3G Circular Magnetrons Presenting Gencoas 3 rd generation range of - PowerPoint PPT Presentation

Gencoa 3G Circular Magnetrons Presenting Gencoa’s 3 rd generation range of circular magnetrons November 2017 www.gencoa.com 1

Contents • Product Overview • Introduction • 3G Design Features • 3G Mechanical Options • High Yield Magnetics from 4” target Copper target, DC • High Strength Magnetics 300W, 8.5 E-3 Torr • Low pressure operation • Deposition Rate • Performance curves • Conclusion Copper target, RF 300W, 8.5 E-3 Torr November 2017 www.gencoa.com 2

Product Overview Product Overview 3G November 2017 www.gencoa.com 3

Gencoa 3G Circular Magnetrons – 3 rd generation of circular magnetron design Gencoa’s small sized circular magnetrons for R&D have evolved in 3 stages to the current third generation with more performance in a smaller space 2017 1996 2010 November 2017 www.gencoa.com 4

3G cathode features • Launched in 2017 • Works in wide range of pressure – into 10 -6 Torr range • Compact Size • Unique non-bellow tilted magnetron head • High Yield magnetics for the 4” target size • Magnetic material sputtering • Gas Injection as standard • PEEK insulation to reduce outgassing Copper target, RF • Accommodates different target thickness 300W, 8.5 E-3 Torr • DC, DC pulse, RF and HIPIMS ready November 2017 www.gencoa.com 5

3G cathode variations Available in 5 different assembly options SW (3G)- Full option with 45 ⁰ tilt, RF • /HIPIMS ready and gas injection SW50(3GC) SW50(3GB) • SW (3GA)- The cathodes can be supplied with a simple straight & no gas injection. • SW (3GB)- The basic design with only gas injection as option • SW (3GC)- This model comes with tilt and gas injection but no power connection box. • SW (3GE)- Externally mounted magnetron with gas injection and RF/HIPIMS ready SW100(3G) SW100(3GE) November 2017 www.gencoa.com 6

3G small head size and tilt means smaller chambers • Small head size – approx. 1” larger than target size • Tilt height most compact in industry - tilt pivot point is 1” from cathode rear allowing higher tilt angles • 3G means smaller chambers can be used whilst having the same tilt and head positions A B 24.4 C Target A B C 2” 92.3 83.8 76.2 3” 97.7 85.7 101.6 4” 114 101.5 128.1 November 2017 www.gencoa.com 7

3G has innovative head angle adjustment • ±45° tilt without bellows • Angle can be viewed and adjusted from the front of the cathode • The 2 position clamp pressure is released by means of a supplied tool or by hand, the head is rotated to the desired angle, then the clamp is re-fixed to the first Knurled Single Ring ‘notch’ tight position allows easy tilting • To measure the angle, there is a milled slot on the clamp that is aligned with the protractor angle allowing the tilt angle to be fixed accurately to 5 ° . • The protractor is removable. Protractor Tilt tightening Tool November 2017 www.gencoa.com 8

Self Adjusting Target Clamps • Target clamp adjust to the target thickness. anti- sticking materials used for the threaded fixing Can use a thermal conduction gasket between target • and cooled diaphragm • High water flow (2l/min) and diaphragm cooling for high power capacity • Directly cooled targets available – factory configured Threaded PEEK Insulator Target Clamp (reduces Outgassing) Eroded Target Thermal Conduction Sheet (Graphite) Target Removal Tool Diaphragm 4” HY target with graphite gasket and diaphragm November 2017 www.gencoa.com 9

3G Extra Options Various mechanical options available • Design allows to fit manual and pneumatic shutter • Anode cooling to provide extra source cooling for HOT chamber environments • Gas injection • Sputter Chimney • Quick coupling feedthrough New shutter design with longer flexible shaft • ISO or CF flange mounting option Shutter Adjustment Manual/Pneumatic (Shown) Anode Cooling Wall Mount (Optional) (Optional) Feedthrough Shutter Gas (Optional) (Optional) Injection Power Connector (N type /7- 16”/HN) November 2017 www.gencoa.com 10

3G Mechanical Option Matrix Model Gas Tilt RF/ Shutter Chimney Wall Mount Water Cooled Hidden Injection HIPIMS Feedthrough Anode Anode 3G • • • • • • • • 3G(A) • • • • • • • • 3G(B) • • • • • • • • 3G(C) • • • • • • • • 3G(E) • • • • • • • • • Standard Feature • Optional • Not Applicable November 2017 www.gencoa.com 11

Mechanical Options Examples 4” 3G with Shutter) 3G100 External Anode Cooling 3G No shaft (customer weld ) 3G 45 ⁰ Tilted Sputter Chimney November 2017 www.gencoa.com 12

3G100 High Yield type magnetics for high target use • The 3G100 is available with a high yield HY type array • >40% target utilization • Gencoa solution for precious material sputtering 3G100-HY 10mm thick target erosion Target profile ,mm Target profile ,mm 9 6 3 -60 -40 -20 0 20 40 60 Radial Position, mm November 2017 www.gencoa.com 13

Magnetic Material Sputtering (High Strength Array) (H ) • The cathodes allow magnetic material sputtering as standard with diaphragm cooled target. • Thicker target can be sputtered using directly cooled target. (Pre- configured at factory) • Anode height adjustable to accommodate different target thickness. Anode Magnetic Fe Ni height line Strength on Size Thickness Thickness the target (mm) (mm) surface (G) 50mm 780 1 3 (2”) 75mm 840 1.5 4 (3”) 100mm 620 0.5 2 (4”) November 2017 www.gencoa.com 14

3G cathode testing • Extensive testing performed on 3G prototypes for product reliability and plasma stability • Achieved 2l/min water flow through the cathode at 1.5 bar pressure difference • Works in wide range of pressure • Coating uniformity & deposition rate measured for Copper target, DC different target diameters 300W, 8.5 E-3 Torr • Performance curves obtained at various pressure levels for various power modes Copper target, RF 300W, 8.5 E-3 Torr November 2017 www.gencoa.com 15

10 -6 to 10 -2 Operating Pressure Range – example of 3G50 (2”) 3G50-Cu Target 3G50-Cu target 240 450 DC 300W RF 300W 200 DC 180W Target voltage, V 400 Target voltage, V RF 180W 160 350 120 80 300 1.00E-05 1.00E-04 1.00E-03 1.00E-02 1.00E-05 1.00E-04 1.00E-03 1.00E-02 Pressure, Torr Pressure, Torr November 2017 www.gencoa.com 16

10 -6 to 10 -2 Operating Pressure Range – example of 3G75 (3”) 3G75 -Al target 3G75-Cu target 500 500 DC 600W DC 600W 450 450 Target voltage, V DC 300W Target voltage, V DC 300W 400 400 350 350 300 300 1.00E-05 1.00E-04 1.00E-03 1.00E-02 1.00E-05 1.00E-04 1.00E-03 1.00E-02 Pressure, Torr Pressure, Torr November 2017 www.gencoa.com 17

10 -6 to 10 -2 Operating Pressure Range – example of 3G100 (4”) 3G100 - Cu target 3G100 HS - Cu target 500 500 DC 600W DC 600W 450 450 Target voltage, V DC 300W DC 300W Target voltage, V 400 400 350 350 300 300 1.00E-05 1.00E-04 1.00E-03 1.00E-02 1.00E-05 1.00E-04 1.00E-03 1.00E-02 Pressure, Torr Pressure, Torr November 2017 www.gencoa.com 18

3G100HY operating parameter example 700 5 SW100HY-Cu Target 5.0E-4 Torr, DC power 650 Al target DC 600W 600 4 600 550 DC 300W 500 3 Target voltage, V Voltage, V 500 Current, A 450 400 2 400 Voltage 300 1 350 Current 300 1.00E-05 1.00E-04 1.00E-03 1.00E-02 200 0 Pressure, Torr 0 400 800 1200 1600 Power, W November 2017 www.gencoa.com 19

Coating Uniformity 3G50 DC Power 150mm T/S, Copper target 0.5 0.4 Range (mm) Uniformity OD 50 2.0% 30 0.9% 0.3 20 0.4% 0.2 -50 -40 -30 -20 -10 0 10 20 30 40 50 Position, mm November 2017 www.gencoa.com 20

Coating Uniformity 3G50 Normalised Uniformity over 100mm 1.2 1 0.8 OD 50mm T/S 0.6 150mm T/S 100mm T/S 0.4 0.2 0 -50 -40 -30 -20 -10 0 10 20 30 40 50 Position (mm) November 2017 www.gencoa.com 21

Coating uniformity 3G75 DC & RF comparison DC Range, mm 3" Al target @100mm T-S Uniformity 50 ±4.4% 1.2 60 ±6.5% 1 70 ±8.4% 0.8 Al target, DC 300W, 2.5 E-3 Torr 0.6 RF 0.4 DC RF Range, mm 0.2 Uniformity 50 ±3.5% 0 -30 -20 -10 0 10 20 30 60 ±5.7% 70 ±7.9% Al target, RF 300W, 2.5 E-3 Torr November 2017 www.gencoa.com 22

Coating Uniformity 3G100 DC & RF Comparison 4" Cu Target @150mm T-S DC Range, mm 1.2 Uniformity 50 ±5.1% 1 60 ±7.2% 70 ±9.1% 0.8 Cu target, DC 300W, 1.4 e-2Torr DC 0.6 RF RF Range, mm 0.4 Uniformity 50 ±5.2% 0.2 60 ±6.9% 70 ±9.1% 0 -40 -30 -20 -10 0 10 20 30 40 Cu target, RF 300W, 1.4 e-2Torr November 2017 www.gencoa.com 23

Power Vs Voltage Vs Current (3G50 Cu target, DC power) 450 1 1 450 2.5E-3 Torr 5E-4 Torr 0.8 0.8 400 400 0.6 0.6 Current, A Voltage, V Current, A Voltage, V 350 350 0.4 0.4 300 300 Voltage 0.2 0.2 Voltage Current Current 250 0 0 250 0 60 120 180 240 300 0 60 120 180 240 300 Power, W Power, W 1 450 1.4E-2 Torr 0.8 400 0.6 Voltage, V Current, A 350 0.4 300 Voltage 0.2 Current 0 250 0 60 120 180 240 300 November 2017 www.gencoa.com 24 Power, W