DRESDEN CENTER FOR NANOAN ANAL ALYSIS Ehr hrenf nfried Zs d - PowerPoint PPT Presentation

DRESDEN CENTER FOR NANOAN ANAL ALYSIS Ehr hrenf nfried Zs d Zsche hech Scientific Coordinator Dresden, February 2014 www.tu-dresden.de/dcn

DCN - WORKING GROUP AT TU DRESDEN ▸ Sci cientif ific c Coordi dina nator or Ehrenfried Zschech, Fraunhofer/DFCNA & TU Dresden/DCN ▸ Administ strat atio ion Man anag ager Linda Kriusk, TU Dresden/DCN Team mem Te ember bers (representatives of the active contributing faculties at TU Dresden) ▸ Johann Bartha TU Dresden/Faculty of Electrical and Computer Engineering ▸ Christoph Leyens TU Dresden/Faculty of Mechanical Science and Engineering ▸ Lukas Eng TU Dresden/Faculty of Science, Department of Physics ▸ Michael Mertig TU Dresden/Faculty of Science, Department of Chemistry ▸ Viktor Mechtcherine TU Dresden/Faculty of Civil Engineering, Institute of Construction Materials 2 Dresden Center for Nanoanalysis

DCN WORKING GROUP AT TU DRESDEN Permanent nent gues guests ▸ Gerhard Rödel TU Dresden/Vice-Rector for Research ▸ Hannes Lehmann TU Dresden/Research Promotion and Transfer ▸ Gerhard Fettweis TU Dresden/Coordinator & Scientific Director cfaed ▸ Wolfgang Nagel TU Dresden/Center for Information Services and High Performance Computing (ZIH) 3 Dresden Center for Nanoanalysis

DCN – ADVISORY BOARD Represent entatives es of of non non-univ iversi sity y institut utes es (DR DRESDE DEN N concept ept) ▸ Juri Grin Max Planck Institute for Chemical Physics of Solids (CPFS), Dresden ▸ Bernd Rellinghaus Leibniz Institute for Solid State and Materials Research Dresden (IFW) ▸ Manfred Stamm Institute of Physical Chemistry & Physics of Polymers (IPF), Dresden ▸ Rene Hübner Helmholtz-Zentrum Dresden-Rossendorf (HZDR), Dresden ▸ Andreas Leson Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS Dresden 4 Dresden Center for Nanoanalysis

DCN PARTNER ▸ Bar arbar ara a Adolphi, J Johan ann B Bar artha a (TU Dresden/Faculty of Electrical and Computer Engineering) ▸ Lukas Eng, Alexander nder H Haußmann, P nn, Peter er M Milde de (TU Dresden/Faculty of Science, Department of Physics) ▸ Marti rtin Gal all, , Uwe e Mühl ühle, E , Ehr hren enfried Zs Zschec hech (Fraunhofer IKTS) ▸ Chr hristoph Leyens ens, H Hans ns P Pet eter er Wies esmann (TU Dresden/Faculty of Mechanical Science and Engineering) ▸ Vikto tor M r Mechtc tcheri rine, C Chri risto tof f Sc Schrö röfl fl (TU Dresden/Faculty of Civil Engineering, Institute of Construction Materials) ▸ Micha hael M Mer ertig, Thom homas D Doer oert (TU Dresden/Faculty of Science, Department of Chemistry) ▸ Ellen H n Hieckmann nn (TU Dresden/ Institute for Applied Physics/Semiconductor Physics) ▸ Pet eter er Za Zahn hn (TU Chemnitz/Faculty of Science, Department of Physics) 5 Dresden Center for Nanoanalysis

NANOANALYTIK-NETZWERK IN DRESDEN Nan anoan analyt alytik: T TU Dresden en DCN und und Fraun unhofer D DFC FCNA Zwei Analytik-Zentren in Dresden: Dresden Alliance for Nanoanalysis - Added value through synergies - Dresden Center for Nanoanalysis (DCN) Dresden Fraunhofer Cluster Nanoanalysis (DFCNA) Rahmen: DRESDEN concept

DCN – VISION & MISSION Vis isio ion ▸ International visible center of competence in the field of 4D materials analysis („4D AMASE“) and European user center Mis Missio ion ▸ Scientific excellence: Leading-edge research ▸ Advanced Materials Analysis for Science and Engineering“ ▸ Service center: Partner for science and engineering schools ▸ Education at internationally highest level 7 Dresden Center for Nanoanalysis

CORE TOOLSET (PLAN) Elec ectron and i nd ion m on micros oscopy ▸ TEM: Tomography, Holography, Low-voltage TEM ▸ SEM: „Workhorse“ SEM/EDX, Next-generation SEM ▸ SEM-FIB: incl. manipulators ▸ 3D Atom Probe X-ray m y micr crosc scopy ▸ TXM: sub-micron XCT , micro XCT Scanni ning p ng probe m e microscop opy ▸ SPM: high time resolution ▸ SPM: high spatial resolution 8 Dresden Center for Nanoanalysis

FIRST TOOLS IN CENTRAL DCN LAB Campus pus TU TU Dres esden den / / Bar arkh khau ausenbau au SEM (scanning electron microscope) / FIB (focused ion beam) FEI Helios NanoLab 650 ▸ XRM (X-ray microscope) Zeiss/Xradia XR-VersaXRM-520 ▸ SPM (scanning probe microscope) … 2Q 2014 9 Dresden Center for Nanoanalysis

28 OCTOBER 2013 Fi First TU TU Dres esde den/D /DCN tool ool move ve-in: F n: FEI Helio lios Nan anolab ab 660 660

DCN-LAB WITH SEM/FIB AND SUB-MICRON XCT Dresden Center for Nanoanalysis

FEI: HELIOS NANOLAB 660 Stand ndort: DCN La Labor bor - Bar arkh khau ausenbau au 16 168 ▸ Tomahawk ion column, down to 500V and up to 65nA, 2.5nm resolution at 30kV ▸ sub-nm e-beam resolution from 1kV to 30kV, 1.5nm at 200V ▸ Multiple GIS for flexibility: Au, Pt, W for deposition and I2 and XeF2 for etching ▸ Manipulator system for precise lift-out ▸ Multiple detectors for ion and electron mode, including ICE for SI and SE

DECENTRAL TOOLS 13 Dresden Center for Nanoanalysis

IMPLEMENTATION OF THE DCN ▸ User policy (finalized 11/2013) Organizational and financial processes ▸ ▸ First service requests ▸ Development of a communication platform (www.tu-dresden.de/dcn) ▸ Joint scientific symposia with Fraunhofer DFCNA ▸ Presentations at fairs etc. with Fraunhofer DFCNA ▸ Strategic partnerships with equipment suppliers 14 Dresden Center for Nanoanalysis

STRATEGIC PARTNERSHIPS WITH INDUSTRY 15 Dresden Center for Nanoanalysis

DCN EVENTS - REVIEW Timelin ine ▸ June 2012 Decision of the management of TU Dresden to establish a central analytics center at TUD ▸ November 2012 Formation of a key team to start the operation of a locally decentral nanoanalysis center at TUD (phase 1) ▸ April 2013 Official opening of the DCN at TU Dresden 16 Dresden Center for Nanoanalysis

APRIL 25, 2013 Of Offici cial al Openi pening of of th the DC DCN N at at TU TU D Dres esden den 17 Dresden Center for Nanoanalysis

APRIL 26, 2013 1st st Nan anoan analy alysi sis S Sym ymposi sium Dresden Center for Nanoanalysis

DECEMBER 2, 2013 1st st Nan anoan analy alysi sis C Colloquiu ium ▸ 14:0 4:00 0 Uhr Uhr: B Begr egrüßu üßung Ehrenfried Zschech (TU Dresden/DCN) ▸ 14:05 4:05 Uhr Uhr: 1D : 1D-Ele lektr ktron onik ik Paradiso Coskina (VDI/VDE) ▸ 14.1 4.10 Uhr Uhr: Künf : Künftige e Rolle d le der N Nanoan analyt alytik ik für M Material ial- und und Prozesse ssentwic icklun klung i in der Halble leit iter erind indust strie rie Udo Nothelfer (UNTeC - Technology Consulting) ▸ 14:35 4:35 Uhr Uhr: Siliz : Silizium um-Nanodräh rähte te als Plat als Plattform für ür rekonfig figur urier ierbar are Schal Sc haltung ngen und n und chem hemisc ische Sensor he Sensoren en Thomas Mikolajick/Walter Weber (TU Dresden) ▸ 15:0 5:00 Uhr 0 Uhr: Hoc : Hocha hauf ufgel elöste Nanoanalyt nalytik f ik für 1D-Ele lektr ktron onik ik: E : Elektro ronen en- und und Ionenm Ionenmikr ikros oskopi pie an an Nanode Nanodevices es Markus Löffler/Aranzazu Garitagoitia/Sayanti Banerjee (TU Dresden/DCN) 19 Dresden Center for Nanoanalysis

▸ 15:50 5:50 Uhr Uhr: P : Produk odukt-Zuver erlässig lässigkeit eit und L und Lebens ebensda dauer er: Kinet Kinetik v von Degr on Degrada dation onsmec echan hanismen en in in nanoel nanoelektron onischen en S Syst stem emen en Ehrenfried Zschech/Oliver Aubel/Sven Niese/Zhongquan Liao (TU Dresden, Fraunhofer DFCNA, GLOBALFOUNDRIES Dresden) ▸ 16:1 6:10 Uhr Uhr: Neue : Neue Ger Gerät ätek ekonzep epte und e und Opt Optik iken f n für ür die die Nano Nano-Rö Rönt ntgent ntomographie hie Thomas Holz/Reiner Dietsch/Markus Krämer/Danny Weißbach (AXO GmbH Dresden) ▸ 16:30 6:30 Uhr Uhr: : Magnetor toresis sistiv tive Sensor Sensoren en f für ür hoc hochg hgen enaue ue, hoc hochdy hdynam amisc ische he M Messun essung v g von on Wink inkel, Weg eg und und elekt elektrischem em St Strom om Rolf Slatter (Sensitec GmbH Lahnau) ▸ 16:50 6:50 Uhr Uhr: Sc : Schlu hlussw swor ort Ehrenfried Zschech (TU Dresden/DCN) ▸ 17:0 7:00 0 Uhr Uhr: Ende : Ende 20 Dresden Center for Nanoanalysis

EUROMAT 2013 – Sevilla 8 - 13 September 2013

DECEMBER 3-4, 2013

UPCOMING EVENTS ▸ July 2, 2014 2nd Dresden Nanoanalysis Symposium together with the10th Nanofair 23 Dresden Center for Nanoanalysis

DCN WORKING GROUP – CONTACTS Sci cientif ific c Coordi dina nator or Ehrenf nfried ed Zs Zschec hech Fraunhofer/DFCNA & TU Dresden/Faculty of Electrical and Computer Engineering, Honorary Professorship Nanoanalysis ehrenfried.zschech@izfp-d.fraunhofer.de Tel. +49 351 88815 543 Administ strat atio ion M Man anag ager Lind Li nda Kriusk sk TU Dresden/DCN linda.kriusk@tu-dresden.de Tel. +49 351 463 41093 24 Dresden Center for Nanoanalysis

DRESDEN CENTER FOR NANO NANOANA NALYSIS www.tu-dresden.de/dcn