Analyst Conference March 24, 2020 SINGULUS TECHNOLOGIES AG Agenda - PowerPoint PPT Presentation

Analyst Conference March 24, 2020

SINGULUS TECHNOLOGIES AG Agenda March 24, 2020 - 2 - 1 Overview Financials 2 SINGULUS TECHNOLOGIES Segments 3 Solar Semiconductor Life Science 4 SINGULUS TECHNOLOGIES Strategy/Forecast

SINGULUS TECHNOLOGIES AG Introduction SINGULUS TECHNOLOGIES AG - Innovations March 24, 2020 for New Technologies - 3 - State-of-the-Art Equipment Supplier in Combination with Market Orientated Technology Know-How THIN FILM DEPOSITION WET CHEMICAL for an wide range of coating is used in an wide range of applications, applications for the enhancement of for the cleaning, etching, structuring and surfaces with specific functionalities surface treatment of substrates. • Sputter (PVD) deposition • Cleaning/washing • Evaporation (thermal • Etching/polishing • Texturing evaporation) • PECVD (ICP, µ-Wave) • Coating and Developing • AACVD (aerosol assisted CVD) THERMAL PROCESSING SURFACE ENGINEERING is used at photovoltaic and can be used to archive a wide range of semiconductor applications, core focus functional and optical properties on on high temperature and diffusion different substrates and materials. processes. • Embossing • Rapid thermal processing • Injection molding • Conditioning • Plasma cleaning & etching • Annealing • Lacquering & bonding

SINGULUS TECHNOLOGIES AG Agenda March 24, 2020 - 4 - 1 Overview Financials 2 SINGULUS TECHNOLOGIES Segments 3 Solar Semiconductor Life Science 4 SINGULUS TECHNOLOGIES Strategy/Forecast

SINGULUS TECHNOLOGIES AG Financial Key Figures March 24, 2020 - 5 - in million € 2018 2019 Revenues 127.5 79.4 Order Intake 86.8 39.7 Order Backlog (31.12.) 66.0 26.3 EBIT 6.8 -8.2 EBIT adjusted -4,9 EBITDA 9.1 -4.1 Result before Tax 4.8 -10.3 Result for the Period 0.8 -11.3 Operating Cash Flow 2.5 -3.2 Shareholders’ Equity 19.7 7.0 Total Assets 104.1 83.7

SINGULUS TECHNOLOGIES AG Profit & Loss Statement March 24, 2020 - 6 - in million € 2018 2019 Gross Revenues 127.5 79.4 Net Revenue 125.9 77.9 Gross Profit 35.4 22.4 • R & D -8.2 -6.5 • Sales & Customer Service -14.2 -11.0 • GM & A -8.5 -10.2 • Other Income/Expenses 2.3 0.4 • Impairment Expenses 0.0 -3.3 OPEX -28.6 -30.6 EBIT 6.8 -8.2 (in % of Net Revenues) 5.4 -10.5 Net Result 0.8 -11.3 EPS (basic ; €) 0.09 -1.27

SINGULUS TECHNOLOGIES AG Balance Sheet March 24, 2020 - 7 - in million € 2018 2019 Available Cash 13.5 14.8 Restricted Cash 14.3 4.4 Total Current Receivables and Other Assets 35.5 16.8 Total Inventories 17.1 15.5 Non Current Assets 23.7 32.2 Total Assets 104.1 83.7 Total Current Liabilities 50.2 38.2 Total Non-Current Liabilities 34.2 38.5 Total Equity 19.7 7.0 Equity and Liabilities 104.1 83.7

SINGULUS TECHNOLOGIES AG Cash Flow Development March 24, 2020 - 8 - in million € 2018 2019 Cash Flow from Operating Activities 2.5 -3.2 Cash Flow from Investing Activities -4.4 -5.6 Cash Flow from Financing Activities -11.3 10.0 Total Cash Flow -13.2 1.2 Liquid Funds at the Beginning of the Fiscal Year 27.2 13.5 Effect of Exchange Rate Changes 0.2 0.1 Changes in the Scope of Consolidation -0.7 0.0 Liquid Funds at the End of the Fiscal Year 13.5 14.8

SINGULUS TECHNOLOGIES AG Employees March 24, 2020 - 9 - Δ Dec.2018 Dec. 2019 SINGULUS Group +8 343 351 Domestic +3 293 296 Abroad +5 50 55

SINGULUS TECHNOLOGIES AG Sales Split by Segments 2019 March 24, 2020 - 10 - Semiconductor 7.7 % Life Science 35.6 % 56.7 % Solar 2018 Life Science 22.4 % Semi- Life conductor Science Solar Solar 70.4 % Semiconductor 7.2 %

SINGULUS TECHNOLOGIES AG Sales Split by Region 2019 March 24, 2020 - 11 - 55.5 % Asia 17.0 % Americas Europe 27.1 % Africa & Australia 0.4 % 2018 Europe 20.4 % Asia 67.5 % Americas 11.5 % Africa & Australia 0.6 %

SINGULUS TECHNOLOGIES AG Shareholder Structure March 24, 2020 Status: March 23, 2020 - 12 -

SINGULUS TECHNOLOGIES AG Agenda March 24, 2020 - 13 - 1 Overview Financials 2 SINGULUS TECHNOLOGIES Segments 3 Semi- Life conductor Science Solar SINGULUS TECHNOLOGIES Strategy/Forecast 4

SINGULUS TECHNOLOGIES AG PV Heading in the Terrawatt Range March 24, 2020 - 14 - 66 TW • Rapid introduction of PV globally is fueled 54 TW by availability oft cost-competitive, distributed energy Solar • By 2018, about 500 GW have been installed Source:Shell/Fraunhofer 22 TW 5 TW

SINGULUS TECHNOLOGIES AG PV Solar Drives Strong rebound in Renewable Capacity March 24, 2020 Expansion - 15 - The IEA expects renewable electricity generation capacities to increase by 50 percent or 1.200 GW between 2019 and 2024. Growth in GW Expansion for PV by 720 GW. Source: IEA, 2019

SINGULUS TECHNOLOGIES AG Unsubsidized levelized cost of alternative electricity compared March 24, 2020 to conventional energy sources - 16 - Source: Lazard‘s Levelized Cost of Energy, 2019

SINGULUS TECHNOLOGIES AG General Informations about Crystalline and Thin Film Solar March 24, 2020 - 17 - Comparison Crystalline vs. Thin Film Silicon Wafer Material • High cell & Module efficiency • Largest Market Share • Advanced technology potential • Production split on different locations Thin Film Solar - Glass or Flexible Material • Excellent stability • Good low light (incl. shade) performance • Reduced sensitivity to overheating • Full values chain in production • Lower energy consumption in production (per WP) than with c-SI

SINGULUS TECHNOLOGIES AG CNBM March 24, 2020 Announced Steps of Investment - 18 - City of Bengbu, City of Meishan, City Weihai, City Xuzhou, Province Anhui Province Sichuan Province Shandong Province Jiangsu Each 300 MW Fab comprises 1.5 GW 1.5 GW 1.5 GW the following Machines: 1.5 GW 10 CISARIS 2 VISTARIS 2 SELENIUS 2 nd step LOI 300 MW Existing LOI 1 st step 1 st step 1 st step 1 st step 300 MW for 300 MW Order Order Order in discussion 300 MW 300 MW 150 MW Existing LOI Order for 150 MW signed for 5 CISARIS January 15, 2020

SINGULUS TECHNOLOGIES AG CIGS Factory City of Bengbu, Province Anhui March 24, 2020 - 19 - Example: VISTARIS Sputtering system Status City of Bengbu 1 st Step • 5 CISARIS, 2 VISTARIS, 2 SELENIUS • 150 MW CIGS Production running • Additional 5 CISARIS for ramp up to 300 MW already delivered and in acceptance testing 2nd Step • LOI for the next 300 MW signed

SINGULUS TECHNOLOGIES AG CIGS Factory City of Meishan, Province Sichuan March 24, 2020 - 20 - Example: CISARIS Selenization furnace Status City of Meishan 1 st Step • 5 CISARIS, 2 VISTARIS, 2 SELENIUS delivered • Start of installation for 150 MW CIGS Production summer 2020 • LOI for 5 CISARIS for ramp up to 300 MW

SINGULUS TECHNOLOGIES AG CIGS Factory of City Xuzhou, Province Jiangsu March 24, 2020 - 21 - Example: SELENIUS Evaporation Equipment Status City of Xuzhou 1 st Step • Order received for 5 CISARIS, 2 VISTARIS, 2 SELENIUS • First down payments received • Delivery planned for end 2020

SINGULUS TECHNOLOGIES AG CIGS Factory of City Weihai, Province Shandong March 24, 2020 - 22 - Example: VISTARIS Sputtering system Status City of Weihai 1 st Step • In discussion

SINGULUS TECHNOLOGIES AG Production Lines for Crystalline Solar Cells March 24, 2020 - 23 - Processflow PERC (Passivated Emitter and Rear Contact) Solar Cell PERC Solar Cell production lines, with an average efficiency range up to 22% (mono)

SINGULUS TECHNOLOGIES AG Production Lines for Crystalline Solar Cells March 24, 2020 - 24 - Processflow HJT (Heterojunction) Solar Cell Test incoming Cleaning and A-Si:H Frontside A-Si:H Backside TCO Front & Backside Wafer (mono) Texturing Deposition Deposition Deposition (Wet Chemical) (PECVD) (PECVD) (PVD) Testing and Metallization Sorting (Screen Printing & Annealing)

SINGULUS TECHNOLOGIES AG Key Production Steps for Heterojunction Solar Cell March 24, 2020 Manufacturing - 25 - SILEX II GENERIS PVD

TOPCon – SINGULUS TECHNOLOGIES AG March 24, 2020 Chemical Treatment and Plasma Coating - 26 - Tunnel Oxide Passivated Contact Solar Cells LINEX a) inline alkaline texturing b) advanced cleaning c) wet chemical tunnel oxide using ozone d) single side processes (polishing, layer or mask removal, oxidation) GENERIS PECVD a) plasma tunnel oxide b) (i,n,p) poly-Si layer c) SiNx:H and AlOx / SiNx:H passivation and ARC layers GENERIS PVD (process in development) a) plasma tunnel oxide b) (n,p) poly-Si layer

LINEX – Wet Chemical Inline Processes SINGULUS TECHNOLOGIES AG March 24, 2020 - 27 - Features • High throughput performance up to 8.200 wph • Integration of ozone • alkaline texturing • single side and immersion etching • tunnel oxide formation • High uptime up to 98 • High throughput and best performance • Low cost of ownership • 5 Lane R&D tool in pilot production • 10 Lane production tool in design • Low breakage rate down to 0.05 % • Best footprint