Trident SRD Advanced Spin Rinse Dryers For 75-200mm 1 C l a s s O - PowerPoint PPT Presentation

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s Trident SRD Advanced Spin Rinse Dryers For 75-200mm 1

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s Trident SRD: a range of configurations Single Stack Single Stack Dual Stack Starting at $45k Table Top Roll Around Starting at $26k Starting at $28k 2

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s For a range of wafer sizes: 50mm to 200mm Models for 150mm or smaller substrates: Model 8600: Dual Stack Model 4600: Single Stack, Roll-Around Model 2600: Single Stack, Table-Top Models for 200mm substrates: Model 8800: Dual Stack Model 8800HP: Dual Stack, High-Profile Cassettes Model 4800: Single Stack, Roll-Around Model 2800: Single Stack, Table-Top 3

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s Trident SRDs provide an array of innovative features Full wrap-around bowl heater Non-contact ultra-pure N 2 heater Negative-pressure motor seal Door-top DC ionizer Stainless steel cabinetry Full-control facility panel 4

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s Delivering higher performance and major benefits More uniform rinse Reduced particles Cleaner N 2 Optimum drying performance FM4910 compliant CE certified 5

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s An elegant SRD design Designed clean and simple Designed for reliable operation Designed for easy maintenance 6

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s Maintaining cleaner N 2 Filter positioned after the heater No N 2 contact with the heater N 2 stays cleaner 7

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s Intuitive, graphical and flexible Intuitive Graphical User Interface Touch-screen operation Non-proprietary controller: readily available components Easy operations and diagnostics screens 8

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s On-board facility panel On-board DI and N2 regulation Precise control throughout EPO is a standard feature And much more… 9

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s All of these are standard Trident SRD features Quick-disconnect rotors Over-temperature protection LCD color touch-screen GUI Heater alarm Easy-access maintenance panels Foot-activated door-open switch Programmable Logic Controller Mechanical door lock Data logger Ultra-pure valves, pillar fittings DI water recirculation Drain-trap connection N 2 saver Direct-drive brushless motor Resistivity monitor controller & probe All stainless steel cabinetry Static neutralizing bar CE certified EPO, front and rear 1-year warranty, parts and labor 10

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s Plus, additional options are available GEM/SECS communication Stainless steel or FM4910 plastic Light tower with 3 indicator lamps (R/Y/G) Deluge Manifold for DI Rinse Rear display Bulk mount Extended 2-year warranty 11

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s World-class service and support Factory-trained field service engineers world wide providing local support 24-hour onsite support Spare Parts Stock: same day shipment 12

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s World-wide service and support Ulm, Germany P FSE Kalispell, MT P Spare Parts Depot P China P Atlanta, GA Scientech Seattle, WA P Taiwan Scientech India GMS Singapore Malaysia P Advanti Q1 2017 ClassOne Facility Applications Lab Partner Facility P Parts Depot ClassOne Confidential

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s Trident: A unique new class of SRD that delivers… The performance you need At a price you can afford! 14