A CAD/CAM approach for layer- -based FIB processing based FIB processing A CAD/CAM approach for layer ���������� ����� ��������������������������������������� ���������������������� ���������������������������
µ SAPIENT project µ µ µ ���������������������������
CHARPAN project CHARPAN Technical Principle APS Ion Source programmable Condenser Optics Aperture Plate System Aperture Plate Blanking Plate Deflecting Electrodes 1st Lens 200x reduction Deflected Beamlets electrostatic ion projection optics Stopping Plate at Beam Cross-Over 2nd Lens CHARPAN POC tool: 43.000 ion beams working in Substrate / Stage parallel within 25 µm x 25 µm exposure field ���������������������������
CHARPAN project programmable Aperture Plate System (APS) ion beam from single source Aperture Plate Blanking Plate (MEMS on CMOS chip) Blanking & unblanked blanked Ground beam Electrodes beam 2 - - 5 5 µ µm m 2 200x 200x ��������������������������� 10 - - 25 nm at Substrate 25 nm at Substrate 10
CHATPAN tool performance ���������������������������
Approach 3D data creation CAD software Data export STL translator Data validation and STL manipulation repair software GDSII translator and Slicing of the STL model viewer Setting-up of process Simulation software parameters Lithography software FIB data processing ������������������ ����������!�����������"�#������ ������������������������ ����������������������������� �������������� Proc. IMechE, Part B, accepted ���������������������������
3D data creation and export 3D data creation CAD software Data export STL translator Data validation and STL manipulation repair software GDSII translator Slicing of the STL model and viewer Simulation Setting-up of process software parameters Lithography software FIB data processing ���������������������������
Data validation and repair 3D data creation CAD software Data export STL translator Data validation and STL manipulation repair software GDSII translator Slicing of the STL model and viewer Simulation Setting-up of process software parameters Lithography software FIB data processing ���������������������������
Slicing of the STL model 3D data creation CAD software Data export STL translator Data validation and STL manipulation repair software GDSII translator Slicing of the STL model and viewer Simulation Setting-up of process software parameters Lithography software FIB data processing Layer-by-layer Grey tone ���������������������������
Errors due to surface faceting STL data (10x10 arrays square lenses) GDSII stream Number of Error File size File size triangles Binary ASCII (from STL in binary format) 63 layers 569 layers 348000 0.044 nm 17100 KB 63000 KB 2400 KB * 22800 kB * 102000 0.16 nm 5000 KB 16840 KB 2400 KB * 22800 kB * ���������������������������
Data compatibility CATS screen shots of the top GDSII layer (# 52) CATS screen shots of the lens GDSII model segmented in trapezoids for e-beam patterning prepared for e-beam pattering with a resolution of 1 nm: with a resolution of: a) 10 nm, b) 5 nm and c) 1 nm. a) layers 49 to 52; b) layers 39 to 52. ���������������������������
Setting-up of process parameters 3D data creation CAD software 250 nm Data export STL translator before sputtering Data validation and STL manipulation repair software sputtered GDSII translator Slicing of the STL model and viewer Setting-up of process Simulation software parameters ion intensity optimized with Ionshaper Lithography FIB data processing software IonShaper TM ??? GEANT4 ??? ���������������������������
FIB data processing 3D data creation CAD software Elphy Quantum Data export STL translator Lithography hardware and software Data validation and STL manipulation repair software GDSII translator Slicing of the STL model and viewer Simulation Setting-up of process software parameters Lithography FIB data processing software ���������������������������
Template structuring and validation through S-FIL process � Template manufacture � NIL imprinting (S-FIL) $���%����������� !&'����(������ ���������&&����� 2 um ���������������������������
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