I~ ~ FURNACE LOAD COMPLEX ELEVATOR TRANSFER (LEAN ... UN- .....,_ UN- Lo Ar LOAD INSPECT LOAD L-OAD CASSETTE CASSETTE .. ·· 1 IN Our I COMPLEXITY REQUIRES WORK STATION TO CONTROL j BRUCE SYSTEMS . 1
AUTOMATION . TARGETS SALES . DRIVEM TECHNOLOGY .. DRIVEN DESIGN . SALES ORDER PROCESS COSTING MATERIAL HANDLIMG INVENTORY CONTROL TEST BILLING QUALITY PLANNING FACILITY
REAL TIME FRONT-END COMPUTER RELATiot{AL DATA BASE ENGINEERING ANALYSIS COLOR GRAPHICS PROCESS/INVENTORY REPORTS
0~ FASTTRAC K ' AUTOMAT I · 1 ·. HOST REAL TIME EQUIPMENT INTERFACE WORK STATION INTERFACE INV E NTORY CONTROL COMMON DATA BASE ENGINEERING ANALYSIS REDUNDANCY
- ~OT MACHINE DEFINITION I PROCESS DEFINITION I • START • LOT MOVEMENT DATA COLLECTION I INFORMATION REPORTS I INVENTORY CONTROL I LINE BALANCING I
PDP~l/4 I i I I . I PROCESSOR RUNNING MULTI-TASKING, MULTI- USER, REAL-TIME OPERATING SYSTEM PERMITTING REAL-TIME AND NEAR REAL-TIME CONTROL OF AND COMMUNICATION TO FAB AREA PROCESSING EQUIP- MENT,
R ' ' A ' C ' K ' F''A ·· s··r·r· ~ ... R '' A c K .. 'E N ''D RELATIONAL . DATA BASE DEDICATED DATA BASE MACHINE SPECIFICALLY DESIGNED AROUND THE RELATIONAL DATA BASE MODEL, PROVIDES POWERFUL DATA MANAGEMENT TOOLS WITHOUT LOADING THE MINI-COMPUTER CPU AND WITHOUT SACRIFICING REAL TIME FEATURES, SPECIFICALLY:-
INVENTORY CMIS) AND PROCESS CCAM) B R II R u c E E L A T E s I I
· ~ ~E REP~T ~ INVENTORY ENGINEERING DAT/\ BASE ANALYSIS --- TRANSACTION PROCESSING RELATIONAL ARCffl VAL HOST AUTOMATION HOST TERMINALS WORK DATA BASE - ,. r ! -- REPORT GENERATION GENERATION • . . BRUCE SYSTEMS . ,. I :1 ·1 j
\ ARCllIVAL HOST AGEHENT STATION I ! MIS I PERS. COMPUTER FAST TRACK RELATIONAL DATA DASE WICS DOC FACILITIES DOC CLE AH PDP 11/44 7354C DOC FACS WORK INSPECTION FURNACE 73545 TATION POP 11/2 MATERIAL IMPLANT TRANSFER
I. ; . ... I ! I I ) I , . I : I '. I ': ·; I : BTU's MODULAR APPROACH TO FAB AUTOMATION •' .. ' ! PERMITS A PHASED IMPLEMENTATION. THIS ' PUTS LESS OF A FINANCIAL . BURDEN ON THE FAB MANAGER AND OFFERS LESS RISK, " .
DATA BASE AUTOMATION llOST WICS WORK FACS 7354C 7354 7354 SECS STATIONS FURNACE CLE#f ION OTHER EQUIPMENT BENCH COMPLEX IMPLANTER EQUIPMENT . ~ BRUCE SYSTEMS TYPICAL AUTOMATION COMPLEX
· one . 7354 . 'FAMILY I/O ANALOG I/O TEMPERATURE GAS POSITION OPERATOR INTERFACE
CONTROL~ TO OCPL+, FACS, WICS, HOST SYSTEM .If' CONTACTS FURNACE I I OPERATORS PANEL TEMP ___ LOGIC CONTROL .._ - - o · 1/0 -, __, I I I ANALOG POSITION CONTROL 1/0 _ 1 - L--- J C ---....==- ---r- .r-- L- - - GAS - - - CONTROL 0 HASS LOAD PRESSURE I SLAt l D 1Ut11DITY FLOH ..... - --- i:
.. ATTRIBUTE (1) --- ATTRIBUTE (2) --- ATTRIBUTE (N) LLL JJJ TUPLE (1) AAA TTT BBB KKK TUPLE (2) yyy zzz 000 TUPLE (3)
WAFER PLOT CONTACT RESISTANCE
DATA . ' BASE" ' SYSTEMS OCPL+ FACS WICS
- MASKING RELATION ~ Attribute Description MASK J- Tuple Mask id MSET Mask set id DEV Device PROC Process LEVL Mask level DESC Description CHNG Last change time and date MACH Machine FLG Delete flag CYCL Number cycle between changes IHB Inhibit flag ECYC Elapsed cycles TIME Maintenance cycle - time based . ..
beri n ni n ~ · nce i ~ ~ ~ RELATION . . LOTMOVE Attribute Description DEV Device name OWN Departmental 11 owner 11 of this ICP SNUM Sequential IC number ICNM User defined IC number DESC User defined IC name FLG Delete flag DBOH Counts today beginning on hand DINS II wafers entering II DOUT II wafers exiting II DEOH II II wafers present To the moment DREJ II II wafers rejected (to ta 1 since midni9ht breakage) DRWK II II wafers reworked DCRP II wafers scrapped II DBON II " wafers bonused in WBOH Counts week to date WINS II " wafers entering WOUT " II wafers exiting WEOA II ti wafers present ;: week o· WREJ II ti wafers rejected (total wafers reworked breakage; WRWK II II WCRP II II wafers scrapped WBON II II wafers bonused in MBOH Counts month to date MINS II wafers entering II MOUT II wafers exiting II MEOA II wafers present II Since beginning MREJ o· i' mont h II wafers rejected (total II breakage: MRWK II wafers reworked II MCRP wafers scrapped II II MBON II wafers bonused in II Bn.ce 9,9erns ..
RELATION ·- -· MACHINE -· Attribute Description MACH Machine designater RUNC An bperation designater PER Temporal period covered by this triple. May be today, any of last six days, previous week, or current month. Quantity of wafers waiting in the queue WAIT for this machine (MACH) with this opera- tion (RUNC). Quantity of wafers that have entered the ENT MACH for operation RUNC. EXT Quantity of wafe~s that have exited this MACH for operation RUNC. SCRP Quantity of wafers scrapped from this MACH for operation RUNC. BON Quantity of wafers bunused into MACH for operation RUNC. Quantity of wafers reworked RWK LENT Number of lots entered MACH for op. R U N C LEXT Number of lots exited MACH for op. RUNC REJ¢-9 Used to be breakage quantitites - now call reject (codes/quantities) IHB Inhibit flag FLG Delete flag '• .
RELATION · ~ ENGDATA Attribute Description NAME Lot name data came from Wafer data came from WFID DI ID Die id from wafer QNUM Question # that generated data SEQ Step # in lot question ca me from The real thing! DATA FLG Delete flag MACH Machine code RUNC Operation code ARCO Archival date - if lot is archived may keep data - thfs .flags for cross-correla- tion stuff that other info was archived. .. ·
RELATION .. - . DEVICES Attribute Description Device name DEV FAM Device family DESC Description PROC Process used MIX % of total product on line MODE Data collection mode for this device PRI Numberic priority for this device FLG Delete flag IHB Inhibit flag . ..
RE LAT I ON ~' lOTSTAT Oescr'lption Attribute lot name NAME Device code DEV Options OPT Work week out (goal) TARG Start time and date STDT Priority type L, H, N etc. PTYP TATS I/W state Lot sequence # (st ep #) SEQ M . ACH Curren. t machine RUNC Current operation STYP Step Type Edit flags · · EDiT Last date and time of update LUPO Process number/name PROC IC seq. number SNUM IC wafer count ICWF Previous IC wafer count ICPQ Numberic priority PRI Number of steps in lot STPS Current mask id MASK MTRL Material used ENG Engineer responsible Initial wafer count INWF MODE Data collection mode for this lot DISP Lot disposition (offsite, etc.) AUTO Auto or manual line balance flag WCNT Current wafer count FLG Delete flag IHB Inhibit flag ICPN ~ Previous IC number (used def.) . BnaS,:sbtl6 '· .
RELATION .:.: · 10THIST Attribute Description Lot name . Step type STYP Run code for this step, this lot RUNC IC number (user defined) ICNM Lot sequence # (step #) SEQ Step description DESC CTIM Conditional time MACH Machine Process PROC Process step number - this step informs PNUM - STEP Edit flags EDIT Time and date step entered ETIM Operator who entered EO PT Time and date step exited XTIM Operator who exited XO PT Good wafer count at exit WCNT Actual machine used (if di fferent than AMC A planned) Replacem ent run code (initially same as RRNC RUNC unless TIP action) Reject wafer quantities REJ0 -+ 9 Data collection mode for thib step this lot MODE Delete flag FLG Mask id thi s step MASK IC Sequential number this step SNUM Enter/ex it flag (@,*) ENE X Inh i bit fl ag IHB ,_ .
RELATION .. ~ SCREENS Description Attribute Machine MACH Opera ti on RUNC Question number QNUM Question or prompt -QUES - should be C80 Units UNIT Data collection mode MODE Comments (entered by operator) COMM Delete flag FLG Inhibit flag IHB .. .
~ RELATION . TINPUTS Attribute Description MAC H Machine RUNC Run code QNUM Question number Limit value array LIMS RMCH Replacement ma chine to use RRNC Replacement run code arr.ay RELS Relation array (p osit ion correlated to LIM S) FLG Delete flag IHB Inhibit flag . ·
RELATION .. ~ · PROCESS Attribute Description PROC Process number/name Step number/name STEP Step type STYP MACH Machine RUNC Run code DESC Description CTIM Conditional time MODE Data collection SNUM IC sequence nu m ber ICNM IC number (used defined) · - .
· RELATION · ~ " REMARKS Attribute Description NAME Lot name SEQ Lot "step 11 MASK I MACH l Machine Source or reference of RUNC -, comment Run code Mask number Tuple COMM Comments LINE Comment number '• .
RELATION - PROCDIR Attribute Description PROC - Tuple Process SIZE Number steps DESC Description PRI Priority numeric OWN Owner . IHB Inhibit FLG Delete EDDT Last edit time and date EDTR Last person who · edited ...
RELATION · · ~ . REPAIRS Description MACH - Tuple Machine I LAST Last repaired/maintained CYCLE Non-Unique Maintenance cycle - cycle based TIME Maintenance cycie - time based ECYC Cycles executed since last FLG Delete flag IHB Inhibit flag COMM Corrrnents re repair
RELATION ·· - ·· oPERATE Attribute Description OPID Operator id / OPNM Operator name OPSS Operator social security number Tuple VALID Authorized/certified MACH Machine RUNC Operation FLG Delete IHB Inhibit
Recommend
More recommend
