics This image cannot currently be displayed. Inkjet Printing Nanoimprinting This image cannot currently be displayed. This image cannot currently be displayed. This image cannot currently be displayed. - Direct patterning (lithography free, maskless) - No vacuum deposition, no etching, low T - Single step process - Solution processible, additive process - Resolution enhancement Laser Tech Direct patterning This image cannot currently be displayed.
Digital Direct Metal Patterning (DDMP) Process on a Flexible Substrate This image cannot currently be displayed. This image cannot currently be displayed. Yeo et al., PLOS ONE , (2012)
Laser Sintering Examples 532nm wavelength, 70mW, CW laser, 4” wafer size, 2 m/s scanning speed Room temperature, ambient pressure, Non-vacuum process, maskless process This image cannot currently be displayed. This image cannot currently be displayed. 16,000 OFETs on a PI substrate, 3 layered High resolution metal features structures (PI substrate/ gate electrode / PVP / source & drain ( total processing time: ~ 7 mins) electrodes) (down to several microns) ( total processing time: ~ 10 mins) This image cannot currently be displayed.
Laser Enabled Wafer scale ZnO Nanoimprinting on Flexible Substrates This image cannot currently be displayed. Master mold PDMS stamp ZnO mesh ZnO on polycarbonate This image cannot currently be displayed.
Fiber scaffold fabrication via 2PP (two-photon polymerization) High N.A. objective Low N.A. objective
Fiber scaffold fabrication This image cannot currently be displayed. Jeon et al., Biomed. Microdev. (2011) This image cannot currently be displayed.
This image cannot currently be displayed.
Jeon et al., JACS 133 (2011) Jeon et al., 2011, submitted
2D pitch gradient pattern This image cannot currently be displayed. This image cannot currently be displayed.
2D pitch gradient pattern This image cannot currently be displayed. This image cannot currently be displayed.
3D 2PP nanofabrication examples This image cannot currently be displayed. This image cannot currently be displayed. 25 layer photonic crystal – Multi-scale biomimetic periodicity of 400nm structure This image cannot currently be displayed.
Acknowledgment LTL Sanghoon Ahn Funding Anant Chimmalgi Taeyul Choi DARPA/MTO, DOE, USAF, NSF, NIH, Hirofumi Hidai KAUST, industry Kuniaki Hiromatsu Nico Hotz David J. Hwang Jung Bin In Hojeong Jeon Eunpa Kim Moosung Kim Collaborators Jaden Kwon Oscar D. Dubon, Andrew M. Minor, Seung-Hwan Ko Kevin E. Healy, Junqiao Wu (UCB) Daeho Lee Dimos Poulikakos (ETH) Ming-Tsang Lee Seung-Hwan Ko (KAIST) Julian Marschewski Maria Farsari (IESL/FORTH, Greece) Nipun Misra Sunkook Kim (Kyung Hee U.) Heng Pan Woong Choi (Kookmin U.) Jongbok Park Dieter Bäuerle (JKU, Austria) Patrick Rohner Matt Rogers Ioanna Sakellari Bin Xiang This image cannot currently be displayed. Jae-Hyuck Yoo
Recommend
More recommend
