1 Study of Magnetic Nanoparticles Kok Chin Yi Temasek Junior College SPMS05
2 Outline 01 Properties of Magnetic Nanoparticles 02 Applications 03 Preparation methods 04 Research Methodology 05 Results & Discussions Conclusion
3 Properties of Magnetic Nanoparticles
4 Cla lassification of Magnetic Nanoparticles Ferromagnetic Super-Paramagnetic Spinning electric-charged 1 domain due to its small particle that creates a size. magnetic dipole Easily influenced by external magnetic fields
5 Applications
6 Preparation methods Thin Film Nanofabrication Deposition
7 Thin Film Deposition Magnetron Sputtering: The Ar + ions bombard the Fe, transferring the momentum to the Fe, causing the Fe to deposit onto the target (Substrate) Pressure: 1.2 x 10 -7 Torr ≈ 1.6 x 10 -5 Pa
8 Nanofabrication Electron Beam Nanoimprint Optical Lithography Lithography Lithography
9 Nanofabrication Electron Beam Nanoimprint Optical Lithography Lithography Lithography Electron beam to draw custom patterns on a surface Resolution: <10nm
10 Nanofabrication Electron Beam Nanoimprint Lithography Lithography Electron beam to draw Creating daughter custom patterns on a mold (soft silicon mold) using Master surface mold. Resolution: <10nm 1.Cleanliness of the sample Mechanical approach: 2.Reusing the daughter mold High resolution
11 Nanofabrication Electron Beam Optical Lithography Lithography Light sensitive photoresist is exposed Electron beam to draw by light custom patterns on a surface Resolution: Lowest Resolution: <10nm (2.5microns)
12 Research Methodology
13 Research Methodology
14 Results and Discussions
15 Results and Discussions Resolution Diameter: 2.5 Microns Technically, there are Magnetic Microparticles.
16 Results and Discussions Problems After optical lithography After sputtering and removal of resist Possible reason: Excess Fe on the substrate knock the particles off during the ultra-sonification process.
17 Results and Discussions Magneticity VSM results of the MMPs (In-plane; magnetic field VSM results of the MMPs (In-plane; magnetic field parallel to sample surface) perpendicular to sample surface)
18 Conclusion More affordable and reliable method in creating the magnetic particles Suggestions: 1. Add Kapton tape onto the substrate during sputtering
19 Thank You for your kind attention
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