M7: 7: Ext xtreme reme ult ltraviolet raviolet (E (EUV) ) li - PowerPoint PPT Presentation

Mitglied der Helmholtz-Gemeinschaft M7: 7: Ext xtreme reme ult ltraviolet raviolet (E (EUV) ) li ligh ght t source urce Denis Rudolf, Jan Bußmann, Larissa Juschkin RWTH Aachen University, Experimental Physics of EUV, Steinbachstraße 15, 52074 Aachen, Germany Forschungszentrum Jülich GmbH, Peter Grünberg Institut (PGI-9), JARA-FIT, 52425 Jülich, Germany RWTH, April 15th 2015

Ou Outlin line  Extreme ultraviolet (EUV) radiation: applications, light sources  EUV group @ Research Center Jülich (Prof. Larissa Juschkin)  Lab course for master students 22. April 2015 Folie 2

EU EUV and soft X-ray ray radiatio ation T. Popmintchev et al., Science 336 336, 1287 (2012) Absorption edges of almost every chemical element! 22. April 2015 Folie 3

EUV and soft X-ray EU ray radiatio ation Image of the sun at 17.1 nm (Fe +8 ions) (Solar Dynamics Observatory) 22. April 2015 Folie 4 http://sdo.gsfc.nasa.gov/data/

Applica ications ions of of EU EUV and soft X-ray ray radiati iation on Microscopy Spectroscopy 2.88 nm wavelength Diatom (algae) Latex M. Banyay et al., spheres J. Vac. Sci. Technol. A 30 30, 041506 (2012) 22. April 2015 Folie 5 M. Benk et al., Optics Letters 33 33, 2359 (2008)

Applica ications ions of EU EUV and soft X-ray ray radiati iation on EUV lithography of integrated circuits at 13.5 nm wavelength C. Wagner, and N. Harned, Nature Photonics 4, 24 (2010) 22. April 2015 Folie 6

EU EUV and soft X-ray ray ligh ght sources rces Laboratory-based Large scale - Synchrotron - X-Ray/EUV Laser - Free-Electron - X-Ray Tube unpolarized, Laser yet intense - Laser-/Discharge- Produced Plasma polarized Laser High Harmonics 22. April 2015 Folie 7

Gas-discharge discharge EU EUV ligh ght source ce - EUV emission from multiply ionized atoms, e.g. Xe X Mitglied der Helmholtz-Gemeinschaft - Narrow-bandwidth spectral lines ( Δ E/E=10 -3 -10 -4 , E: photon energy) - High power, e.g. 10 15 – 10 16 photons/(s sr) for O VI line at 71.8 eV - Repetition rate scalable to several kHz depending on gas

Gas-discharge discharge EU EUV ligh ght source ce Oxygen/nitrogen Mitglied der Helmholtz-Gemeinschaft

EU EUV gr group at the he Research earch Ce Center ter Jü Jülich ich Coherent diffractive imaging Recorded pattern Reconstruction Reconstruction in Fourier space in real space 22. April 2015 Folie 10

EU EUV gr group at the he Research earch Ce Center ter Jü Jülich ich Photoemission spectro-microscopy Ge-Sb-Te sample 22. April 2015 Folie 11

Lab b co course urse Spectral measurements using an EUV spectrometer 22. April 2015 Folie 12

Lab b co course urse Spectral measurements behind a Bragg mirror Experimental setup Multilayer Bragg mirror 𝑜 ∙ 𝜇 = 2𝑒 ∙ sin(90° − 𝜄) 22. April 2015 Folie 13

Lab b co course urse Measurement of the energy-per-pulse and solid angle O. Rosier, PhD thesis (2004) 22. April 2015 Folie 14

Lab b co course urse  This experiment takes place at the Research Center Jülich!  Meeting point at 9 am on Wednesdays: room 217, building 2.12  You need a personal ID Card to enter Research Center Jülich  Contact: Denis Rudolf (d.rudolf@fz-juelich.de) Jan Bußmann (j.bussmann@fz-juelich.de) 22. April 2015 Folie 15

Thank you for your attention! Questions? Mitglied der Helmholtz-Gemeinschaft