nada technologies, inc. automation solutions and support semicon taiwan presentation automation products - 2007
NADAtech - automation solutions and support wafer automation company formed in 2002 comprised of former PST and Asyst employees 45+ combined years in wafer sorter expertise drawing from global customer experiences AMI, Atmel, CSP, Cypress, EM, Fujitsu, Globitech, Goldstar, Hitachi, HP, IBM, Infineon, Intersil, ITT, KTI, LSI, MXIC, Micron, Motorola, NEC, NFI, Promos, Read-Rite, Samsung, Seiko Epson, Silterra, SMP, Sony, STMicro, TECH, TI, Toyota, TSMC, UMC, Utek, Vanguard, WaferTech, Winbond and more …. focusing on engineering and customer service for new and existing sorter business and wafer automation now key player in 1xx / 200mm wafer sorter business offices in taiwan, malaysia, china
NADAtech - automation solutions and support executing business on multiples levels of wafer automation robotics service / support robotics parts and spares inhouse or on-site robotics refurbishing and repair sorter service / support sorter parts + automation components spares sorter and automation engineering software expertise upgrade solutions for aging PST/Asyst products refurbished sorting equipment solutions new sorting equipment solutions OEM automation solutions (300mm EFEM and 1xx/200mm handlers)
NADAtech - oem component based solutions PST sorter philosophy won long term sorter battle kensington – vertically integrated – gone – all tools in process of being scraped. unsupportable. ioc - vertically integrated – fading fast – all tools in process of being scraped. unsupportable. as parts die .. tool dies. PST. supportable !!! still in use in fabs that are still open. Micron and Motorola have tools STILL in use since 1993. NADAtech has re-adopted this component philosophy. ISEL, Equipe/PRI/Brooks robotics, Asyst ports, Cognex OCR all world regions have support for these components due to their popularity. why we continue this standard --- SIMPLE RELIABLE FAST.
segment development timeline 2002 parts, service, repairs 2003 parts, service, repairs + sorter upgrades 2004 parts, service, repairs, upgrades + new/refurb 200mm 2005 parts, service, repairs, upgrades, new/refurb 200mm + 300mm 2006 more oem relations 200mm and 300mm 2007 reticle segment started, backside wafer inspection refurbished equipment purchasing used PST tools on surplus market refurbishing / upgrading new equipment sorters - 200mm open ,200mm SMIF , 200mm and 300mm netOCR network based OCR for wide area OCR solution 200mm OEM handlers and 300mm EFEMs
1xx / 200mm sorters
oem platforms
latest platform
nadatech studios
additional product offerings “Sorter+” automation platform ( see separate presentation ) inspection/metrology modules added to E30 compliant sorter for integrated automation solutions netOCR ( see separate presentation ) network based OCR solution for low cost wide area applications - example: probe floor inkless projects Asyst/PST upgrades wide range of offerings to extend legacy tools well beyond SUREscan Thrubeam based open cassette wafer mapping PST upgrade and oem ChipChecker Sorter bolt on for wafer bevel chip detection Detect chips down to .05mm in width Adds 10 seconds per wafer. Integrated directly into all sorting functions
upgrades SUREscan OEM upgrade SUREscan for Asyst/PST RBuilder upgrade for Asyst/PST OCR upgrades for Asyst/PST ChipChecker for Asyst/PST Asyst SMS Robotics Upgrade
software capabilities developing sorter software since 1990 evolution from PST pals thru Asyst sms and spartan developments experiences have culminated in NADAtech’s ns + RBuilder platform
RBuilder software ns is NADAtech’s control software RBuilder is recipe creation tool utilizing simple intuitive scripting scripts entered via GUI scripts are text based so recipes are portable and downloadable multi-carrier selection setups integrated carrier maps and ocr SUREscan carrier qc reports slot min/max and std devs alarms host for outta spec carrier
powerful scripting language sample script for complex customer recipe vendor scribe to inhouse correlation table download full read and simultaneous randomize (wafer sleuth) swap of corr ID “05” and “18” to specific slots all created thru RBuilder GUI interface -- top of file -- scribe=Vendor correlate=corrfile.dat readrand a,* swapid ‘05’ to 5 swapid ‘18’ to 18 -- end of file --
recipes emulated with RBuilder at one customers site STANDARD THINFILM 1. D8A 1. 1-12 & 13-24 SPLIT REMOTE 2. AUTOSORT A 1. CORRVIEW 3. GET 2 & 4 (DESTINATION B) 2. CORRSORT 4. MOVE NO-READ 3. 0060 CORRELATE 5. MOVEREAD 4. RANDOMIZE_TOP 6. ODD_EVEN 5. 9500SLEUTH 7. READ SLOT NUMBER 6. AUTOSORT 8. READ X 7. CORRREAD234 8. DIFFUSION 9. READ VENDOR 9. READRANDOM 10. READ WR#2,3,&4 10. MOVEXSLOT 11. RECOMBINE LOT 11. SORTPLUS1 12. YESort 12. YECORRSORT CMP 13. RPNO3 14. VENDORA 1. LOOK AHEAD 15. ALIGN90 2. LOT POLISH 16. SLEUTH2 3. LOT RECOMBINE 17. DIFFUSIONSW 4. POPS 18. FIND5-6 19. SLEUTH90 5. INSPECT 20. EMPTY1 ETCH 21. SLEUTHNO1 1. MOVE - NO READ 22. SLEUTHNO25 23. ETCH5-18 2. PICK ONE WAFER AT RANDOM FROM A 24. CORRFIND5-18 3. READ SLOT NUMBER 25. DESCMASHSORT 4. SORTPLUS1 26. RPNO 5. SORT_REVERSE 27. CMP-SLOT 6. SORT_W_DUMMY 7. SORT_WITH_OPEN_SLOT1 8. TRENCH_SORT 9. RANDOM PILOT B to C 10. RANDOM READ A to C 11. PICK RANDOM
limited internationalization is available
customer list recaptured PST/Asyst customers Freescale MOS11, MOS12, MOS13, EKB Texas Instruments – world wide 200mm supplier AMIS, Micron, WaferTech, Atmel, Samsung , ST, MAXIM, SEMATECH Taiwan - TSMC , UMC, MXIC, ProMOS, VIS, Winbond Japan - FASL, Micron, Fujitisu, Sony thru Asyst Japan SEA - Silterra , Chartered, TECH new customers Sumco, MEMC, onsemi, cypress, inteliepi (4” GaAs ) Fairchild recaptured OEMs Hologenix ( 150/200/300mm slip finder, magic mirror ) new OEMs Tegal ( efem ) Xitronix ( efem ) Graphtek ( macro defect/residue detection)
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