Flat Panel Displays TCAD/ Circuit Design
Silvaco Products – Connecting TCAD to Tapeout - 2 - Flat Panel Displays TCAD/Circuit Design
FPD Design & Fabrication Specification EDA ECAD Design house Verification System Design Verification Netlist Extraction SPICE Circuit Design (Gateway) SPICE(SmartSpice) Layout Extraction (HIPEX) Characterization UTMOST Front-End Analysis : Parameter Extraction Timing Layout Design (Expert) Power I-V, C-V Noise Back-End Reliability Manufacturing VWF Mask Characterization Process Simulation Recipe FPD EXACT Fab CLEVER LPE I-V STELLAR Calibration DRC C-V TCAD Process Simulation TFT Process/Device ATHENA Verification Device Simulation ATLAS I-V, C-V - 3 - Flat Panel Displays TCAD/Circuit Design
Contents Silvaco Solution for FPD applications ATHENA – Process Simulation ATHENA modules ATLAS – 2D/3D TFT Device Simulation Pisces/TFT a-Si/poly-Si TFT device models & simulation examples MixedMode – TFT device + Spice circuit OTFT/OLED – Organic Devices Simulation Clever - 3D Field Solver for Parasitic RC Extraction AMLCD Pixel RC Extraction: Spice netlist extraction LC Modeling: Verilog-A UTMOST – Spice Parameters Extraction & Modeling SmartSpice - Analog Circuit Simulator - 4 - Flat Panel Displays TCAD/Circuit Design
Silvaco Solution for FPD Applications LCD TFT a-Si TFT-LCD: low price, improved performance Low temperature Poly-Si TFT-LCD : System On Panel CG Silicon TFT-LCD : LSI + LCD Large Scale, micro scale → TFT New Age Large circuit, multi-layer interconnection < Silvaco Solution > TFT/Organic Device : ATHENA/ATLAS Organic EL Display Interconnect Parasitic RC : CLEVER Circuit : SmartSpice64 Stability & Reliability, Organic EL material - 5 - Flat Panel Displays TCAD/Circuit Design
Silvaco Solution for FPD Applications - 6 - Flat Panel Displays TCAD/Circuit Design
ATHENA – Process Simulation SSuprem4 Models Ion Doping(Implantation) SVDP(Sims Verified Dual Pearson) Diffusion Dopant&Defects Fully coupled Diffusion Model Polysilicon Diffusion Model in Grain/Grain Boundary PLS – New Advanced Diffusion Model in Silicon Etching/Deposition – Conformal Geometry Silicide MC Implant – Monte Carlo Ion Implant Elite Advanced Etching/Deposition – Complicated Topography Polymer Redeposition – Plasma Etch Optolith – Optical Lithography Simulator - 7 - Flat Panel Displays TCAD/Circuit Design
TFT-LCD Simulation Pixel Structure and TFT Device for Simulation - 8 - Flat Panel Displays TCAD/Circuit Design
TFT Process Simulation Using SSuprem4 - 9 - Flat Panel Displays TCAD/Circuit Design
TFT Process Simulation Using SSUPREM4: TFT Structure Generation - 10 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Devices Simulation Pisces/TFT a-Si/poly-Si TFT device models & simulation examples MixedMode – TFT device + Spice circuit OTFT/OLED – Organic Devices Simulation - 11 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Devices Simulation Pisces/TFT Drift-Diffusion model – Poisson + Current Continuity Eqs. Generation/ Recombination Trapped Charge Mobility - 12 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Devices Simulation TFT – Definition of traps(defects) distribution within bandgap Discrete & continuous defects - 13 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Devices Simulation Low temperature poly: DOS Density of states distribution by FE(Field Effect) method Donor like Acceptor like tail states tail states Ec Ev Ef Acceptor like Donor like Gaussian states Gaussian states user-defined form - 14 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Device Simulation User-defined DOS C-Function - 15 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Device Simulation TFT – Grain boundary defects effects - 16 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Device Simulation TFT’s leakage current simulation trap-assisted tunneling with coulombic well band-to-band tunneling - 17 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Device Simulation Mobility Models Low field mobility High field mobility – velocity saturation - 18 - Flat Panel Displays TCAD/Circuit Design
a-Si TFT Simulation: ATHENA intdefect defects intdefect - 19 - Flat Panel Displays TCAD/Circuit Design
a-Si TFT Simulation: Transfer Curve - 20 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Device Simulation a-Si TFT Device Simulation Example Back-light leakage current (Photo-generated current by Luminous ray-tracing) - 21 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Device Simulation poly-Si TFT Device Simulation Example - 22 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Device Simulation Lattice Temperature Distribution & IDVD RH(W/K) - 23 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Device Simulation: TFT-LCD Pixel Simulation Two approach to circuit simulation - 24 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Device Simulation: TFT-LCD Pixel Simulation Typical Pixel Charging and Holding tf = 1/# sec v g v d v com Driving a pixel and effect of the parasitic capacitance - 25 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Device Simulation: TFT-LCD Pixel Simulation TN - 26 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Device Simulation: TFT-LCD Pixel Simulation User-defined c-function of C lc - 27 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Device Simulation: TFT-LCD Pixel Simulation – C-Interpreter Function for LC cap # include <math.h> if(v > vc) #include <stdio.h> eps = epl + theta*gamma*exp(Dtime)*sqrt(v/vc - 1.0); double my_lc_rc(double v, double temp, double ktq, double time, else if( v <= vc) double *curr, double *didv, double *cap, double *charge) eps =epl; { double eps,e0; clc= e0*eps*L*W*1e-6/D; /* F */ double epl,clc; double theta,gamma; *curr=v/10e6; double Dtime; *didv=1/10e6; double vc; *cap=clc; double L,W,D; *charge=*cap*v; L=152; /* W=148; printf("clc = %e(F)\n", clc); Dtime=100e-3; printf("charge = %e\n", *charge); theta=51.0; /* sec */ */ gamma=51.2e-3; /* sec */ epl=3.1; return(0); vc=1.887; } D=10.02; e0 = 8.854e-12; - 28 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Device Simulation: TFT-LCD Pixel Simulation - 29 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Device Simulation: TFT-LCD Pixel Simulation - 30 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Device Simulation: TFT-LCD Pixel Simulation - 31 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Device Simulation: TFT-LCD Pixel Simulation LC cap - 32 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Device Simulation: Backlight Effects Using MixedMode MixedMode – TFT device + Spice circuit Backlight Effect light ,Q ,Q ,U ,U ,W ,W ,R ,R ,P ,P ,V ,V ,S ,S ,T ,T - 33 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Device Simulation: ESD Simulation Using MixedMode & Giga ESD Simulation: MixedMode + Giga(lattice temperature) Ex) Diode ESD : CDM model Pad Emitter Temp (K) Into LSI P-sub Base protective device DUT MM/HBM - 34 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Devices Simulation: OTFT/OLED – Organic Devices Simulation Transport Mechanisms Metal & Semiconductors: charge transport are limited by scattering of the carriers, mainly due to thermally induced lattice deformations and phonons. Transport is limited by phonon scattering. Charge mobility decreases with temperature Organic materials: transport occurs by phonon assisted hopping of charges between localized states. Charge mobility increases with temperature General mobility model of organic material including Poole-Frenkel field-dependent mobility - 35 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Devices Simulation: OTFT/OLED – Organic Devices Simulation EL mechanism & Organic Models Charge Injection(metal contact) Ohmic(Dirichlet boundary condition) Schottky contact(injection limited current) : thermionic emission model - tunneling interface barrier lowering Transport model(bulk) space-charge-limited current: Poisson + Current continuity equations trap-charge-limited current: DDM + Defects states Hopping process : Poole-Frenkel mobility Recombination & Emission(internal efficiency) Langevin radiative recombinatoin Exiton radiative decay – singlets/triplets(1 FL:3 PL default) Optical Output Coupling calculation - 36 - Flat Panel Displays TCAD/Circuit Design
ATLAS – 2D/3D TFT Devices Simulation: OTFT/ OLED – Organic Devices Simulation - 37 - Flat Panel Displays TCAD/Circuit Design
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